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Environmental Challenges and Opportunities in Nanoelectronics Manufacturing
Farhang Shadman
Regents Professor (Chemical Engineering; Optical Sciences)
Director of NSF/SRC Engineering Research Center
The University of Arizona
Tucson, Arizona 8572, USA
Manufacturing in nano-scale is not a simple extrapolation of the current and conventional
manufacturing practices. The shift to nano scale creates both major issues as well as
significant opportunities in performance, cost, and environmental impact for electronics
industry. This presentation focuses on both the positive and the negative environmental
impacts of this inevitable paradigm change. The inter-relationship between the three
sustainability factors (performance, cost, and environmental impact) for future electronics
manufacturing will be analyzed. In particular, the challenges related to resource
requirements and utilization (water, energy, and chemicals) will be discussed. Examples
of unique opportunities for environmental gain, that nano-scale manufacturing can
provide, will be presented.