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SuperIOr™ Controller
The SuperIOr™ Controller is a game changer in the world of high speed embedded control.
The system combines incredible speed of both control and communication with revolutionary
configurable distributed interlocks. It features customizable remote modules that allow precise
tailoring of I/O with customer configured field connects.
This document provides an introduction and overview of the SuperIOr™ Controller family of
products. For further details, please contact:
Ray Gorski - Director, Sales & Marketing, Digital Dynamics, Inc.
5 Victor Square,
Scotts Valley, CA 95066,
831-461-5724
[email protected]
© Digital Dynamics, Inc., 2014
All Rights Reserved. Patent Pending.
Rev: 5-16-14
1
General Description
The SuperIOr™ Controller is a distributed Input/Output (I/O) control system for embedded
OEM machine control applications. The system supports complex control and interlock strategies that require high speed distributed I/O. It can simultaneously manage up to 1000 inputs
and outputs with sub-millisecond response times. Typical applications include automation
of semiconductor and photovoltaic wafer fabrication tools, metrology systems, extrusion and
molding machines, medical manufacturing and analytical equipment.
Each system is composed of a Master Control Module™ (MCM) connected to a network of
Remote Interface Modules™ (RIMs). The system can operate under the control of a customersupplied supervisory host computer or can operate autonomously as the system computer for
the entire machine.
The SuperIOr™ MCM provides precise coordination of as many as 16 configurable Remote
I/O Modules™ (RIMs) distributed throughout a tool. I/O assignment and safety interlocks are
easy to specify using a simple configuration application. Interlocks are electrically programmed
into dual redundant configuration PROMs, providing the ultimate in configurable safety interlock integrity. Any number of I/O points in any combination of RIMs can be interlocked. Interlocks can be easily re-configured, substantially reducing hardware design spins traditionally
needed to accommodate process changes.
SuperIOr™ RIMs are fast I/O subsystems configured to support sensors and actuators
throughout the controlled equipment. Each RIM is configured with multiple plug-in I/O cards
specifically designed for machine control applications. The I/O cards support high-resolution
analog and fast digital inputs and outputs, as well as precision temperature measurement, P.I.D.
loop control and serial bus communications to smart devices.
RIMs can be installed in close proximity to the components with which they interface (up to 250
cable feet from the MCM). The system is designed to use low cost CAT6 cables to provide redundant communication paths between the MCM and the RIMs thus significantly reducing the need
for complex custom cables usually required to reach I/O points in conventional control systems.
The SuperIOr™ Controller system is the newest family of industrial control products designed
and manufactured by Digital Dynamics, Inc. (DDI) in Scotts Valley, CA. DDI is an ISO 9001
registered company with 40 years of design and manufacturing experience, and a worldwide
installed base of more than 40,000 advanced electronic control systems. The SuperIOr™
Controller system incorporates patent pending technology.
© Digital Dynamics, Inc., 2014
All Rights Reserved. Patent Pending.
Rev: 5-16-14
2
SuperIOr™ Controller System
The marriage of integrated control with distributed I/O!
Provides the advantages of centralized programming
with the flexibility of distributed control.
SuperIOr™ Features SuperIOr™ Benefits
Lightning Fast Response:
Scanning all I/O points at sub-millisecond speed
ensures maximum performance of the machine
under control.
Synchronization Accuracy:
Single Master Control™ provides precise timing
between all I/O points on the machine. Skew
minimization includes automatic compensation
for MCM to RIM cable lengths.
Integrated Safety:
Dual redundant FPGAs are used to configure
hardware safety interlocks independent of CPU
processing.
Intrinsic Output Monitoring:
All digital outputs are continuously monitored to
verify the integrity of the discrete control system.
In the event of an anomalous condition, the
system will automatically deactivate the affected
RIM.
Ease of Configuration:
I/O assignment and safety interlocks are easily
specified and programmed into the configuration
PROMs. Interlocks can be readily re-configured,
substantially reducing the need for hardware
design spins to accommodate process changes.
Scalable and Flexible I/O:
A single SuperIOr™ Controller system can span
the complex I/O requirements of a large-scale
machine with up to 1000 mixed signal I/O points
and up to 16 distributed RIMs.
© Digital Dynamics, Inc., 2014
All Rights Reserved. Patent Pending.
Rev: 5-16-14
3
I/O Versatility:
RIMs can be tailored to machine requirements
using a broad range of DDI industrial I/O cards
including digital and analog I/O, temperature
control and serial communications.
Industry Standard Interface:
The system can support high-speed digital
communications including Ethernet, RS-232,
MODBus/TCP and EtherCAT (coming Q4 2014).
Small System Footprint: Compact, high-density system components save
valuable space in the customer’s equipment.
Improved Cable Routing:
RIMs are connected to the MCM with inexpensive, easily routed CAT6 cables, dramatically
reducing the requirement for long and costly
custom cables.
Customer-specified RIM Connectors: Custom cable connections from the RIMs to their
respective sensors and actuators are short and
simple.
Designed for Industrial Applications: High integrity circuitry ensures reliable and
repeatable control in large and complex
embedded applications.
Logging and Monitoring:
A SuperIOr™ Controller system can be configured to continuously log digital and analog control
signals and deliver the information to a supervisory host upon request. Individual points can be
monitored for dynamically changing high and low
level alarms.
Optional I/O Monitor Display:
Remote terminal displays the state of all I/O and
safety interlocks throughout the system to aid in
system setup and troubleshooting.
© Digital Dynamics, Inc., 2014
All Rights Reserved. Patent Pending.
Rev: 5-16-14
4
SYSTEM SPECIFICATIONS
Ethernet SuperIOr™ Master Control Module (MCM)
The SuperIOr™ MCM is a fast real-time processor that can manage up to 16 remotely distributed RIMs. The MCM coordinates all signals and provides for customer configured safety
interlocks. All interlocks are acted upon in real time by dual redundant FPGA hardware logic,
providing the ultimate in safety interlock integrity. This unique configurable interlock capability dramatically reduces the need to redesign circuit boards to accommodate process or
machine changes.
System Configuration & Programmable Interlocks
ƒƒ Customer configurable I/O mapping.
ƒƒ Up to 64 programmable interlocks using any of the 1000 digital inputs and outputs.
ƒƒ Supports faster and easier design changes under documentation control.
Currently Available Configurations
ƒƒ Ethernet MCM supporting up to 8 RIMs
ƒƒ Ethernet MCM supporting up to 16 RIMs
MCM Dimensions (approx.)
3″H x 9″W x 5″D (76mm x 229mm x 127mm)
Safety
ƒƒ Complies with tool requirements for SEMI S2 and applicable sections of UL 991.
ƒƒ Suitable for use in SIL3 environments as specified in IEC61508.
© Digital Dynamics, Inc., 2014
All Rights Reserved. Patent Pending.
Rev: 5-16-14
5
MCM Front Panel Connectors and Indicators
© Digital Dynamics, Inc., 2014
All Rights Reserved. Patent Pending.
Rev: 5-16-14
6
SuperIOr™ Remote Interface Modules (RIM)
RIM Specifications
The SuperIOr™ RIMs are very fast I/O subsystems configured to pair with various sensors and
actuators throughout your equipment. Configuration is accomplished with a broad family of
robust plug-in I/O cards.
Interface with MCM
ƒƒ High speed dual redundant communication via a single CAT6 cable per RIM
ƒƒ Master control power relay for safety interlock
RIM Configurations
ƒƒ Six Slot RIM (accommodates up to 6 I/O Cards)
ƒƒ Twelve Slot RIM (up to 12 I/O Cards)
ƒƒ Twenty Four Slot RIM (up to 24 I/O Cards)
RIM Dimensions (approx.)
ƒƒ Six Slot RIM: (3″H x 7″W x 4″D) (76mm x 178mm x 102mm)
ƒƒ Twelve Slot RIM: (3″H x 7″W x 7″D) (76mm x 178mm x 178mm)
ƒƒ Twenty Four Slot RIM: (3″H x 11″W x 7″D) (76mm x 28mm x 178mm)
© Digital Dynamics, Inc., 2014
All Rights Reserved. Patent Pending.
Rev: 5-16-14
7
Typical 24 Slot RIM with I/O Cards Installed
© Digital Dynamics, Inc., 2014
All Rights Reserved. Patent Pending.
Rev: 5-16-14
8
SuperIOr™ I/O Cards
A family of industrial plug-in SuperIOr I/O Cards is available to configure RIMs. A wide
variety of card types are available to interface with sensors and actuators throughout the
machine.
TM
D-IN 16 ch. (5V logic)
A-IN 8 ch. Default to 0V
A-OUT 8 ch.
D-IN 16 ch. (24V logic)
A-IN 8 ch. Default to 10V
A-OUT 16 ch.
D-IN 16 ch. Inverted (24V logic)
A-IN 16 ch. Default to 0V
8 ch. AIN + 8 ch. AOUT
D-OUT 16 ch. Sourcing
A-IN 16 ch. Default to 10V
D-OUT 8 ch. OPTO
D-OUT 8 ch. SPST Relay
Thermocouples 7 ch. (J, K, T, etc.)
D-OUT 16 ch. OPTO
RS-232/RS-485, 4 ch.
Overtemp 8 ch. (J, K, T, etc.)
I.D. Card
Additional types are in development and others can be designed upon request.
I/O Monitor Display (optional)
ƒƒ Displays state of all I/O and Safety Interlocks throughout the system.
ƒƒ Displays system information.
ƒƒ Available app. for customer laptop computer or optional tablet via MCM serial connection.
Development Process
1. Begin by defining all the I/O used throughout the machine, and then consider logical groupings based on geographical distribution.
2. Identify size and quantity of RIMs your tool will need. DDI can assist you in this analysis to
determine the optimal allocation of I/O cards and RIMs.
3. Define tag names associated with each input and output and correlate them with I/O card
designations in RIMs. Certain outputs will be classified as safety outputs.
4. Work with DDI to develop a schematic for each RIM and a spreadsheet for defining your
safety interlocks. Customer sends DDI a schematic or we can develop it for you.
5. Typically the customer does a wiring diagram of the connections and connectors needed
then DDI will layout the PCB and mechanical designs on our CAD systems.
6. DDI handles all manufacturing challenges of component sourcing, assembly and quality
control, then delivers a complete, plug-in-ready solution.
© Digital Dynamics, Inc., 2014
All Rights Reserved. Patent Pending.
Rev: 5-16-14
9
Application Example: Semiconductor Manufacturing Tools
Semiconductor manufacturing requires precision control. A typical tool utilizes hazardous gases,
heaters, RF generators, turbo pumps, liquid baths, mechanical hoists and robot transfer arms. A supervisory computer may orchestrate the overall activity by sending commands to I/O
controllers which, in turn, activate the various pumps, valves and generators.
These controllers must always operate safely and their digital outputs in particular are interlocked with various safety inputs to prevent operation unless all safety interlocks are satisfied.
A typical example of a controlled subsystem would be an RF generator. The generator is
controlled with an analog voltage to set its power level and has a voltage read back to show its
power level. An overall enable signal requires 24 volts to be present to enable the generator.
Before the generator can be enabled, there must be adequate cooling water flow and the cover
on the RF section must be in place.
In a conventional control approach, the signals would be routed to I/O points on the control
system and a custom printed circuit board would be designed to implement the safety interlock
string.
Using a SuperIOr™ Controller for this application, a RIM located near the RF generator would
be configured with the appropriate I/O cards to read the flow switch, cover switch, and power
level read-back and to generate the “enable” and “set-point” signals. The SuperIOr™ MCM
would be configured to implement the necessary interlock logic in its dual-redundant FPGAs.
The RIM would be connected to the MCM by a CAT 6 cable, eliminating the need to run the
control signals back to the MCM and eliminating the need for a customized printed circuit board
to implement the interlock logic.
To obtain complete data and specifications for the SuperIOr™ Controller, please contact:
Ray Gorski - Director, Sales & Marketing, Digital Dynamics, Inc.
5 Victor Square,
Scotts Valley, CA 95066,
831-461-5724
[email protected]
© Digital Dynamics, Inc., 2014
All Rights Reserved. Patent Pending.
Rev: 5-16-14
10