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Physics of Semiconductor Devices Impurity scattering Problem When a semiconductor is doped, the mobility decreases due to impurity scattering. Undoped GaAs 2 cm2 has an electron mobility of 8500 cm V s at 300K . After doping, the electron mobility reduces to 7100 V s . What is the scattering time associated with impurity scattering? Hint: the total scattering time will be shorter than the scattering time associated with impurity scattering since there will also be scattering from phonons. The eective mass of electrons in GaAs is 0.067me . Attention: The parameters are changing everytime. These results are calculated with the above mentioned values. Useful physical constants: Electron mass: Elementary charge: me = 9.11 ∗ 10−31 kg e = 1.602 ∗ 10−19 As Useful formulas: Note: m∗ ...eective mass τsc ...total scattering time τsc,lattice ...scattering time caused by phonons (temperature dependent) τsc,impurity ...scattering time caused by impurity (mostly temperature independent) Mobility: µ= |e| ∗ τsc m∗ (1) Matthiessen's rule (The rule to nd the total scattering time): 1 1 1 = + τsc τsc,lattice τsc,impurity 1 (2) Solution: Scattering time of undoped GaAs: 2 τsc,lattice = 0.067 ∗ 9.11 ∗ 10−31 kg ∗ 8500 ∗ 10−4 m m∗ ∗ µundop Vs = 3.24 ∗ 10−13 s = e 1.602 ∗ 10−19 (3) Total scattering time: 2 τsc 0.067 ∗ 9.11 ∗ 10−31 kg ∗ 7100 ∗ 10−4 m m∗ ∗ µdop Vs = 2.705 ∗ 10−13 s = = e 1.602 ∗ 10−19 (4) Scattering time caused by impurity: 1 1 1 = + =⇒ τsc,impurity = τsc τsc,lattice τsc,impurity 2 1 1 τsc − 1 τsc,lattice = 1.638 ∗ 10−12 s (5)