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Silicon photonics for advanced optical communication systems Zhiping Zhou Xingjun Wang Huaxiang Yi Zhijuan Tu Wei Tan Qifeng Long Mei Yin Yawen Huang Optical Engineering 52(4), 045007 (April 2013) Silicon photonics for advanced optical communication systems Zhiping Zhou Xingjun Wang Huaxiang Yi Zhijuan Tu Wei Tan Qifeng Long Mei Yin Yawen Huang Peking University School of Electronics Engineering and Computer Science State Key Laboratory of Advanced Optical Communication Systems and Networks Beijing 100871, China E-mail: [email protected] Abstract. Recent progress on Si-based optical components for advanced optical communication systems has been demonstrated. The polarization beam splitter with extinction ratio of more than 20 dB and the optical 90-deg hybrid having phase deviation within 5- deg were obtained using multimode interference structures. The 12 Gb∕s modulators and the 20 GHz photodetectors were measured. Benefiting from the unique properties of silicon modulator, an error-free 80 Km transmission of the signals generated by our silicon carrier-depletion Mach-Zehnder modulator was also demonstrated at 10 Gb∕s and the power penalty was as low as 1.15 dB. These results show that silicon photonics has a great potential in advanced optical communication systems. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE) [DOI: 10.1117/1.OE.52.4.045007] Subject terms: silicon photonics; coherent optical communication; modulator; optical hybrid; germanium photodetector. Paper 130311P received Feb. 28, 2013; revised manuscript received Mar. 22, 2013; accepted for publication Mar. 25, 2013; published online Apr. 19, 2013. 1 Introduction The year 2012 was actually another year for rapid development in information technology. New applications and services continue to demand higher bandwidth and more functionalities, which drive advancement of optical communication systems. Among many advanced approaches, coherent optical communication is coming back in a rather strong fashion. Coherent optical communications were studied extensively in the 1980s mainly due to the fact that the high sensitivity of coherent receivers permit much longer transmission distance for the same amount of transmitter power, and the use of coherent detection allows an efficient use of the bandwidth. However, their research and development have been interrupted for nearly 20 years behind the rapid progress in high-capacity wavelength division multiplex (WDM) systems using erbium doped fiber amplifiers (EDFAs). The advancement in digital signal processing (DSP), particularly, the demonstration of digital carrier phase estimation in coherent receivers in 2005, has awoken a widespread interest in coherent optical communications. Via custom-designed DSP functions for adaptive polarization tracking, chromatic dispersion compensation, and forward error correction (FEC), communication capability was boosted through coherent optical communication systems. Commercial coherent systems for fiber-optic networks were introduced at 40 and 100 Gb∕s in 2008 and 2010, using polarization-division multiplexed (PDM) quadrature phaseshift keying (QPSK) at 11.5 and 28 Gb∕s.1 In research labs, single-carrier 640 Gb∕s has been achieved using PDM quadrature amplitude modulation (QAM) at a symbol rate of 80 Gb∕s.2 However, the complex transmitters and receivers in these systems suffer from high power consumption, large volume, and weak stability of the individual components. To tackle with these problems, one of the best approaches is the monolithic integration of transmitters and receivers. 0091-3286/2013/$25.00 © 2013 SPIE Optical Engineering The use of silicon photonics platform promises a low cost solution since optical, optoelectronic and electronic components may be integrated onto a single chip through mature CMOS technology. 2 System Description A coherent optical communication system includes a transmitter, a receiver and a single local oscillator serving the receiver. The output of the local oscillator is directly fed to one input of a coherent receiver. The transmitter and receiver are the core part of a coherent optical communication system to generate and receive the optical signal. In 2011, one hundred Gigabit Ethernet standards were established. One of the most promising technologies for a 100 Gb∕s coherent optical communication system is the combination of dual-polarization quadrature phase-shift keying (DP-QPSK) signals with a phase and polarization diversity coherent receiver.3,4 For the optical part of transmitter, advanced modulation formats for 100 Gb∕s will be QPSK, requiring half the symbol rate compared with conventional PSK. Moreover, polarization multiplexing could provide another factor of 2 in reduction of the symbol rate, reaching 25 Gb∕s symbol rate per optical tributary. Therefore, the optical modulator in the transmitter needs to have a 25 Gb∕s symbol rate. In addition, other parameters are also very necessary for 100 Gb∕s optical transmitter, such as above 20 dB On/Off extinction ratio (ER), 14 dB optical insertion loss and lower drive voltage (5 V) according to implementation agreement for Integrated Polarization Multiplexed Quadrature Modulated Transmitters by Optical Internetworking Forum (OIF). For the optical coherent receiver, above 20 dB, ER is required to make the transverse electric (TE) and transverse magnetic (TM) separate. Another key component is the 90-deg hybrid that separates the quadrature components of the incident signal using a continuous wave local oscillator reference source, the lessthan 5- deg phase error between the in-phase X-polarization component (XI) and quadrature X-polarization component (XQ) and between the in-phase Y-polarization component 045007-1 April 2013/Vol. 52(4) Zhou et al.: Silicon photonics for advanced optical communication systems (YI) and in-phase Y-polarization component (YQ) were needed.5 The other important component is a high-speed photodetector (PD) with high quantum efficiency and highpower handling capability. For above system, 25 Gb∕s, symbol rate per optical tributary, larger than 0.5 A∕W responsibility, and less than 150 nA dark current were required.6 Besides the required high speed operation, energy consumption and cost also play an important role. The usage of silicon photonics promises a reduction of costs because optical, optoelectronic and electronic components can be integrated on a single chip by self-alignment techniques. With support from the National High Technology Research and Development Program (863) of China, we have been working on a 100 Gb∕s coherent optical communication system on SOI substrate in recent years. It consists of a multilevel modulated transmitter and coherent receiver. For the optical transmitter, a multimode interference (MMI) polarizing beam splitter (PBS) was planned on the SOI substrate, in order to achieve high coupling efficiency and polarization splitting. The signal was coupled into the waveguide, and divided into two orthogonal polarized beams, TE and TM. Then one polarized beam entered the upper or lower arms of the Si based Mach-Zehnder modulator to form a multilevel, multiphased signal stream. Finally, two orthogonal polarized signal beams were combined into one, which was transmitted outwards. At the optical coherent receiver end, the similar MMI-PBS was also designed to achieve high coupling efficiency and polarization splitting. The signal beam and local oscillation beam were coupled into the input waveguide of the optical 90-deg hybrid. The optical 90-deg hybrid was designed using a 4 × 4 MMI interferometer structure. Finally the mixed beam was divided into a 2 × 2 two-way balanced Germanium photodetectors to realize coherent detection. In this paper, we will report our progress in Si based photonic components, which are designed and optimized, in the optoelectronics domain, for the purpose of the coherent optical communication. The main goals are to contribute in phase estimation, polarization diversity, linearity, and spectral efficiency. 3 Components As described above, passive and active components are required to form a coherent optical communication system, which are sometimes crucially important to the success of an advanced system. In this section, we will describe our work on the key components for the coherent optical communication system, namely the polarization beam splitter, hybrid, modulator, and the photodetector. 3.1 Polarization Beam Splitter Many approaches have been proposed to realize polarization splitting, such as directional couplers,7 Mach-Zehnder interferometers,8 grating couplers,9 and multimode interference couplers. Among them, we prefer the MMI-based PBS due to their unique properties, including low crosstalk and imbalance, large optical bandwidth, ease of fabrication, and good tolerances. Moreover, a wide variety of materials have been adopted for making the PBSs, such as silica,10 InGaAsP/InP,11 LiNbO3 ,12,13 polymer materials,14 and siliconon-insulator (SOI).9,15 The SOI is selected for compatibility with CMOS processing and for compact design resulting Optical Engineering from the high refractive index contrast between silicon (n ¼ 3.45) and SiO2 (n ¼ 1.46). The geometrical birefringence results in a distinct difference in the MMI self-image length between TE mode and TM mode. Generally, the total length of the device is the least common multiple of lengths of the first self-image of TE and TM modes. In our case, the lengths of the first self-image of TE and TM modes are 517 and 470 μm. Originally, the total length of PBS can be design as 5170 μm that equals 10 times of 517 μm and 11 times of 470 μm. In our work, the quasi-states16 theory is adopted and the length of our device, which is 1034 μm described in following principle, is decreased to one-fifth of the general length of 5170 μm. This compact SOI MMI waveguide outperforms competing polarization splitting behavior, which enables us to integrate the other components, such as modulators in parallel, into a DP-QPSK system. This PBS is designed with the self-image principle and quasi-state (QS) theory. Defined Lπ as the beat length of the two lowest-order modes,17 the length of the first self-image is 3Lπ , which can be calculated in the equation Lπ ¼ π 4n W 2 ≈ r e; β0 − β1 3λ0 (1) where the β is the propagation constants, nr represents the effective index, W e is the effective width and λ denotes the wavelength. The design of PBS meets the length, L ¼ ðm1 ÞðLπTE Þ ¼ ðm2 ÞðLπTM Þ, where m1 and m2 are an even and odd number or vice versa, which separates the TE and TM modes into two outputs. Concerning QS theory, the QS images are formed before or after every normal image in the propagation direction. The beat length between a normal-state and a QS images is just 1∕5 of that between the normal-states. By the approximation of self-imaging principle with power distribution of the lowest five modes, the QS image is used in TM mode and the normal image is utilized in TE mode. Combining the self-image principle with the QS theory, the split length of this MMI device is shortened to be one-fifth of a normally designed MMI split length. At a length of device, one of the outputs comes out the TE mode and the other goes with the TM mode, which results in a PBS in a multimode interference coupler. Figure 1 shows the schematic of the cross-section of a SOI waveguide and the configuration of a MMI coupler of our design. The waveguides are established on the 340-nm-thick top silicon layer between the 1-μm-thick insulator layer and air. The length and width of the multimode interference region are 1034 and 8 μm. The width of the input and output straight waveguides is 2.8 μm. In the 3D-BPM simulation, to keep the extinction ratio more than 15 dB, the theoretical tolerances of width and length are 0.14 μm and Fig. 1 Schematic structure of the PBS based on the QS-MMI coupler. 045007-2 April 2013/Vol. 52(4) Zhou et al.: Silicon photonics for advanced optical communication systems Fig. 2 Tolerances of the width (a) and the length (b) in the multimode interference region. 35 μm for TM, 0.04 μm and 10 μm for TE, as shown in Fig. 2. The scanning electron microscope (SEM) images of the device are shown in Fig. 3, where the ∼ sign means the omitted part which represents the MMI section. The device is fabricated using electron beam lithography and inductively coupled plasma etching. A standard integrated optics setup with a tunable laser, a determined polarization controller (DPC5500) and a charge coupled device (CCD) are used to test the device. For different input polarization states, their output images are shown in Fig. 4. The bandwidths and the extinction ratios are obtained using the optical spectrum analyzer, as shown in Fig. 5. For TE and TM mode, the extinction ratios are 27.3 and 26.6 dB at λ ¼ 1.55 μm, respectively. For the extinction ratio more than 15 dB, the bandwidths are about 20 nm in TE polarization and more than 40 nm in TM polarization with the center wavelength at 1.55 μm. 3.2 Optical 90-deg Hybrid Fig. 3 SEM image of the device. Fig. 4 MMI output images on CCD camera: (a) TE input, (b) TM input. A QPSK system is considered as the most promising approach to increase the transmission capacity. In order to demodulate the signal light, which is modulated by the QPSK system, a multilevel coherent transmission systems consisting of an optical 90-deg hybrid is prerequisite. So far, the proposed methods to realize the optical 90-deg hybrid include star couplers,18,19 array waveguide gratings (AWG),20 and multimode interference couplers.21–24 The disadvantages of star couplers and array waveguide gratings are low transmission efficiency, complicated design, high imbalance, and large footprint. However, the MMI-based hybrids have their unique merits including large optical bandwidth, compact size, low crosstalk and imbalance, and ease of fabrication, as shown in Table 1. Then, we will present our design of the optical 90-deg hybrid using 4 × 4 MMI couplers on silicon-on-insulator (SOI) platform, and show the simulation and experiment results. The transmission efficiency of our Fig. 5 Measured output power as a function of wavelength at (a) port bar and (b) port cross. Optical Engineering 045007-3 April 2013/Vol. 52(4) Zhou et al.: Silicon photonics for advanced optical communication systems Table 1 The advantages and disadvantages of different methods of the optical 90-deg hybrid. Transmission efficiency Design Imbalance Footprint Star couplers Low Complicated High Large AWG Low Complicated High Large MMI High Simple Low Small device is over 95% across C-band, whereas that of the star couplers is only better than 30%.19 The excess loss of our hybrid is about 1 dB, while that of the array waveguide grating is 9.5 dB.20 The 4 × 4 MMI 90-deg hybrid is based on the self-image principle, which is due to the interference between a large numbers of supported modes in multimode waveguides. The device we designed has six ports with two inputs for QPSK signal (S) and local oscillator (LO) signal, respectively, and four outputs used for getting a certain phase quadrature relationship for coherent optical detection. The schematic of the optical 90-deg hybrid is shown in Fig. 6. Based on the influence of the coupler geometry on imbalance and excess loss, the width of the multimode waveguide and the access waveguides are 10 and 1 μm, respectively. And the length of the multimode waveguide can be designed by Lmmi ¼ neff · W 2eff ∕λ, where W eff and neff are the effective width and the effective index of the multimode waveguide, so the optimum coupler length is about 200 μm. We simulate our devices in 340 nm top silicon SOI wafer with fully etching technology. Since the devices are used for C-band transmission, the 4 × 4 MMI couplers are designed at wavelength λ ¼ 1550 nm. An important figure of merit for the 4 × 4 MMI coupler is phase deviation defined as the phase difference between the ideal quadrature phase and actual phase, which determines the system bandwidth. The phase deviation of our 4 × 4 MMI coupler is found below 2.2-deg across C-band in simulation, as shown in Fig. 7. The results, therefore, indicate satisfactory C-band performance of 4 × 4 waveguide couplers. The transmission efficiency is above 98% at 1550 nm, and the excess losses of both two input ports are less than 0.5 dB, which means the extinction ratio is larger than 20 dB and fulfils the system demand. 3.3 Modulator Silicon modulators as essential components of advanced optical communication systems have been extensively Fig. 6 Schematic of the optical 90-deg hybrid with balanced PDs. Optical Engineering Fig. 7 Phase deviation of the 4 × 4 MMI coupler in simulation. studied for their capability of small footprints and high speed, as well as compatibility with CMOS fabrication processes.25–29 There have been several reports on silicon modulators based on the free-carrier plasma dispersion effect.25–28 The silicon Mach–Zehnder modulator (MZM) based on a p-n junction phase shifter operated in reverse bias shows great potential for wideband high-speed performance. Experimentally, modulation speeds of up to 50 Gb∕s have been demonstrated with extinction ratio (ER) of 3.1 dB driven with RF signals of 6.5 Vpp and the total insertion loss is 7.4 dB.29 In our work, we fabricated a carrier-depletion-type modulator with 15 GHz bandwidth. By designing the PN junction and MZI device, low absorption loss and high extinction ratio are obtained to suit better for practical application. The waveguides are 220 nm high and 600 nm wide for less sidewall roughness scattering loss. An offset of 100 nm and an intrinsic gap of 50 nm between n-type and p-type regions are used to enhance the modulation efficiency and decrease the capacitance of the diode. The P and N doping concentrations are about 1 × 1017 ∕cm3 for low absorption loss. The waveguide of phase shifter has a 60 nm slab that is doped to form the PN diode structure for electrical contacts. The Pþþ and Nþþ doping concentrations are about 1 × 1020 ∕cm3 and 500 nm away from the edge of the waveguide to minimize the optical absorption loss. Reversed PN junctions are applied in both arms of our 2 mm long phase shifter in order to keep the absorption balance in MZM. Consequently, the static extinction ratio is about 20 dB driving voltage from 0 to 6 V. We can get the modulation efficiency about 1.52 V·cm and absorption loss about 1 dB∕mm. For 12 Gb∕s operation, an ER of 7.1 dB is achieved, shown in Fig. 8(a), which is driven with an RF signal of 7Vpp . A coplanar waveguide structure has been used to drive the phase shifters, in which the electrodes are 10 μm wide, separated by a 6.4 μm gap with a 30 ohms characteristic impedance. The termination resistance used is 50 ohms and the resulting 3 dB roll-off frequency is 15 GHz at −4 V bias, as shown in Fig. 8(b). Thus, low absorption loss and the large extinction ratio of the Si modulator have been demonstrated in our device, which makes it possible to compete with commercial modulators to benefit the advanced optical communication system. The bandwidth improvement will be presented later by optimizing the RF design. 045007-4 April 2013/Vol. 52(4) Zhou et al.: Silicon photonics for advanced optical communication systems Fig. 8 (a) Eye diagram of Si MZI modulator with 7.1 dB ER at 12 Gb∕s. (b) Normalized optical response of Si MZI modulator against RF frequency at −4 V bias. As one of most important trend in advanced optical communication systems, coherent optical OFDM (CO-OFDM) has been proposed and the proof-of-concept transmission experiments have shown its extreme robustness against chromatic dispersion and polarization mode dispersion.30 Because the most critical assumption for OFDM is the linearity in modulation, transmission, and demodulation, the modulator needs to be linear to avoid signal distortions. Different from conventional LiNbO3 modulator based on linear electro-optic effect-Pockel effect, silicon modulator is based on plasma dispersion effect, which is a nonlinear electron-optic effect in nature. Nonlinearities in the silicon modulator come from the MZ transfer function and the PN junction design, but they might cancel each other.31–33 Also the third-order intermodulation distortion (IMD3) for silicon modulators is a function of the modulator bias point.34 So there are three ways to improve the linearity of a silicon modulator: optimizing the embedded diode structure, changing the optical structure and tuning the bias voltage. Recently, some progresses on research of linearity of silicon modulator have been achieved in theory and experiments34,35 and show that the linearity of an optimized silicon modulator could greatly exceed that of the ideal, linear (e.g., LiNbO3 ) modulator, such as 5.9 dB improvement of SFDR.31–33 Thus, silicon modulator is the most promising linear modulator contributing to the CO-OFDM in advanced optical communication systems. 3.4 Photodetector In advanced optical communication systems, photodetectors function in converting incident light into electrical signals, which can be used to either monitor light intensity variations or detect high-speed optical signals.36 Due to the intrinsic bandgap limitation, bulk Si photodetectors cannot meet the C-band requirements of the wavelength. However, with an indirect bandgap of 0.67 eV, Germanium can offer much higher optical absorption in 1.55 μm wavelength. The fabrication process of Germanium is compatible with the mature CMOS technology. As to the conventional normal incident photodetector, there exists a trade-off between quantum efficiency and bandwidth. Nevertheless, by using the Germanium detector as part of a waveguide, we can get out of the dilemma.37 Since the light propagating direction is perpendicular to that of the collection of the carriers, Optical Engineering high quantum efficiency and high bandwidth can be achieved at the same time in terms of the waveguide-integrated photodiodes. In addition, with the incorporation of optical amplifier in the high-speed digital transmission systems, photodetectors are desired to be capable of handling high optical input power without a significant deterioration of the high frequency signal.38 Conventional normal incident photodetectors demonstrate limited power handling behavior for the reason that the generated carriers are located in a relatively small volume. Under the illumination of a high power light, high carrier density can cause screening effects in the drift region, which will lead to larger drift time. Since the light absorption is spread over a lager region, the waveguide-integrated structures can also overcome this limitation. In order to fabricate a high-speed photodetector for the integrated coherent receiving system, we design a germanium waveguide photodetector, as shown in Fig. 9. Given the tolerance of the fabrication process, we propose a compact germanium photodetector which is 1.6 × 10 μm2 in a top view. The germanium layer is integrated on the top of a SOI rib waveguide and the light in the silicon rib waveguide is evanescently coupled to the overlying germanium layer.39 The dark current-voltage (I-V) characteristics of the photodetector were measured and a low dark current of 0.66 μA at the bias of −1 V was obtained. The 3-dB bandwidth was measured using a vector network analyzer (VNA), which provided measurement capability of 20 GHz. The normalized optical response as a function of frequency is plotted in Fig. 10. As can be seen, the 3-dB bandwidth of our photodetector ended at 20 GHz. Fig. 9 3D schematic structure of the Ge pin waveguide photodetector integrated on top of an SOI waveguide. 045007-5 April 2013/Vol. 52(4) Zhou et al.: Silicon photonics for advanced optical communication systems φ ¼ tan−1 sin Δϕ − 1 ; cos Δϕ (2) where Δϕ s the phase change in the phase shifter. Based on the measured spectra shift to different voltage, the phase change Δϕ to the driving voltage V is Δϕ ¼ −0:02772þ 0:60119 × V − 0:07639 × V 2 þ 0:00806 × V 3 . Considering the propagation of Gaussian input pulses in optical fibers and the initial amplitude modulated through a silicon Mach-Zendner modulator (Si MZM), we can obtain the following equation: 1 þ iC t 2 Að0; tÞ ¼ A0 exp − ; (3) 2 T0 Fig. 10 Normalized optical response versus frequency for the reported germanium photodetector under 3.8 V reverse bias at 1550 nm wavelength. In order to check the viability of our photodetector in the optical communication system, an eye-diagram measurement was undertaken. For the 28 Gb∕s operation, the eye diagram of the modulated optical signal is shown in Fig. 11(a). Then the light was fed into the photodetector under test conditions. We can find from Fig. 11(b) that the eye diagram is still open, even though the input signal is not very good. Overall, the dark current of 0.66 μA and the 28 Gb∕s operation indicate that our photodetector can make for the integrated advanced optical communication system. More precise measurement and further bandwidth improvement are on the way. 4 Applications Based on the unique properties of silicon photonics devices, the applications in advanced optical communication systems have been started to be implemented recently. Our works are focused on the silicon modulator in long-haul transmission taking the advantage of its negative chirping property. Because of the plasma dispersion effect in silicon material, the electronic signal drives the optical nonlinearly. As to the single arm driven silicon MZI modulator, we can get the output phase φ described as below: where A0 is the peak amplitude, T 0 is the half-width at 1∕eintensity point, and chirp parameter nn C has ðC∕T 20 Þt ¼ −∂φ∕∂t. Using above equations and assuming the T 0 is about 40 ps, the average chirp parameter has C ∼ 0.8. This indicates the Si MZM has a negative chirp. The corresponding pulse broadening factor B is shown in Fig. 12(a). In the case of C ¼ 0.8, the pulse width initially decreases and drops to its minimum, and then increase along with longer transmission distance. The B with no chirp and positive chirp are also discussed under same parameters. The pulse widths increase during transmissions and are broaden with lager positive C. Thus, negative C can compress the pulse at short transmission length, and lead to some broadening at long transmission length. The corresponding power penalty is illustrated in Fig. 12(b). Initially, the power penalty Fig. 12 (a) Pulse broadening factor B versus transmission length with different chirp parameters; (b) power penalty versus transmission length. Fig. 11 (a) Eye diagram of the 28 Gb∕s modulated optical signal. (b) Eye diagram of the corresponding electrical signal from the photodetector at −4 V bias. Optical Engineering 045007-6 April 2013/Vol. 52(4) Zhou et al.: Silicon photonics for advanced optical communication systems Fig. 13 Experimental setup diagrams of the Si MZM. Fig. 14 Experimentally measured system-level performance characterization of varying propagation distances compared Si MZM and LiNbO3 MZM at 10 Gb∕s modulation rate. (a) BER curves as the function of ROP; (b) ROP versus propagation distance under 10−10 BER. decreases due to the compressed pulse signal under the compensation of the negative chirp effect. Thus, lower power penalty can be obtained because of the negative chirp of Si MZM. Using the devices presented in Sec. 3, the long-haul transmission is demonstrated. Based on the system in Fig. 13, we demonstrate error-free 80 km transmission by a silicon carrier-depletion Mach-Zehnder modulator at 10 Gb∕s and the power penalty is as low as 1.15 dB. The BER measured data was drawn in Fig. 14(a) and the curves of ROP as the function of distance is described in Fig. 14(b). The power penalties are −0.55, −0.4, and 1.15 dB for 26, 53, and 80 km at the BER of 10−10 . It is smaller than the one of LiNbO3 MZM, which is 1.1, 1.6, and 3.65 dB, respectively. Up to 80 km transmission, the Si MZM can reach 10−10 BER with −12.35 dBm ROP while LiNbO3 MZM requires a higher ROP (−11.75 dBm). After a system level comparative study between our Si MZM and a commercial LiNbO3 MZM, the negative chirp character of the Si MZM is verified in the experiment, which compensates the dispersion deterioration and leads to a low power penalty in long-haul transmission. Therefore, Si MZM is veritably a practical photonic device for future middle- or long-haul WDM transmission systems. 5 Conclusion In order to satisfy the accurate phase estimation, polarization diversity, linearity, and spectral efficiency, high-speed, and low-cost requirements of coherent optical communication, Si based optical components have been studied. The passive components, such as the polarization beam splitter with extinction ratio of more than 20 dB and the optical 90-deg Optical Engineering hybrid having phase deviation within 5 - deg, were optimized and fabricated by using the MMI structure. In active components, the 12 Gb∕s modulator and the 20 GHz photodetectors were experimentally measured. Benefiting from the unique properties of silicon modulator, an errorfree 80 Km transmission of the signals generated by a silicon carrier-depletion Mach-Zehnder modulator was also demonstrated at 10 Gb∕s and the power penalty was as low as 1.15 dB. After a system level comparative study between our Si MZM and a commercial LiNbO3 MZM, the negative chirp character of the Si MZM was verified in the experiment, which compensated the dispersion deterioration and led to a low power penalty in long-haul transmission. These results shows silicon photonics have great potential in advanced optical communication systems. Acknowledgments This work is partially supported by National High Technology Research and Development Program of China (Grant No. 2011AA010302). References 1. P. J. Winzer, “Optical networking beyond WDM,” IEEE Photon. J. 4(2), 647–651 (2012). 2. G. Raybon et al., “All-ETDM 80-Gbaud (640-Gb∕s) PDM 16-QAM generation and coherent detection,” IEEE Photon. Technol. Lett. 24(15), 1328–1330 (2012). 3. C. R. S. Fludger et al., “Coherent equalization and POLMUX-RZDQPSK for robust 100-GE transmission,” J. Lightwave Technol. 26(1), 64–72 (2008). 4. M. G. 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