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Novel dual-Vth independent-gate FinFET circuits Masoud Rostami and Kartik Mohanram Department of Electrical and Computer Engineering Rice University, Houston, TX Laboratory for Sub-100nm Design Department of Electrical and Computer Engineering Outline Introduction and motivation Background Dual-Vth independent-gate FinFETs Logic design Simulation results Conclusions and future directions 2 Introduction Technology scaling Process variations Leakage power Short channel effects Planar double-gate FETs and FinFETs Compatibility with planar CMOS Scalability Suppression of short channel effects Low parametric variations High Ion/Ioff 3 Motivation Conventional FinFETs Tied-gate devices Independent-gate FinFETs Removing top oxide Electrically isolated, electrostatically coupled gates Muttreja, Agarwal, and Jha, ICCD, 2007 Caciki and Roy, IEEE TED, 2007 Tawfik and Kursun, Microelectronics Journal, 2009 Motivation Conventional FinFETs Tied-gate devices Independent-gate FinFETs Low-power logic gates Disabled, reverse-biased back-gate Independent-gate logic gates Merge parallel transistors, compact logic Motivation Merge series transistors? Dual-Vth independent-gate FinFETs Device design considerations Motivation Merge series transistors? Dual-Vth independent-gate FinFETs Device design considerations Independent-gate dual-Vth FinFETs Logic design opportunities Compact logic gates New family of logic gates Delay+power+area evaluation Background FinFET Cross-sectional view Front Gate tox Source n+ tsi Channel (undoped) L Back Gate Underlap Drain n+ Background FinFET models University of Florida double-gate (UFDG) Physics-based, good agreement with manufactured devices Fin height, silicon thickness, S/D doping, underlap, gate electrode work-function Predictive technology model (PTM) Modeled as two parallel coupled SOI devices 9 Background Finfet threshold voltage VT Φms and Cox tuning Independent-gate FinFETs Electrically isolated, electrostatically coupled Vth-dependence model [Colinge 2008] Vth-front = Vth-front0 – δ (Vgbs – Vth-back) if Vgbs < Vth-back Vth-front = Vth-front0 in all other cases Substrate-like effect in planar CMOS 10 Dual-Vth FinFETs Φms tuning Two additional mask steps Cox tuning through tox Asymmetric oxides [Masahara, IEEE EDL 2007] Device design using UFDG model Dual-Vth FinFETs IDS (A) VDS = 1V VGS (V) Dual-Vth FinFETs TCAD simulations (2D Sentaurus) Same device geometry 2D Sentaurus UFDG Dual-Vth FinFETs UFDG 2D Sentaurus Dual-Vth FinFETs Good Vth separation Good noise margin (approx. 0.5Vdd) Leakage current in high-Vth device pA for low-Vth devices nA for high-Vth devices in disabled-gate mode Comparable to 32nm CMOS Dual-Vth logic gates Rules for pull-down and pull-up network: Parallel structure ↔ series structure “Weak” AND-like high-Vth transistor ↔ “strong” ORlike low-Vth transistor 16 Dual-Vth logic gates Novel dual-Vth logic gates Novel logic gates Independent back-gate as independent input n-input gate with n, n+1, …, 2n inputs Example f = (a + b)(c + d) n = 2, 12 unique combinations Some competitive, some not Exponential in n Occupancy problem Series-parallel graphs Functionally equivalent, electrically different gates Results Technology libraries for n = 3 Basic library Traditional INV, NAND, NOR, AOI, OAI Previous work library = Basic library + Compact gate with parallel transistors merged Low power gates with disabled back-gate Merged series = Previous work library + Dual-Vth logic gates, with series transistors merged as appropriate Complete library = Merged series library + Novel dual-Vth logic gates Results ISCAS and OpenSPARC circuits Area (no. of fins), delay, total power Improvements: Basic, Previous work, Merged series Area savings: 27%, 23%, 12% Delay improvement: 7%, 7%, 1% Total power: 24%, 21%, 15% Static power 10-100X higher, but net contribution negligible Dynamic power Dominates Improvements with proposed complete library significant Conclusions Dual-Vth FinFET design Gate work-function Oxide thickness UFDG-based search and 2D TCAD validation Compact merged series-parallel logic gates Novel dual-Vth logic gates New opportunities for FinFET-based design Leakage power control Underlap as a design parameter Double gate devices Reduction in relative strength of gate Two gates bring more electrostatic stability Double gate devices have: Less DIBL, GIDL and leakage power Better Ion/Ioff Better subthreshold slope Fabrication issues (alignment, etc) 22 FinFET FinFETs are folded channel MOSFETs Easy manufacturing process Narrow vertical fin(s) stick up from the surface [1] [1] D. Hisamoto, et al, “FinFET—A Self-Aligned Double-Gate MOSFET Scalable to 20nm”, IEEE Tran on Electron Devices 23 FinFET cross view Can you see the underlap? Front Gate Tox Source n+ Channel-Undoped Tsi Drain p+ Length Back Gate Channel engineering unfeasible Different strength for each gates is possible by tuning: Work–function Oxide thickness 24 Outline Introduction and motivation Device characteristics Circuit innovation with FinFET and results Future directions and conclusion 25 I-V curves (current vs. drain voltage) 26 PMOS NMOS Off-current On-Current -3 10 -3 10 -4 10 Ids Ids Ids Ids -4 10 -5 10 Tied-Gate Vbg=0 Vbg=-.4 Tied-Gate Vbg=0 Vbg=-.4 -5 -6 10 0 0.1 0.2 0.3 0.4 Vds Vds 0.5 0.6 0.7 0.8 10 -0.8 -0.7 -0.6 -0.5 -0.4 Vds Vds -0.3 -0.2 -0.1 0 Backgate and discrete “width” Disabling the backgate: An order of magnitude less on-current Less static leakage Suitable for off-critical paths The height cannot be changed across chip Stronger devices by adding parallel fins [1] Gate sizing will be a discrete problem W = n.Hfin n=1,2,… [1] J. P. Colinge, “FinFET and other multi-gate transistors”, chapter 1 and 7, Springer, 08 27 DC properties No dopant in channel: No random dopant fluctuations No Coulomb scattering => Higher mobility Higher concentration of traps Higher flicker noise and noise figure Due to 3D structure Much higher heat transmission resistance Danger of thermal runaway [1] Performance degrades less in alleviated temperatures [1] J. H. Choi, et al, “The Effect of Process Variation on Device Temperature in FinFET circuits”, 2007 28 Analog devices The unavoidable underlap Big source and drain resistance Less gm Less FT gm/2π(Cgs+Cgd) Also due to new fringing capacitances Still better gm/gds Good for gain of amplifiers Not a very good SNR reported in ADCs and LCOs Due to high flicker noise and charge trapping 29 Sample RF circuit Fast coupling of two independent gates can be exploited for building a compact low-power mixer A mixer for down converting the RF signal LO=1.8 GHz RF=1.6 GHz IF=1.8-1.6 =200Mhz Very good THD FFT of Mixer Output 30 Outline Introduction and motivation Device characteristics Circuit innovation with FinFET and results Future directions and conclusion 31 Innovative circuit techniques Disabling the backgate Merging parallel transistors Merging series transistors A novel class of static logic 32 Disabling the backgate Disabling backgate increases the threshold voltage Less leakage and slower Suitable for non-critical paths New gate has less Cin, too Because the driver; sees less ‘gates’ 33 Merging parallel transistors If either of the gates is active; we still have a channel Works like an OR function [1] Suitable for non-critical paths. Less static leakage and dynamic power (due to Cin) Higher sensitivity to parametric variation [1] V. Trivedi, et al, “Physics-Based Compact Modeling for Nonclassical CMOS”, 2005. 34 Merging series transistors Series transistors can be merged if the transistor acts like an AND gate [1] It has low resistance; only if both of the inputs are active Best design parameters chosen by SPICE simulation Oxide thickness and gate work-function tuning [1] M. Chiang, “High-Density Reduced Stack Logic Circuit Techniques Using Independent-Gate Controlled Double-Gate Devices”, IEEE Tran On Electron Devices, 2006 35 Why not use these ideas concurrently? 36 The main contributions Rules for pull-down and pull-up network: Parallel structure=> series structure and vice versa. “Weak” type (AND-like) transistor => “strong” type (OR-like) and vice versa No substrate effect in FinFET Transistors can be stacked in pull-up or pull-down network more easily Many more complex gates are possible! 37 New gate Pull-down Boolean equation: PD = (a+b) * (c+d) Pull-up Boolean equation: PU = (~a*~b) + (~c*~d) PU and PD are complement Static logic 24 different gates realized by just four transistors Just 3 Boolean functions with CMOS 38 Results All the gates were simulated using UFDG model The logical effort [1] model of each model was calculated Technology libraries were constructed ISCAS85 benchmarks were mapped Addition of the new gates showed XX improvement in area YY improvement in power [1] R.F. Sproull and D. Harris, Logical Effort: Designing Fast CMOS Circuits, Morgan Kaufmann, 1999. 39 Outline Introduction and motivation Device characteristics Circuit innovation with FinFET and results Future directions and conclusion 40 Conclusions FinFET devices has a huge potential for replacing the planar CMOS technology They have: Better Ion/Ioff ratios Better SCE suppression Possibility of a second independent gate Innovative circuits were designed exploiting independent gate of FinFET Savings in area and power consumptions observed 41 Future work Near term: Completing the Synopsys chain Using backgate for performance tuning Offline/online Clustering? Long term: SRAM Issue due to discrete width Design centering FinFET based RF circuits Amplifiers 42