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Keysight Technologies Accurate Evaluation of MEMS Piezoelectric Sensors and Actuators Using the E4990A Impedance Analyzer Application Note Introduction –– Excellent impedance measurement accuracy and repeatability –– Easy evaluation of resonance, anti-resonance, and mechanical characteristics using the impedance measurement method –– A wide variety of analysis functions such as equivalent circuit analysis This application brief describes the benefits of using the Keysight Technologies, Inc. E4990A for device characterization of MEMS piezoelectric sensors and actuators, along with its wide variety of analysis functions and features and how it improves design efficiency. The Keysight E4990A Impedance Analyzer offers excellent impedance accuracy and is an ideal evaluation tool for design and manufacturing test. Figure 1. Keysight E4990A Impedance Analyzer V piezoelectric device + + acceleration + stretch shrink Figure 2. Mechanics of a piezoelectric sensor 03 | Keysight | Accurate Evaluation of MEMS Piezoelectric Sensors and Actuators Using the E4990A Impedance Analyzer - Application Note MEMS Piezoelectric Sensors and Actuators MEMS devices such as accelerometer sensors and micro actuators are often micro-fabricated piezoelectric devices that convert a mechanical displacement to an electric signal (Figures 2 and 3). These piezoelectric devices detect mechanical displacement with the piezoelectric effect. They also transform electric signals to mechanical displacement with an inverse piezoelectric effect. shrink bend stretch piezoelectric device Figure 3. Mechanics of a piezoelectric actuator 04 | Keysight | Accurate Evaluation of MEMS Piezoelectric Sensors and Actuators Using the E4990A Impedance Analyzer - Application Note Highly Accurate Impedance Measurements of Piezoelectric Devices The mechanical characteristics of a piezoelectric device are determined by its structure and can be evaluated electrically by measuring its oscillation mode such as resonance and anti-resonance frequencies. The impedance measurement method is the most accurate method to evaluate the oscillation mode of a piezoelectric device. The E4990A, with a basic impedance accuracy of 0.08%, produces very precise measurements (Figure 4). An impedance versus frequency chart is shown on the E4990A display to identify resonant and anti-resonant frequencies that represent the mechanical characteristics of a piezoelectric sensor and/or actuator (Figure 5). Figure 4. E4990A impedance measurement accuracy chart Figure 5. Measurement example of a resonator 05 | Keysight | Accurate Evaluation of MEMS Piezoelectric Sensors and Actuators Using the E4990A Impedance Analyzer - Application Note A Wide Variety of Analysis Functions and Features The E4990A offers a variety of analysis functions and features to help designers characterize MEMS devices quickly. The equivalent circuit function provides a basic electric circuit model of the MEMS piezoelectric device for quick oscillation mode analysis (Figure 6). Further analysis can be made using an external simulator. The E4990A outputs the measured data in a text format such as a touchstone file so that a vast majority of simulators can read them. The E4990A can store data into memory for comparisons between memory and active traces. Marker search functions such as peak/search and max/min help users easily find targets and obtain necessary information. Figure 6. Equivalent circuit analysis function 06 | Keysight | Accurate Evaluation of MEMS Piezoelectric Sensors and Actuators Using the E4990A Impedance Analyzer - Application Note Summary The Keysight E4990A Impedance Analyzer offers excellent impedance measurement accuracy as well as repeatability. It is the ideal tool for the evaluation and test of the MEMS piezoelectric sensors and actuators. In addition, a wide variety of analysis functions help designers further increase their design productivity. For more information, please refer to the following literature and websites: –– E4990A Brochure (P/N 5991-3888EN) –– E4990A Data Sheet (P/N 5991-3890EN) –– E4990A Impedance Analyzer: www.keysight.com/find/e4990a –– MEMS/NEMS Device Measurement Solution: www.keysight.com/find/mems 07 | Keysight | Accurate Evaluation of MEMS Piezoelectric Sensors and Actuators Using the E4990A Impedance Analyzer - Application Note myKeysight www.keysight.com/find/mykeysight A personalized view into the information most relevant to you. www.axiestandard.org AdvancedTCA® Extensions for Instrumentation and Test (AXIe) is an open standard that extends the AdvancedTCA for general purpose and semiconductor test. Keysight is a founding member of the AXIe consortium. ATCA®, AdvancedTCA®, and the ATCA logo are registered US trademarks of the PCI Industrial Computer Manufacturers Group. www.lxistandard.org LAN eXtensions for Instruments puts the power of Ethernet and the Web inside your test systems. 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