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16. MODELLING AND DESIGN OF SAW DEVICES 16.1. Objective of the test Get acquainted with acoustic wave devices and design of surface acoustic wave (SAW) filters. 16.2. SAW devices ICs are small and contain many (at present – to 108) elements. At the same time it is important that ICs contain only transistors, diodes, resistors and capacitors. Practically inductive elements cannot be integrated in monolithic ICs. When small ICs appeared the problem of miniaturisation of filters, delay lines and other components that included inductive elements arose. As a result of search of ways to miniaturise mentioned components, surface acoustic wave devices were created. Principles of SAW devices design are revealed in this laboratory test by an example of a SAW filter consisting of input transducer, SAW waveguide, output transducer and absorbers (Fig 16.1). The design goal of the filter is to select material for the waveguide, determine the main filter dimensions, examine its frequency characteristics correspondence to the given specification and make work drawings necessary for fabrication. Input transducer Wavequide A bsorber Output transducer A bsorber Fig 16.1. SAW filter 64 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. 12. 16.3. Preparing for the test: Using lecture-notes and referenced literature [2, p. 145–170], examine principles of operation, structures and properties of acoustic wave devices. Familiarize with design calculations of the SAW filter presented in Appendix (section 16.6). Prepare to answer the questions: Name the types of acoustic wave devices. What properties of acoustic waves are used in SAW electronic components? What effects are used in electromechanical transducers? Name types of bulk acoustic wave devices. Explain the structure and operation of monolithic filter. Characterise its properties. Name and characterise the types of SAW devices. How is SAW filter arranged? Explain the structure and operation of an interdigital transducer. What materials are used for SAW waveguides? Characterize their properties. Describe the structure, operation and properties of a SAW delay line. Describe the structures and operation of dispersive SAW delay lines. Explain the properties and application of optimum filters. 16.4. In laboratory: 1. Answer the test question. 2. According to specified data design SAW filter. Using presented PC programme carry out necessary calculations, plot filter frequency response and examine the results. Repeat the calculations, if it is necessary. Sketch drafts of the filter. 3. Prepare the report. 65 1. 2. 3. 4. 5. 16.5. Contents of the report Objectives. Initial data. Results of calculations and their analysis. Graphs and sketches. Conclusions. 16.6. Appendix. Sequence of SAW filter design calculations The main electrical parameters (central frequency of the passband f0 and bandwidth F of the filter) are presented as initial data for design calculations. The goal of the calculations is to select material for the waveguide, determine main dimensions of filter elements and examine its frequency characteristics correspondence to the given specification. Interdigital transducers (IDTs) are the main elements of a SAW filter consisting of input transducer, waveguide and output transducer. An IDT is shown in Fig 16.2. In the simplest case the filter contains identical IDTs. Then design calculations sequence can be like this. 1. Number of IDT fingers is calculated using the formula: (16.1) N 2f 0 F . Here is a coefficient (=0.6–0.8). 2. The efficiency of an IDT is maximal when N is close to the optimal number Nopt, dependent on substrate material: 2 . N opt k m (16.2) Here k m2 is piezoelectric coupling coefficient (see Table 16.1). 3. If N N opt , the deviation from the optimum is characterised by a coefficient P: P N opt N 2 . (16.3) 4. The step of IDT fingers must satisfy condition: s 2 f0 , where s is SAW velocity. 66 (16.4) L LK a W d b Fig 16.2. IDT of SAW filter The width d of the finger usually is half a step: d 2 . 5. The overlap of IDT fingers must be at least Wmin L s , (16.5) where L is the distance between the input and output transducers, s is SAW wavelength. The distance L is recommended to be 8–10 mm. 6. The IDT length is given by (16.6) Lk N 2 . 7. The substrate length must be (16.7) b L 2Lk l , where l is the distance between IDT and substrate end. 8. The substrate width is given by (16.8) a W 2 l . Selection of filter dimensions and other parameters can be followed by the calculations of its electrical parameters and characteristics: 9. Reflection coefficient B1 of SAW from the IDT, transition coefficient B2 and IDT attenuation B3 (in decibels) are given by 67 Table 16.1. Parameters of piezoelectric materials Material SAW velocity s km/s Quartz LiNbO3 Bi12GeO20 Bi12SiO20 LiTaO3 Piezoceramics 3.15 – 3.2 3.5 – 4.0 1.62 – 1.7 1.7 3.2 – 3.4 2–4 Coupling coefficient k m2 0.0012 – 0.0024 0.005 – 0.058 0.007 – 0.0164 0.018 0.0069 – 0.0093 0.043 Relative dielectric permittivity r 4.52–4.55 25–60 38–45 43–51 100-300 10 lg P 1 P , 10 lg 2 P 1 P . B1 10 lg 1 1 P 2 , B2 B3 2 2 (16.9) 2 10. SAW filter attenuation is given by B 2B3 . 11. Level of distortion signals caused by reflections: Bd 2B3 . 12. Static capacitance of an IDT is given by (16.10) (16.11) (16.12) C0 NC1 W 2 , where C1 is capacitance of a finger given by C1 21 r 6.5s 2 1.08s 2.37 . Here r is relative dielectric permittivity of the substrate material, s is ratio, s d . 13. Radiation resistance Rr of the IDT at f = f0 is given by (16.13) R0 Rr f 0 2km2 2 f 0C1W . 14. To avoid capacitive component of the input resistance of the IDT an inductive element is used in series with the IDT [2]. Its inductance can be find using formula: 68 L 1 4f 02C0 . (16.14) 15. The transfer function of the SAW filter is given by K F j K1 j K j . K 2 jK3 j 4 K1 j0 K 4 j0 (16.15) Here K1 j is the transfer function of the SAW filter input circuit K1 j Z , R jL Z (16.16) where R PR0 , Z Ra f jX a f 1 jC0 , Ra f R0 sin X X 2 , X a f R0 sin 2 X 2 X 2 X 2 , X N f f 0 2 f 0 . K 2 j and K 3 j are transfer functions of the input and output IDTs: K 2 j K3 j sin X . X (16.17) K 4 j is the transfer function of the SAW filter output circuit, consisting of Z, L and load resistance R: (16.18) K 4 j R R Z jL . 16. When the reflected wave is taken into account the transfer function of the SAW filter is given by K j K F j K p exp 2tL , (16.19) where t L is the delay time given by tL L LK p and Kp is transfer coefficient corresponding to attenuation Bd. 69