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Chabot ENGR 45 AMAT Tour
B85 Maydan Technology Center
Nic Celeste
SRP Chamber Engineering
30 September 2013
Applied Materials Confidential
Contents
 General Rules
 Introduction
– Nic Celeste
– How does ENGR 45 relate to my job?
 About Applied Materials
 Clean Room Safety
– Gowning
– Hazards
– Emergency Protocol
 Tour
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Applied Materials Confidential
General Rules:
• NO PHOTOGRAPHY• Keep your Phones away.
• Visitor badges on at all times.
• Be Respectful• This is a real lab, people are here trying to do their job.
• Don’t Touch• This is a research lab. The equipment is dangerous, and things are
expensive.
• Be alert• This is a big group, don’t be in the way of people trying to work.
• There are many potential hazards in the lab.
• Pay attention to where you are and what is moving around you.
• Ask Questions!
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Applied Materials Confidential
Introduction
Applied Materials Confidential
Introduction
 Nic Celeste, EIT
[email protected]
– Mechanical Engineer
• Selective Removal Products
– R&D Hardware engineer: I solve hardware problems and design parts for a Plasma CVD
machine that etches silicon wafers.
– Really cool stuff I get to do:
• Build brand new parts & machines that have never existed before
• Work with sophisticated tools and brilliant people
• Shape the future of material technology
– San Francisco State Graduate, BS ME 2012
• Transfer from Chabot/ Las Positas 2004-2010
• Thermal/Fluids Emphasis at SF State
– Background in Welding, Fabrication, Quality Control, Assistive Mobility
technology, Automotive & Construction (Electrical)
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Applied Materials Confidential
How does ENGR 45 relate to my job?
 Every problem that we solve is related to materials.
– Particularly their Electrical, Chemical, Thermal, & Mechanical
properties.
 The tool I work on removes silicon by creating and
removing oxides.
 Our main Mechanical Engineering challenges:
– Uniformity & Particles
• Uniformity:
– Our process is thermally sensitive.
– Parts need to transfer heat to maintain thermal uniformity across the wafer.
• Particles:
– Our parts cannot corrode or sputter in the chamber.
– We must design with materials that react predictably with our process
chemistry and plasma.
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Applied Materials Confidential
About Applied Materials
Slides From “Corporate Overview” Presentation
Applied Materials Confidential
WHAT WE DO
We make the equipment
that makes the components
that change the world.
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Corporate Overview – Data as of Q3 FY13
Applied Materials Confidential
Top 10 Worldwide Semiconductor
Equipment Manufacturers
2011 Rank
2012 Rank
CY2012
Sales ($M)*
2
1
5,513.4
Applied Materials
1
2
4,887.5
ASML
3
3
4,219.0
Tokyo Electron
5
4
2,834.6
Lam Research
4
5
2,463.5
KLA-Tencor
6
6
1,483.6
Dainippon Screen Manufacturing
9
7
1,423.4
Advantest
11
8
1,137.7
Hitachi High-Technologies
7
9
1,006.8
Nikon
8
10
965.2
Semi Industry Status – Data as of Q3 FY13
ASM International N.V.
12,226.3
Others
38,161.0
Total Market
358.4
OEM Elimination
37,802.6
Net Total Market
* Includes service and spares. flat panel display equipment not included.
Source: Gartner ( Published annually in April)
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Company
Applied Materials Confidential
Applied’s Technology Enabling Tablet PC
Display
Enabled by Applied Materials’
PE-CVD, PVD, test,
and Roll-to-Roll equipment
(>30% of tablet BOM*)
Semiconductor
Enabled by Applied Materials’
Silicon Systems
equipment - microprocessor
256MB DRAM
16GB MLC NAND Flash
I/O controller
multi-touch controller
(>20% of tablet BOM*)
Source: iFixit, UBS, Applied Materials
* Refers to % of Bill of Materials processed by Applied Materials equipment
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Corporate Overview – Data as of Q3 FY13
Applied Materials Confidential
Enabling and Accelerating Innovation
Applied Materials is the
global leader in providing
manufacturing solutions for the
semiconductor, flat panel display
and solar photovoltaic industries
OUR STRENGTHS
Precision materials
engineering
Commercializing
sophisticated systems
Global reach
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Corporate Overview – Data as of Q3 FY13
Applied Materials Confidential
R&D Investment
FOR THE PAST DECADE,
~$1Billion invested
annually in RD&E
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Corporate Overview – Data as of Q3 FY13
Applied Materials Confidential
The Most Exciting Industries on Earth
Semiconductor
Display
Solar
20,000,000x
20x
5x
reduction in
reduction in
reduction in
COST PER TRANSISTOR
COST PER AREA
COST PER WATT
in 30 years
1
in 15 years
2
In 1976, a 32GB smartphone
would have cost more than
4 BILLION DOLLARS
1 Source: SIA, IC Knowledge LLC
2 Source: Display Search, Nikkei BP, Applied Materials
3 Source: Photon Consulting 2012
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Corporate Overview – Data as of Q3 FY13
Applied Materials Confidential
in 4 years3
Enabling Mobility Age
14
More Transistors
New Architectures
Performance at
Low Power
Moore’s Law
Scaling
3D
Transistors
Mobile End
Markets
Corporate Overview – Data as of Q3 FY13
Applied Materials Confidential
Business Segments
Silicon Systems
Group
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Corporate Overview – Data as of Q3 FY13
Display
Energy and
Environmental
Solutions
Applied Materials Confidential
Applied Global
Services
Silicon
Systems Group
A global leader in the
manufacture of advanced
semiconductor equipment
Applied equipment is enabling the
key advancements in semiconductor
processing technology that make
tomorrow’s devices possible.
With unmatched expertise in
precision materials engineering,
we help our customers address
consumer demand for higher
performance and lower power
consumption solutions.
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Corporate Overview – Data as of Q3 FY13
Global expansion of the consumer base is driving
demand for mobile PCs, smart phones and other
types of consumer electronics
Applied Materials Confidential
Display
World class TFT-LCD*
equipment and services
Extending core equipment
technology into new mobility
and other high-performance
Display segments
The equipment we build uses
scale to help make flat panel
TVs more than 20% larger each
year without price increase
Exploring emerging display technologies, such as
touch panel, flexible substrate and OLED which will
drive the future of the screen
* Thin film transistor – liquid crystal display
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Corporate Overview – Data as of Q3 FY13
Applied Materials Confidential
Energy and
Environmental
Solutions
Powering the c-Si Roadmap
Driving technology & innovation to
solve today’s photovoltaic (PV)
manufacturing challenges
Delivering advanced wafering and
integrated cell manufacturing
equipment
Continually improving cell efficiency
while lowering manufacturing costs
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Corporate Overview – Data as of Q3 FY13
Accelerating global PV adoption by delivering cost-effective
solutions that integrate technology, equipment and materials
to increase cell efficiency, improve factory productivity and
lower operating costs.
Applied Materials Confidential
Applied Global
Services
Collaborate with customers
to predict and solve problems.
Improve equipment and fab
productivity.
Broad, flexible portfolio for
custom solutions
Advanced predictive and
diagnostic technologies
Innovative technology extension
and conversion
World-class expertise and
knowledge-base systems
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Corporate Overview – Data as of Q3 FY13
Optimizing efficiency of semiconductor, display
and solar factories through integrated services,
spares, equipment and automation software.
Applied Materials Confidential
Clean Room Safety
Applied Materials Confidential
BASIC CONTAMINATION CONTROL
Contamination
is:
A foreign substance that has a
detrimental effect on products or
processes.
Applied Materials Confidential
BASIC CONTAMINATION CONTROL
RELATIVE SIZES
WIDTH OF A HUMAN HAIR
60 microns
SMALLEST
VISIBLE
PARTICLE (20
MICRONS)
BLOOD CELL (7
MICRONS)
1 MICRON
CONTAMINANTE
1
7
10
20
30
40
MICRON SCALE
Applied Materials Confidential
50
60
BASIC CONTAMINATION CONTROL
SKIN FLAKE EXAMPLE
Skin Flake Defect - 1 micron line
width
Applied Materials Confidential
BASIC CONTAMINATION CONTROL
CLEAN ROOM CLASIFICATIONS
PARTICLES PER CUBIC FOOT AT 0.5 MICRON
CLASS 10,000 CLASS 1,000
CLASS 100
CLASS 10
CLASS 1
With the improvement of clean room technology and design these standards will
have to be upgraded.
Applied Materials Confidential
Clean Room Safety
• Once we leave this room we will head up to the Clean Room
• Gowning• I will demonstrate proper Gowning for the clean room upstairs.
• Room 1:
• Shoe Covers
• Hair Net
• Face Mask/ Beard Cover
• Gloves
• Room 2:
• Gown Head to Toe:
• Head Cover
• Coveralls
• Boots
• Safety Glasses.
• IN CASE OF EMERGENCY: DO NOT DEGOWN. EXIT PROMPTLY
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Applied Materials Confidential
Let’s Start
The Tour!
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Applied Materials Confidential