Download synthesis by plasma-chemical method of coatings from targets

SYNTHESIS BY PLASMA-CHEMICAL METHOD OF COATINGS FROM
TARGETS OBTAINED BY SOL-GEL METHOD
A.V. Rogachev1, D.L. Kovalenko1, C. Costin2, V.E. Gaishun1, V.V. Vaskevich1, D. Luca2
1Francisk
2Alexandru
Skorina Gomel State University, Gomel, [email protected]
Ioan Cuza University, Faculty of Physics, Iasi, Romania
At the present time vacuum [1,2] and sol-gel methods are main perspectives for coating
deposition and widely used for the synthesis of composite materials which have practical
applications in various sectors of industry (electronics, optics, metallurgy, etc.).
The idea of the research is to create complex composite coatings on the surfaces of
materials of different nature (glass, metal, plastic, semiconductor, etc.) from the active gas phase
generated in the process of physical sputtering of a target, representing a xerogels and filmforming solutions synthesized by the sol-gel method.
The essence of the proposed hybrid PVD / sol-gel method of producing coatings is that the
target obtained by the hydrolysis of organometallic compounds or xerogel sol is then subject to
ion-plasma modification and plasma methods in order to obtain surface layers with determined
properties. The sol-gel method allows forming ultradispersed film-forming colloids and organic
compounds of silicon, titanium, germanium, tantalum, and zirconium. To make coatings of
unique physical and chemical properties, dopant salt is introduced into initial sol or xerogel. As
the dopant salt may serve silver, gold, copper, iron, cobalt, etc.
In this work we define the optimal initial organic compounds to form a stable sol of silicon,
titanium, and zirconium and the optimal mode of gelation, drying, heat treatment for the
formation of homogeneous xerogels of 5 mm thickness and a diameter of 40-45 mm. The
obtained xerogels homogeneous with an average surface area of 500 g/m2 and content of 0.5 to
3 wt% of salts dopants.
By electron-beam method we coated surfaces of quartz and silicon from targets prepared by
the sol-gel method on the basis of organic compounds of silicon. We determined optimum
parameters of coating synthesis by electron-beam method - spot size, the flux density, the
distance to the substrate. AFM investigations showed that the coating was formed homogeneous
across the substrate surface. Optical spectroscopy measurements show that coating are optically
transparent in the visible region of the spectrum.
The developed coatings can be applied in various branches of science and technology,
multi-layer antireflection film can increase the efficiency of solar cells by increasing the longwavelength range of the working area of solar cells, and can also be used as anti-reflection
coatings for thermal imagers, night vision devices, etc. Protective SiO2 coating can be applied to
surface planarization in the production of integrated circuits and surface protection IC itself. The
hydrophobic coating may be used for bleaching and the protection of surfaces of spectacle lenses
and making them hydrophobic and to protect metal surfaces from harmful corrosive
environments.
References:
[1] Zhubo Liu, A.A. Rogachev, Bing Zhou, M.A. Yarmolenko, A.V. Rogachev, D.L. Gorbachev,
Xiaohong Jiang, Electron-Beam Deposition of Polyethylene Composite. Coatings at Various Initiators
and Inhibitors. Polymer Engineering & Science Journal, Vol.52 (2012) – P. 2134-2139.
[2] Zhou B., Jiang X.-H., Shen R.-Q., Lu L.-D., Rogachev A.V., Structure and optical Properties of
Metal Doped TIO2 Thin Films Deposited by Electron Beam Evaporation. Journal of Nanjing University
of Science and Technology, Vol.34 №4 (2010) – P. 547-552.