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Transcript
Crosslight For Power Semiconductor Devices APSYS: CSuprem: 2D/3D Semiconductor process simulator Based on Stanford University Suprem IV Windows based GUI and easy to use interface Real time wizard help support for quick reference Monte Carlo simulation capable AutoTCAD for Design of Experiment Read both process and device simulation files Plot potential, electric field, impact ionization, etc. Curve plots: I-V, Smith Chart, Band diagram, etc. Automatically extracts threshold voltage 3D rotation, 2D/3D cut, surface plot, etc. Advanced 2D/3D Semiconductor device simulator Electrical, thermal, optical and mechanical simulation Simple mixed mode (resistors, capacitors and Inductors.) Complete material library for compound applications Multi-quantum well and advanced physics available MaskEditor/SemiCrafter: CrosslightView: Version 5.0 No need to have separate software to create structures Direct GDSII import Automatically generates the files for 3D simulation Capable of layout all shapes of design for devices Directly input Csuprem process code 3D Diffusion/Segregation Example: Full 3D Quasi-3D 3D Hexgonal Gate Structure: 3D Vias and Interconnect Simulation: GaN HEMT Power Device: Threshold Voltage Auto-Extraction: Surface Plot of E- Field: SJ VDMOS BJT Current Magnitude: