Download 1 st MEMS Commercial Tuning Fork Gyroscope Draper Labs

1st MEMS Commercial Tuning Fork Gyroscope
Draper Labs
Area1mm2 !
M. Weinberg, J. Bernstein, S. Cho, A. T. King, A. Kourepenis, P. Ward, and J. Sohn, “A
micromachined comb-drive tuning fork gyroscope for commercial applications,” in
Proc. Sensor Expo, Cleveland, OH, 1994, pp. 187–193.
A Quartz Tuning Fork Gyroscope
Economy of Scale to Lower Cost
“..high volume occurred once unit prices achieved $3 target prices.”
A Critical Review of MEMS Gyroscopes Technology and Commercialization Status
Steven Nasiri, 408-988-7339 x108, [email protected]
3150A Coronado Drive, Santa Clara, California 95054
Applications
• Automotive: vehicle stability control, rollover detection,
navigation, load leveling/suspension control, event recording,
collision avoidance
• Consumer: computer input devices, handheld computing devices,
game controllers, virtual reality gear, sports equipment,
camcorders, robots
• Industrial: navigation of autonomous (robotic) guided vehicles,
motion control of hydraulic equipment or robots, platform
stabilization of heavy machinery,human transporters, yaw rate
control of wind-power plants
• Aerospace/military: platform stabilization of avionics, stabilization
of pointing systems for antennas, unmanned air vehicles, or land
vehicles, inertial measurement units for inertial navigation
A Critical Review of MEMS Gyroscopes Technology and Commercialization Status
Steven Nasiri, 408-988-7339 x108, [email protected]
3150A Coronado Drive, Santa Clara, California 95054
UI Research Project- Using AUVs to Measure
Magnetic Signature of Naval Vessels
IMU
DAU
Magnetometer
IMU Specifications
Archangel IM3
Data Resolution
Body Rates 0.0006°/second @ 200 Hz
Accelerations 50 μg @ 200 Hz
Data Accuracy
(Gyro IMU Mode) Random Walk 2.5°/√hour (C1)
5.2°/√hour (C2)
Bias Drift 15°/hour
Stability 50°/hr/year
Scale Factor Accuracy 0.1% of Full Scale
Scale Factor Drift 300 ppm, 1 sigma
Cross Axis 0.13% maximum
Data Accuracy
(Accelerometer) Bias Drift 0.2 mg
Scale Factor Accuracy 0.10% of Full Scale
Scale Factor Drift 500 ppm, 1 sigma
Cross Axis 0.13% maximum
Dynamic Range - C1 ±150°/s ±10 g
(Linear) - C2 ±300°/s ±10 g
Bandwidth
(3 db) Rates 40 Hz Maximum
Accelerations 50 Hz Maximum