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Keysight Technologies
Accurate Evaluation of MEMS Piezoelectric
Sensors and Actuators Using the
E4990A Impedance Analyzer
Application Note
Introduction
–– Excellent impedance measurement accuracy and repeatability
–– Easy evaluation of resonance, anti-resonance, and mechanical characteristics using the
impedance measurement method
–– A wide variety of analysis functions such as equivalent circuit analysis
This application brief describes the benefits of using the Keysight Technologies, Inc. E4990A for device
characterization of MEMS piezoelectric sensors and actuators, along with its wide variety of analysis
functions and features and how it improves design efficiency.
The Keysight E4990A Impedance Analyzer offers excellent impedance accuracy and is an ideal evaluation tool for design and manufacturing test.
Figure 1. Keysight E4990A Impedance Analyzer
V
piezoelectric device
+
+
acceleration
+ stretch
shrink
Figure 2. Mechanics of a piezoelectric sensor
03 | Keysight | Accurate Evaluation of MEMS Piezoelectric Sensors and Actuators Using the E4990A Impedance Analyzer - Application Note
MEMS Piezoelectric Sensors and Actuators
MEMS devices such as accelerometer sensors and micro actuators are often
micro-fabricated piezoelectric devices that convert a mechanical displacement to
an electric signal (Figures 2 and 3). These piezoelectric devices detect mechanical
displacement with the piezoelectric effect. They also transform electric signals to
mechanical displacement with an inverse piezoelectric effect.
shrink
bend
stretch
piezoelectric
device
Figure 3. Mechanics of a piezoelectric actuator
04 | Keysight | Accurate Evaluation of MEMS Piezoelectric Sensors and Actuators Using the E4990A Impedance Analyzer - Application Note
Highly Accurate Impedance Measurements of
Piezoelectric Devices
The mechanical characteristics of a piezoelectric device are determined by its structure
and can be evaluated electrically by measuring its oscillation mode such as resonance
and anti-resonance frequencies. The impedance measurement method is the most
accurate method to evaluate the oscillation mode of a piezoelectric device.
The E4990A, with a basic impedance accuracy of 0.08%, produces very precise
measurements (Figure 4). An impedance versus frequency chart is shown on the E4990A
display to identify resonant and anti-resonant frequencies that represent the mechanical
characteristics of a piezoelectric sensor and/or actuator (Figure 5).
Figure 4. E4990A impedance measurement accuracy chart
Figure 5. Measurement example of a resonator
05 | Keysight | Accurate Evaluation of MEMS Piezoelectric Sensors and Actuators Using the E4990A Impedance Analyzer - Application Note
A Wide Variety of Analysis Functions and Features
The E4990A offers a variety of analysis functions and features to help designers
characterize MEMS devices quickly. The equivalent circuit function provides a basic
electric circuit model of the MEMS piezoelectric device for quick oscillation mode
analysis (Figure 6). Further analysis can be made using an external simulator. The
E4990A outputs the measured data in a text format such as a touchstone file so that a
vast majority of simulators can read them.
The E4990A can store data into memory for comparisons between memory and active
traces. Marker search functions such as peak/search and max/min help users easily find
targets and obtain necessary information.
Figure 6. Equivalent circuit analysis function
06 | Keysight | Accurate Evaluation of MEMS Piezoelectric Sensors and Actuators Using the E4990A Impedance Analyzer - Application Note
Summary
The Keysight E4990A Impedance Analyzer offers excellent impedance
measurement accuracy as well as repeatability. It is the ideal tool for the evaluation
and test of the MEMS piezoelectric sensors and actuators. In addition, a wide variety of
analysis functions help designers further increase their design productivity.
For more information, please refer to the following literature and websites:
–– E4990A Brochure (P/N 5991-3888EN)
–– E4990A Data Sheet (P/N 5991-3890EN)
–– E4990A Impedance Analyzer: www.keysight.com/find/e4990a
–– MEMS/NEMS Device Measurement Solution: www.keysight.com/find/mems
07 | Keysight | Accurate Evaluation of MEMS Piezoelectric Sensors and Actuators Using the E4990A Impedance Analyzer - Application Note
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© Keysight Technologies, 2015
Published in USA, August 26, 2015
5989-6516EN
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