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Hartmann wavefront sensing Beamline alignment Guillaume Dovillaire SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 1 SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 2 Metrology : Off-line metrology EUREKA Eurostar project SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 6 Off-line metrology Optical head at BNL 1.5 meter long mirrors 50 nrad rms accuracy / 1.2mm resolution HFM and VFM configuration mirror down to 1.5m of radius of curvature 2D slopes maps, height SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 7 Flat mirror characterization Mirror flipped and data flipped Mirror shifted SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 8 Flat mirror characterization Zeiss Silicon mirror on 115mm : R=47km, slopes=0.15 µrad rms Radii of curvature are =43.4km, 43.5km1 and 56.5km Max difference to average is 3.6 E-06 0.8 1/m (280km) On 90mm, differences are below 60 nrad rms A --> B B --> A 0.6 B --> A Offset Gantry Slope error in µrad 0.4 0.2 0 -80 -60 -40 -20 0 20 40 60 80 -0.2 -0.4 -0.6 -0.8 -1 Mirror coordinate in mm SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 9 Toroidal mirror characterization From A to B 7.02 nm rms From B to A and data flipped 0.45 µrad rms 1.39 nm rms 7.51 nm rms 0.46 µrad rms 0.1 µrad rms SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 10 EUV wavefront sensors The Hartmann sensor SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 11 The wavefront Geometrical approach: surface orthogonal to all rays Flat wavefront Collimated beam No aberration Diverging beam Spherical wavefront No aberration Distorted wavefront Some aberrations Beam SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 12 The wavefront Diffraction approach: surface defined by phase = constant i(r) U(r )a(r ).e Amplitude (r ) 2 (r ) Phase In radian In micron In wave SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 13 The wavefront : The Zernike base SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 14 Hartmann wavefront sensors Holes are small enough to create diffraction on the CCD Holes pitch is large enough to avoid crosstalk SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 16 Hartmann wavefront sensors : slopes integration How calculating the wavefront knowing the slopes ? Wave-front estimation from wave-front slope measurements W.H. Southwell, JOSA Vol70, No 8, Août 1980 Six1, j Six, j 2 ix1, j ix, j Pitch hole « Successive Over relaxation method » (jm,k1)(jm,k)Err((jm,k),Pj,k) SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 18 Hartmann wavefront sensors Raw signal on the CCD sensor Measured intensity profile i(r) U(r )a(r ).e Measured wavefront SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 19 HASO EUV EUV 4 to 40nm /75 rms accuracy 72x72 holes SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 21 Beam lines alignment SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 22 Idea 1 : I understand the wave front I measure Astigmatism The benders of my KB do not focus in the same plane Coma One of my KB bender is not optimized My ellipsoid is not aligned Something I don’t know… SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 23 At- alignement of a Kirkpatrick-Baez optics FERMI : KB alignement at 32nm FERMI : Giovanni de Ninno, Lorenzo Raimondi, LOA : Philippe Zeitoun Best wavefront (/4 rms) Intensity map 5.5 x 6.2 µm2 D.L.: 4.1 x 5.9 µm2 5.1 x 6.0 µm2 SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 24 Idea 2 : I want an automatic alignement SLS : automatic control of a KB at 3.5 keV SOLEIL : Mourad Idir – Pascal Mercère – Pierre Lagarde SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 25 Wavefront correction in the tender X-Rays Before correction After correction 7.7 nm rms 30.9 nm PV Knife Edge Scan of Horizontal X-ray beam at LUCIA 2000 Derivative of Knife Edge Data Gauss Fit 2250 1800 1350 FWHM = 2.55 µm 900 450 Derivative of Fluorescence Derivative of Fluorescence 2700 0.8 nm rms 4.6 nm PV Knife Edge Scan of Vertical X-ray beam at LUCIA Derivative of Knife Edge Data Gauss Fit 1500 1000 FWHM = 2.40 µm 500 0 0 -450 5025 -500 5030 5035 5040 5045 5050 Horizontal Position (µm) 5055 5060 5065 -6090 -6080 -6070 -6060 Vertical Position (µm) SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 26 Idea 3: Coupling wavefront measurements and optics simulation software SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 28 Example in visible : telescope alignment Tzec Maun Foundation 1m diameter telescope Modified Cassegrain type SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 29 The simulation tool: Zemax Expected performances /100 rms WFE Diffraction limited PSF SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 30 The measurment tool : HASO4 BB Measured performances /10 rms WFE The coma aberration reduces the images contrast SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 31 The measurement is set in the model The wavefront aberrations are defined by the Zernike coefficients and included in the simulation software SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 32 The optimization process Secondary mirror position is variable SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 33 The result The secondary mirror must be shifted and tilted to remove the measured aberration. Just grab the screwdriver… SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 34 Conclusion SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 35 SOS Trieste| October 4th, 2016 | G. Dovillaire| M COM PPT 2016.01–GD 36