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Varactor Topologies for RF Adaptivity with Improved Power Handling and Linearity K. Buisman, C. Huang, A. Akhnoukh, M. Marchetti, L.C.N. de Vreede, L.E. Larson*, and L.K. Nanver Department of Microelectronics, DIMES, Delft University of Technology, Feldmannweg 17, 2628 CT Delft, The Netherlands, *University of California at San Diego UCSD, La Jolla, CA 92093, USA. To facilitate use of these novel components in linear adaptive wireless applications, flip-chip compatible varactor components have been realized with integrated biasing networks and a MIM capacitor in the RF path to decouple the capacitance tuning from external DC bias conditions. Abstract-Ultra linear silicon-on-glass varactor topologies with improved power handling and linearity have been realized. The resulting components include integrated bias networks and provide excellent low-loss performance for large capacitances (e.g. C=2OpF Q>100 at 2GHz with V,Ot=2V). Using a novel center tap circuit the linearity has been improved for narrowband twotone signals yielding measured IIP3V values above 75V for tone spacings >1OkHz. By implementing two varactor stacks in series with integrated bias networks the power handing improves 4x, while the IIP3V doubles. The resulting devices can be used as flip-chip components enabling linear adaptive wireless applications. Index Terms - Adaptive systems, distortion, nonlinearities, II. VARACTOR DESIGN CONSIDERATIONS Although varactors have been around for decades and antiseries diode structures are used in oscillators or even, recently, for smart antennas [8], no commercially available varactor technology is currently suited to fulfill the high demands for wireless applications requiring low-distortion operation, Q>100 at 2GHz for capacitor values larger than lOpF and high capacitance tuning range. For this reason, a dedicated siliconon-glass varactor technology was developed for these applications at Delft University of Technology [7]. A. Linearity tuners, varactors. I. INTRODUCTION Next-generation wireless systems, such as multi-mode transceivers and "cognitive radios," require adaptive circuits like tunable filters and matching networks to enable frequency band and mode switching. To enable these adaptive circuits, researchers have focused on the implementation of very high performance varactors. These devices require a high quality factor, linearity, capacitance density, power handling and low cost. Potential varactor candidates currently under investigation are based on semiconductor diodes, MEMS [1] and variable dielectrics (e.g. BST [2]). Although the MEMS and variable dielectric approaches potentially provide superior linearity and Q, the varactor approach provides a high capacitance density, fast tuning and high reliability. Recent work showed that by using silicon-on-glass technology [7], the loss of the substrate, the series resistance of the buried layer and the need for finger structures can be eliminated, yielding varactor devices with a very compact layout and high Q at 2GHz for large capacitance values [4]. In addition, by using dedicated varactor topologies with a proper selection of the varactor doping profile [3]-[5] high linearity for large tone spacing was reported for both individual components as well as for integrated tunable matching circuits [6]. In this work we report on further improvements in the effective capacitance tuning range, power handling and linearity improvements for signals with narrow tone spacing. These improvements are supported with analytical considerations and extensively verified by measured data which demonstrated excellent device performance in terms of linearity and quality factor. 1-4244-0688-9/07/$20.00 C 2007 IEEE Since varactors are non-dissipative elements, we will qualify their linearity by considering the third-order intermodulation and fundamental current through the varactor. The extrapolated intercept of the currents as a function of the applied two-tone RF voltage yields the third order-intercept voltage IIP3V. Note that this quantity is independent of the operating frequency as well as capacitance value and is therefore a very suitable linearity measure for a given varactor technology. To develop analytical relations for the varactor linearity of the topologies of interest we first consider the classical capacitance-voltage behavior of a varactor given by, C(V) = K/(0 + V) where 0 is the built-in potential of the diode, V is the applied voltage, n is the power law exponent of the diode capacitance, and K is the capacitance constant. For a diode power law exponent of n=0.5 the anti-series varactor configuration of Fig. l(a) exhibits basically no distortion [3], provided that the center-tap impedance is significantly higher than the impedance offered by the varactors CA and CB for all frequency components present in the circuit. Note that for a two-tone signal this requirement includes the base-band mixing product at (f2-f1) which will appear at the center tap node. When the tone spacing (Af) approaches zero, the reactance of the varactor diodes for this frequency component rises with no bound, consequently the center tap impedance should be infinite. In practical situations however, the center- 319 than the difference frequency. In addition, to maintain good linearity, the varactor diodes should not become forward biased nor exceed the diode voltage-breakdown conditions during the RF signal cycle. tap impedance is finite and distortion for signals with a low tone-spacing will occur. To improve the impedance level of the center-tap connection an anti-parallel diode pair was proposed (Fig. 1(b)) [9]. Note that such a configuration provides extremely high center-tap impedance provided that no DC current is flowing. 5.103' CmIm I CA GB .1 x DFV IP3 Limited by CD CY) 0- CB IP3 inproverenit due to center 102 tap diodes Resistor bias (a) (b) 1 2CO2 (2CO + CD )4 C VCENTER) CD - 10 10° 10" 10 Tone spacing Af (Hz) Simulated IIP3V single varactor and (multi)-DFVS When considering the anti-series connection of two identical uniformly doped varactor diodes under low RF power and reverse biased operation, the applied RF voltage will split almost equally over the individual diodes. However, at high power levels, the diode capacitances will be modulated by the RF signal, and the voltage distribution between the two diodes will not be exactly equal. In practice, this is not a problem, since the largest RF voltage will be across the smallest capacitance, which is offered by the most strongly reverse biased diode. With the above consideration in mind, it is clear that the voltage handling capabilities of the varactor stack can be improved by stacking multiple anti-series varactor diode pairs (Fig. 3). The major penalty for this action is a larger device area for a given capacitance (roughly four times the area for each doubling of the number of varactor diodes). (1) (2) This illustrates the importance of low parasitic capacitances for the anti-parallel diode pair and the physical layout of the anti-series configuration. Finally, for a resistive center-tap configuration, the 3dB corner frequency for the high tone spacing regime where the linearity starts to approach the ideal distortion free operation (infinite IIP3V) can be expressed as: Oi+V |b CENTER 3 Af t Si~~~Sngle diode B. Improving the Power Handling Capabilities where C0 is the zero bias capacitance, which can be approximated, for the uniformly doped case (n=0.5) and for small values of CD as: IIP3V fc- A Soner Fig. 2. configurations, featuring two, four and eight anti-series diodes, using a two-tone test as function of the tone spacing (fC=lGHz, CO=lOpF, Vcenter =5V, n=0.5, CD=O.lpF, e-lV, Rcenter=lOOkQ ). Fig. 2 shows the resulting linearity of the configurations of Fig. 1(a) and Fig. 1(b). Three distinct regions of operation are found, namely: very low tone spacing, where the center-tap impedance is not effective, yielding an AC short for the base band component with an IIP3V level given by IIP3V 8Q(+ VCENTER ) . For the configuration of Fig. 1(b) at moderate tone spacing the anti-parallel diodes are effective but their zero-bias capacitance CD limits the effective center-tap impedance yielding a rather constant IIP3V value, given by: V3C12CD (CD + 4COCD2 + 6CO2CD + 2Co ) -- 10o Fig. 1. (a) Low-distortion anti-series diode configuration with resistor bias including MIE capacitor. (b) Low-distortion anti-series diode configuration with resistor and anti-parallel diode (APD) bias. IIP3V= 2 x DFVS resistor bias 103 RCENTEF VCENTER 4x DFVS Anti-parallel diode 4V 0 2zrC O R CENTER 3 Fig. 3. Multi-varactor stacks in series to lower the RF voltage per diode and consequently improve the voltage handling and tuning range capabilities. In Fig. 2 we observe that the distortion-free varactor stack (DFVS) performs much better than the single varactor in terms of linearity; however, the best results are obtained when the cut-off frequency of the dc bias network is much lower The reduced voltage swing per diode in this multi-stacked configurations directly benefits the linearity. This is illustrated 320 are flip-chip compatible with their footprints given in Fig. 5. The related Q factors of a -2OpF DFVS and 2xDFVS (effective capacitance also -2OpF) configuration with / without MIM capacitor are presented in Fig. 6. Note that these are scaled versions of the ones given in Fig. 5. The footprints of these experimental structures can be reduced by simplifying the layout of the integrated bias network. in Fig. 2 where the IP3V is given for a single diode, a DFVS, a multi-DFVS configuration with four anti-series diodes (as given in Fig. 3) and a multi-DFVS configuration featuring eight anti-series diodes. Fig. 2 shows the exact doubling of the IIP3V, at very low tone spacing, for each halving of the RF voltage per diode when utilizing multi-DFVS configurations. Also the requirement on the high center-tap impedance for a lower tone-spacing is somewhat relaxed, since this impedance is kept constant, while the capacitance doubles to keep the same effective capacitance. The use of multi-DFVS configurations also affects the effective capacitance tuning ratio, i.e. the difference between the minimum and maximum capacitance for a given RF level without forward biasing or exceeding breakdown. The improvement in tuning range of these multiple varactor stacks for higher applied RF voltages is illustrated in Fig. 4. T (d) (C) Fig. 5. Microphotographs of the 2.3pF varactor stacks used in the linearity measurements (a) 2xDFVS (b) 2xDFVS with MIM capacitor (c) DFVS with MIM capacitor and (d) DFVS. N =4.10 UcMVNGcenter ma x-20V Silicon: Q=156,GaAs: Q=394 0 10 5 VRF 250 I D DFVS 15 2X DFVS - 200 20 DFVS 150 Fig. 4. Calculated maximum effective capacitance tuning ratio for the uniformly doped multi-stacked DFVS configuration, featuring two, four and eight anti-series diodes, (Nd=2.1IO" and Nd=4.1016) as function of applied RF voltage. DFVS+MIM a ]UU 2x DFVS+MIM 50 In this figure we have assumed for simplicity a uniform voltage division over the diodes, while VRF represents the applied RF voltage to the whole varactor stack. Note that GaAs based varactors have a Q advantage over silicon due to the higher mobility, and provide limited improvement in tuning range over silicon for a given uniform doping concentration of the varactor. The control voltage of these multi-varactor stacks is constrained by the breakdown voltage of a single varactor and in these cases limited to -20V (GaAs: -25V) and -30V (GaAs: -40V) for Nd=4. 1016 and Nd=2. 1016 respectively. 6 8 10 V,4 BIAS Fig. 6. Measured deembedded quality factor at 2 GHz of 2OpF flip-chip compatible DFVS and 2xDFVS devices with and without MIM capacitor versus bias voltage. -2 0 2 B. Linearity measurements Narrow tone spacing, In order to test the narrow tone spacing linearity, a two-tone test (fc=2.14 GHz) was performed on a DFVS and a multi-varactor stack (2x DFVS) using 50Q twoport test conditions. For the calibrated power measurement of all frequency components of interest, we used the system of [10]. Fig. 7 shows the measured IM3 components for a DFVS with 8OkQ center tap impedance, a DFVS with anti-parallel diodes in the center tap and a double stacked DFVS III. EXPERIMENTAL RESULTS A. Qfactor measurements Both DFVS as well as double-stacked DFVS structures with integrated biasing networks and optional MIM decoupling capacitance have been realized in the silicon-on-glass technology using a uniform doping of 4. 1016 cm3. The devices configuration with anti-parallel diodes for biasing. The devices have been measured as a function of power for a tone spacing of 1OOkHz. Note the dramatic linearity improvements when introducing the anti-parallel diode configuration as well the double stacking of the DFVS. In Fig. 7(b) the power level 321 required to reach an IM3 level of -6OdBc is indicated as a function of bias. Clearly, for low tone spacings an improvement can also be seen for increased reverse bias, as implied by the theory. Furthermore the multi-DFVS can withstand higher power levels (-6dB more) for a given distortion level and biasing. Large tone spacing, Fig. 8 plots the measured and simulated IM3 components as function of tone-spacing at a power level of 2ldBm. The multi-stack clearly offers a superior performance over the DFVS and the results match the theory quite well. Note that the presence of leakage currents will determine the lower boundary of the linearity improvement for narrow tone-spacing by the anti-parallel diode configuration. As predicted by theory for larger tone-spacings the linearity further improves and cannot be measured by our equipment. ~~~anti-parallezI diodes + >t . ~~~bias i-esistorm IV. CONCLUSION Improved ultra-low distortion varactor topologies with integrated bias networks have been presented for enabling RF adaptivity in future wireless applications. By improving the center tap circuitry, excellent linearity was achieved not only for large tone spacing, but now also for very narrow tone spacing. The use of multiple stacked anti-series varactors further improves the voltage handling, linearity and capacitance tuning range. Experimental data shows remarkable performance in Q factor, linearity and power handling. It is our expectation that these improved, costeffective components will dramatically impact the performance of future adaptive wireless systems. 0 I-, 7,5 S~~~~ IM3high .1 innt / ~~~~o 11\31ow -- nois Lfloor- simulation / _1 - 2xE )DFVS { / / -90 18 1 (a) 33 Applied 23 power 28 (dBm) 33 11 I m xDFVS 28 a S' 0 ",A-.A 23 r, a, -5I18 -Qa el k --"'-anti-parallel diodes + bias resistor ACKNOWLEDGEMENT "i t- bias resistor The authors acknowledge STW, Philips and NXP for supporting this project. Special thanks goes to T.L.M. Scholtes and H. Schellevis of DIMES, TU Delft, for processing the silicon-on-glass wafers. 1 8 10 8 4v center6 Fig. 7. Narrow tone spacing linearity testing (f,=2.14 GHz, Af=iOOkHz) of DFVS configurations with a purely resistive center tap (Rcenter=80k), a center tap connection with resistor and antiparallel diodes, and 2xDFVS with resistor and anti-parallel diodes. (a) Measured and simulated IM3 as function of power (Veenter=4V). (b) Measured contours of applied power, resulting in -6OdBc IM3 as function of Vcenter. 2 0 (b) ' -110 KNoise Floor cUaco 2xoFVSX < REFERENCES [1] J. T. M. van Beek, et al., "High-Q integrated RF passives and micromechanical capacitors on silicon," BCTM2003, Toulouse, France, Sep. 2003, pp. 147-150. [2] P. Padmini, et al., "Realization of high tunability barium strontium titanate thin films by RF magnetron sputtering," Applied Physics Letters, vol. 75, issue 20, pp. 3186-3188, Nov. 1999. [3] R. G. Meyer and M. L. Stephens, "Distortion in variable-capacitance diodes," Journal of Solid-State Circuits, vol. SC-10, issue 1, pp. 47-55, Feb. 1975. [4] K. Buisman, et al., "'Distortion free' varactor diode topologies for RF adaptivity," IMS 2005, Long Beach, CA, Jun. 2005, pp. 157-160. [5] Q. Han, et al., "Perturbation analysis and experimental verification on intermodulation and harmonic distortion in an anti-series varactor pair," IEICE Trans. on Electronics, Vol. E88-C, No. 1, pp. 89-97, 2005. [6] K. Buisman, et al., "Low-distortion, low-loss varactor-based adaptive matching networks, implemented in a silicon-on-glass technology," RFIC 2005, Long Beach, CA, Jun. 2005, pp. 117-120. [7] K. Buisman, et al., "High performance varactor diodes integrated in a silicon-on-glass technology," ESSDERC 2005, Grenoble,Oct. 2005, pp. 389-392. [8] Q. Han, et al., "Harmonic distortion suppression technique for varactorloaded parasitic radiator antennas," IEICE Trans. on Electronics, vol. E85-C, No. 12, pp. 2015-2020, Dec. 2002. [9] K. Buisman et al., "A monolithic low-distortion low-loss silicon-onglass varactor-tuned filter with optimized biasing," IEEE Microwave and Wireless Components Letters, vol. 17, No. 1, pp. 58-60, Jan. 2007. [10] M. Spirito et al., "A novel active harmonic load-pull setup for on-wafer device linearity characterization," IMS 2004, Fort Worth, TX, Jun. 2004, pp. 1215-1218. 765 I/ 242 -90- /- 242 r.eiti-paraIleldiodel + =bias resistor 7AV -6 ---_._.._I__ bias resistor Simulation (}Sf Sim. including leakage 5 XAOMeasrmn| -5G 1E2 E6 1E4 Tone 43 spacing 24 E8 (Hz) Fig. 8. Simulated (lines) and measured (points) IM3 and IIP3 for a DFVS with and without anti-parallel diodes and a double 2.3pF DFVS with resistor and anti-parallel diodes as function of tonespacing Af; Vcenter=5V, f =2.14 GHz, applied power: 2 1dBm. 322