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0.1 pF – 180 pF, 1% Tolerance 0402 RF Capacitor Capacitance Stability from 1 MHz to Several GHz* * Patent Pending Haim Goldberger Vishay Intertechnology, Inc. Phone: +972 (3) 5570966 [email protected] Tony Troianello Vishay Intertechnology, Inc. Phone: +1 714-573-0150 [email protected] Abstract Silicon-based technology has been identified as ideal for use in high-precision capacitors for high -frequency applications such as wireless communications devices, smart cards, etc. Development criteria include the following: • use of widely accepted advanced technologies with long history of reliability; • simple, mass processing for high precision at low cost; • unlimited material supplies available throughout the world; • process stability for repeatable high yield of tight tolerances with no trimming necessary; • product configuration that would solve major board assembly problems; • low profile for smart card applications; • product characteristics that would yield higher capacitance density, higher capacitance values per volume; • product performance that would assure lower parasitic inductance, lower or equivalent ESR, higher selfresonant frequencies, and tighter tolerances than previous capacitance technologies. This paper will discuss the technologies involved and present data comparing a new silicon-based capacitor to other high-frequency capacitor technologies presently used. I. Design Objectives and Construction Details: In the last decade or two, semiconductor production has been greatly refined in materials, processes, producibility, cost reduction, repeatability, reliability, and simplicity. In contrast, there have been few significant innovative advances in passive components. So the search for a significant advance in a high Q, high frequency capacitor centered on the semiconductor processes instead of the traditional capacitor processes. The resultant product yields a true RF capacitor with a ten-fold increase in capacitance density based on simple, low cost, high reliability semiconductor processes, and on materials economically available throughout the world. Photo 1: HPC 0402 integrated silicon RF Capacitor with single-sided contacts. Solder Passivation Conductor TABLE 2. Process Yields & Capacitance Density vs. Technology, offered by leading manufacturers of precision RF capacitors. SiO2 Si Fig. 1 Technology Fig. 1 shows a cross-sectional drawing of the HPC0402 capacitor. In this configuration, the high-conductivity silicon forms the base plate of the capacitor. A proprietary process forms a void-free silicon dioxide dielectric that is very thin (in the order of 0.05 to 3 microns depending upon capacitance), very uniform (variation of less than 0.4% across a wafer for 10pF), and very repeatable (less than 1% variation from lot to lot.) This makes it possible to produce tight tolerance capacitors without trimming. This is highly desirable because trimming changes the high frequency characteristics of the capacitor. That is, the same capacitance value, in the same capacitance tolerance, in the same capacitor model, from the same capacitor manufacture will have different RF performance from lot to lot. Tables 1 and 2 compare the integrated silicon capacitor to the other leading RF capacitor technologies. TABLE 1. Capacitance vs. Size vs. Technology, as offered by leading manufacturers of precision RF capacitors. Process stability w/o trimming w/o sorting HPC LTCC ThinFilm Semiconductor MLCC (LTCC) Thin Film +/-2% +/-15% +/-9% Max Capacitance values Up tp 200pF Up to 15pF Up to 22pF Capacitance density 0.27pF/mil2 0.02pF/mil2 0.03pF/mil2 II. Configuration/ Mechanical Effects: The wraparound terminations of the standard chip configuration reduce the resistance in the terminations, but they add inductance at the same time. They also require more board space than necessary. An 0402 size chip requires 25 to 45% greater length than the actual chip for the mounting pads, depending on the manufacturer’s recommendations. Additionally, there is a tendency for wraparound terminations to tip up on one end during board assembly when the solder at each end either melts or solidifies unevenly, an effect known as “tombstoning”, see Fig 2. M1 LTCC - 0402 LTCC - 0603 LTCC - 0805 T3 ThinFilm - 0402 T1 ThinFilm - 0603 T2 ThinFilm - 0805 ThinFilm - 1210 HPC0402 0 50 100 150 200 Capacitance (pF) HPC Silicon Capacitor, Si/SiO2 integrated process. Thin Film Capacitor, deposited SiO2 on ceramic. LTCC , multi-layer chip capacitor 250 T1 = Surface tension of liquid solder T2 = Tack force of solder paste. T3 = Weight of the chip. M1= Moment lifts chip upright. Fig. 2 termination on the same pad. The corrective action increased the SRF by 0.08 Ghz, approx 4%. Tombstoning requires costly off-line testing and rework to correct the problems. If only 0.5 % of the mounted components exhibit this behavior, and there are 10 components per board, then approximately 5% of the boards will need rework. The HPC0402 single-side contact configuration was developed to eliminate the tombstone effect in board assembly by placing both contact pads only on the bottom surface of the chip (See Fig 5). Sometimes the chip is not completely lifted at one end but, though still with a good electrical and mechanical connection, is positioned with one end raised higher than the other, see fig. 3. T2 T1 T2 T1 = weight of chip. T2 = Tack force of solder paste. Fig 5 Fig 3. In high frequency applications the added inductance of the raised connection significantly affects the high frequency performance of the mounted capacitor. 1000 1500 2000 3000 0.02 A -25 0.048 -20 0.02 B -15 0.048 S21(dB) -10 2500 0.02 500 0.07 0 -5 0 Instead of a force tipping the chip upward, all forces act to draw the chip down tight against the board, eliminating the tombstone effect, and assuring the best high frequency performance. The silicon-based singlesided contact configuration also requires less spacing between chips; shorter traces result in lower resistance and inductance in the circuit. Additionally, the flatter surface and the more uniform edges of the silicon, compared to a LTCC ceramic 0402 chip, means less dropped components and less shifting of position at pickup, so pick and place equipment can be operated at a faster speed with less skewed devices and less rework. -30 -35 -40 0.02 Fig. 4 0.06 Frequency (MHz) Measured on Agilent E5071A A Fig. 4 illustrates the difference in performance. Curve A shows the high frequency performance of a 12 pf, +/- 2 % capacitor with wraparound terminations, with one end intentionally raised only 15 mils and its SRF at 2.13 Ghz. Curve B shows the high frequency performance of the same chip after rework to reduce the length of the solder B Fig 6 C III. High Frequency Performance, Comparison by Technology: Among the chief design objectives in the development of the integrated silicon capacitor were high Q, high selfresonance frequency (SRF), and a high degree of capacitance stability. The following tables compare the resultant HPC capacitor’s RF performance against the other leading RF capacitor technologies. Figures 7 through 9 show that the integrated silicon capacitor exhibits significantly greater capacitance vs. frequency stability than the other RF capacitors available. Cap(pF) vs. Freq. (MHz) 10pF 22 HPC ThinFilm LTCC 20 Cap (pF) 18 16 14 12 10 8 1 1000 2000 Freq. (MHz) 3000 Measured on Agilent 4287A + 16197A Fig. 8 Capacitance vs. Frequency 10pF, 0402 size Cap(pF) vs. Freq. (MHz) 47pF Cap (pF) The attached drawing (Fig. 6-A) shows the 0402 pad design recommendations from several major suppliers of high frequency chip capacitors. Each manufacturer’s chip is shown mounted on his own recommended pads. Fig 6-B also shows how the HPC0402 would fit on these same pads. It can be seen that the HPC can be immediately used on boards already laid out to accommodate the conventional 0402 chip with wraparound terminations. However, the board space required for the HPC0402 is 25% to 45% less than that needed for the conventional 0402 chip, see Fig_6-C. A board designed specifically to mount the HPC0402 would save a considerable amount of space, but more importantly, it would produce better high frequency performance. That is, components can be placed closer together, board traces can be shorter, trace resistance can be decreased, parasitic inductance/capacitance can be decreased, and the resulting high frequency performance would be much better. 140 120 100 80 60 40 20 0 HPC; not avialable in other technologies 1 1000 2000 Freq. (MHz) 3000 Measured on Agilent 4287A + 16197A Cap(pF) vs. Freq. (MHz) 3.9pF Cap (pF) 6 Fig. 9 Capacitance vs. Frequency, 47 pf, 0402 size HPC ThinFilm LTCC 5 Figures 10 through 12 show that the integrated silicon capacitor has a Q as good as, or better than, any other RF capacitor technology available in the 0402 size. 4 3 1 1000 2000 Freq. (MHz) 3000 Measured on Agilent 4287A + 16197A Fig. 7 Capacitance vs Frequency, 3.9pF, 0402 size Q vs. Freq. 3.9pF 1000 HPC ThinFilm LTCC 800 600 400 200 0 1 1000 2000 3000 Freq. (MHz) Measured on Agilent 4287A + 16197A Q Factor Fig.10 Q vs. Frequency, 3.9pF, 0402 size Q vs. Freq. 10pF 1000 900 800 700 600 500 400 300 200 100 0 HPC ThinFilm LTCC 1 1000 2000 3000 Freq. (MHz) Measured on Agilent 4287A + 16197A Fig.11 Q vs. Frequency, 10pF, 0402 size Q vs. Freq. 47pF 500 The most formidable problem in cell phone design is in the difficulty of matching the output impedance of the power amplifier to the input of the antennae. Typically, the designer is able to calculate and predict the capacitance values in this circuit only 50-70% of the time. The exact values must then be determined in the lab. Often, particular capacitors are characterized at the circuit frequency, with capacitors tested at 1 MHz. For example, a circuit that requires 13 pF at 2.7GHz uses a capacitor that tests 8.2 pf at 1 MHz but has been characterized as being 13 pF at working frequency. The capacitor has been characterized to fit within a frequency-dependent envelope, broadening towards the phone’s operating frequency. The designer fits the characterized capacitor into the circuit and selects the capacitance values that work best. However, the capacitor supplier has a 9-15% process variation, depending upon technology and must therefore trim/sort capacitors to value to supply the +/- 1-5% tolerances typically used in the power amplifier impedance matching circuit. When the capacitors are trimmed their plate areas are changed and the capacitors no longer have the same frequency characteristics. Similarly, the dielectric thickness changes from lot to lot, adding to the causes for non-uniform frequency performance. These variations not only make it necessary for the designer to select the workable values in the lab, they virtually assure that the production phones will operate differently from the ones produced in the lab. A capacitor with greater capacitance vs. frequency stability, and with no trimming to value, would greatly reduce, if not totally eliminate, this problem. HPC; not avialable in other technologies 400 Q Factor Typical Applications: A. Process uniformity affects RF performance, impedance matching. Capacitance vs. Frequency 17.00 300 16.00 LTCC + ThinFilm 8.2± 0.1pF 15.00 200 100 0 1 1000 2000 Freq. (MHz) Measured on Agilent 4287A + 16197A 3000 Capacitance (pF) Q Factor IV. 14.00 HPC 12pF ±1% 13.00 12.00 11.00 10.00 HPC 8.2pF ±0.1 9.00 8.00 0 Fig. 12 Q vs. Frequency, 47pF, 0402 size 500 1000 Measured on Agilent 4287A + 16197A 1500 2000 2500 3000 3500 Frequency (MHz) Fig 13 Figure 13 shows the frequency variation of a sampling of LTCC, Thin Film SiO2, and HPC integrated silicon capacitors. In this case the user had to start with LTCC and Thin Film capacitors of 8.2 pf to have a 13 pf capacitor at the working frequency of 2.7 Ghz. Because of the greater capacitor vs. frequency stability, the user would use a 12 pf HPC0402 for the same application. It can be noted in the graph that the LTCC and the Thin Film capacitors fall within a spread of about 10% at 2.7 Ghz, while the integrated silicon capacitor falls within a spread of only 1%. Normally, the designer starts with a capacitor tolerance of 1 % to hold the capacitance envelope to 10% at the working frequency. Broadening the initial tolerance broadens the envelope as well. Substitution of the HPC capacitor, with its much tighter envelope at 2.7 Ghz, allows the designer all of three new options: 1. Tighten the circuit tolerance at working frequency, 2. Extend the working frequency to higher frequencies with no expansion of the capacitance envelope. 3. Start with a much more economical initial 5% or even 10% tolerance. Using a 5% tolerance instead of a 1% tolerance RF capacitor reduces the capacitor cost by 50%, a significant savings made possible by the frequency-stability and lot-to-lot uniformity of the integrated silicon capacitor. B. Low Profile, High Capacitance to Size Ratio, Contactless Smart Cards. A typical contactless Smart Card is comprised of an ASIC or microprocessor, a capacitor, and an antennae mounted on a flexible plastic card. When triggered by an interrogating signal the smart card transmits its stored data. . Because the card is flexible and the capacitor is very thin, less than 0.3mm, the mounted capacitor must be kept to the smallest possible board area to avoid component breakage. Thus, 0402 size capacitors are desired for system reliability. Moreover, designers tend to increase antennae turns in order to avoid the need for a tuning capacitor. Conversely, the number of turns should be decreased to optimum value to improve the working range of the card. In order to achieve the desired resonance frequency, a capacitance value of 100pF to 180pF should be selected. But for these capacitance values an 0805/0603 size chip would be needed, and this reduces reliability due to greater susceptibility to bending damage. The low profile HPC, with capacitance up to 180 pf in the 0402 size, allows the production of Smart Card with the highest reliability and greater working range. Summary: Table 3 summarizes the comparisons among the different RF capacitor technologies and Table 4 lists the main advantages of the integrated silicon capacitor. Table 3. Comparison by Technology, Key Features of RF Capacitors. Capacitance tolerance Capacitance stability vs. frequency Capacitance variation (batch to batch) High capacitance capability Resistance Q HPC Very Good Very Good Very Good High Good Good LTCC Good Good Low Poor Very Good Good ThinFilm Good Good Good Poor Very Good Good Table 4. Main Advantages of the HPC0402 Integrated Silicon Capacitor. • • • • • • • • • • • • • • Capacitance stability per frequency 10 fold capacitance for the same size 10 fold capacitance density Low profile Ultra high SRF Low parasitic inductance High Q Low ESR Tight tolerance No tombstone effect Eliminates board assembly problems Use directly on existing pads Reduce board size 25-45 %. Cost effective In summary, the new high HPC0402 integrated silicon capacitor provides the highest capacitance in an 0402 size, exhibits greater capacitance stability at higher frequencies, enables designers to improve high frequency performance at the board level as well as at the component level, and reduces assembly cost at the same time.