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HOW SMALL CAN WE TAKE THIS? ART OF MINIATURIZATION Timeline of MEMS and MEME Micro-Electrical-Mechanical Systems Micro-Electrical-Mechanical Equipments Same fabrication techniques used for electrical VLSI So what are MEMS? Microelectromechanical systems (MEMS) ► ► ► small integrated devices or systems that combine electrical and mechanical components range in size from the sub micrometer (or sub micron) level to the millimeter level, and there can be any number, from a few to millions, in a particular system MEMS extend the fabrication techniques developed for the integrated circuit industry to add mechanical elements such as beams, gears, diaphragms, and springs to devices. Timeline of MEMS 1750s First electrostatic motor (Benjamin Franklin, Andrew Gordon) Silicon discovered 1927 Field effect transistor patented (Lilienfield) 1947 Invention of the transistor (Germanium) at Bell Telephone Laboratories. (23 December) 1948 Schockley, Bardeen, and Brattain won the Nobel Prize 1954 C.S. Smith., “ Piezoresistive effect in Germanium and Silicon” 1955 The IC concept was conceived by several groups, and included RCA's Monolithic Circuit Technique for hybrid circuits Timeline of MEMS Piezo Pressure Sensors 1958 Silicon strain gauges commercially available 1958 Jack Kilby of Texas Instruments in 1958, using Ge devices 1959 A patent was issued to Kilby A few months later, Robert Noyce of Fairchild Semiconductor announced the development of a planar Si IC 1961 First silicon pressure sensor demonstrated (Kulite) Timeline of MEMS Timeline of MEMS Surface Micromachining 1967 Invention of surface micromachining (Nathanson, Resonant Gate Transistor) Sensors and MicroMirror 1970 First silicon accelerometer demonstrated (Kulite) 1977 First capacitive pressure sensor (Stanford) 1980 K.E. Petersen, “ Silicon Torsional Scanning Mirror” Timeline of MEME Side Drive Motor 1982 Disposable blood pressure transducer (Foxboro/ICT, Honeywell, $40) 1984 First polysilicon MEMS device (Howe, Muller) 1988 Rotary electrostatic side drive motors (Fan, Tai, Muller) Electro Comb Drive Actuator 1989 Lateral comb drive (Tang, Nguyen, Howe) Commercial Polysilicon Surface Micromachining 1992 MCNC starts the Multi User MEMS Process (MUMPs) ADXL and DRIE of SOI 1993 First surface micromachined accelerometer sold (ADXL50) 1994 XeF2 used for MEMS 1994 Bosch process for Deep Reactive Ion Etching is patented Timeline of MEME BioMEMS and Optical MEMS 1995 Bio-MEMS comes of age 1998 The premiere of Star Wars shown on TI’s Digital Mirror Device 2000 Optical fiber switches becomes big business What is the Next Big MEMS Things? Optical MEMS Projection displays Diffractive optics Optical-fiber switches Adaptive optics, photonic crystals Sub-wavelength structures are well suited for implantation in MEMS This will lower the cost and also add functionality Promising application areas include environmental monitoring biomedicine security optical interconnects surveillance optical wireless communications MEMS Patents issued by year Figure 1. Worldwide and U. S. patents on MEMS as a function of year. The total number of patents in this distribution is 861, of which 247 are from the U. S. Patent Activity MEMS Folks like bugs?! First Commercial Product MEMS – Become Optical ► Reflective metal Gold Aluminum Optical MEMS become Commercial DLP System 2x2 Optical Switch Cross State Bar State NxN Optical Link 3D Optical Switch Agilent Bubble Switch MEMS Add/Drop Sensor: Spectrometer on Chip References ► ► ► ► ► ► ► http://mems.colorado.edu/c1.res.ppt/ http://www.csa.com/hottopics/mems/abstracts_s.php http://www.aero.org/publications/helvajian/helvajian1.html Manchester University Experimental Transistor Computer 1953 http://www.computer50.org/kgill/transistor/trans1.gif Close-up of the Experimental Transistor Computer http://www.computer50.org/kgill/transistor/trans2.gif