Download RF Power Generator [RFS-N Series]

Power
Supply
RF Power Generator [RFS-N Series]
RFS-1310N/RFS-1305N is the power generator for the plasma process that can output 13.56MHz·1kW/500W.
Downsizing and weight saving are realized by carrying a high efficiency RF amplifier.
Furthermore, power and matching control are capable only by main unit because auto-matching control function is in
the RF power generator.
RFS-1310N
A p p lic a tio n s
Feat ures
Sputtering
CVD
Plasma etching
RF ion source
Display (LCD / PDP / LED) processing system
Photovoltaic processing system
MEMS processing system
Power Supply
13.56MHz 1kW is Realized with High Efficiency Amplifier
Energy saving is achieved with high power conversion efficiency RF
circuit.
High-Speed Auto-Matching
High-speed auto-matching is realized by high speed algorithm.
Built-In Auto-Matching Function in the RF Power Generator
Matching system control is capable only by main unit. Manual
operation of RF power generator and matching box are capable by
optional controller.
Flexible Control
External analog control, serial communication control and control by
optional controller are capable.
Cooling Water is Not Necessary
Forced air cooling system
High Reliability
Design based on long time experienced know-how as the vacuum
process equipment manufacturer
RF Power Generator [RFS-N Series]
Specifications (Power Generator)
Model
RFS-1305N
Specifications (Matching Box)
RFS-1310N
Model
AC200 to 220V
AC180 to 242V
1phase 50/60Hz
Bayonet netlock round connector
DCA3106F16-10S G-D-BSN-0
Input capacity
1.2 kVA or less
2 kVA or less
Input current
10.0A or less
Leak current
5mA or less
13.56MHz
Output Spec. Oscillating frequency
Rated traveling-wave power
500W (50Ω load)
1000W (50Ω load)
Maximum reflected wave power 100W
Output impedance
50Ω
Harmonic distortion ratio
-40dB or less (Rated output,Continuous mode)
Output connector
Coaxial connector output (N type)
Control method
Power control mode
Control
Control precision
Rated output ±2% or less
Control guarantee range
Rated power 10 to 100%
240mm×495mm×150mm
Demensions W×D×H
(Excepting projection portion)
Weight
Approx. 11kg
Input Spec.
Input rated voltage
Input voltage fluctuation range
Phase, frequency
Input connector
RF input
RF output
MBX-1310N
Input frequency
Rated power
Input connector
Allowable output voltage
Allowable output current
Load impedance
Residual reflected wave power
Cooling system
Demensions W×D×H
Weight
13.56MHz
50 to 1000W
Coaxial connector (N type)
2.5kVpp or less /2.5kVdc or less
40A or less
Real part: 0.5Ω≦R≦10.0Ω
(Only the range of regulation voltage and current)
Big either input travelling wave power 0.3%
or less or 10W or less
Forced air cooling system using fan
375mm×250mm×170mm
(excepting projection portion)
Approx. 8kg
＊ Operating ambient temperature : 10˚C to 40˚C (non condensing)
＊ Operating environment : Avoid a vibration,direct sunlight, heat,dust,do not contain
corrosive gas
D im e n s io n s
100
RFS-1310N/RFS-1305N
(RF POWER SUPPLY)
30
3
25
224
375
250
14
31
15
125
4-M4
18
120
MBX-1310N
(MATCHING BOX)
Unit: mm
495
150
240
17
M5
3
187.5
20
40
328
10-M6
112
77
88
112
77
48
137.5
172.5
137.5
172.5
www.ulvac.co.jp/en
ULVAC, Inc. Components Division
Overseas Sales in Japan TEL +81-467-89-2261
USA : ULVAC Technologies, Inc.
GERMANY : ULVAC GmbH
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TEL +1-978-686-7550
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TEL +66-2-7388883
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TEL +60-3-5121-4700
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TEL +91-40-27007006
This catalog is subject to change without notice.
This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan.
2455E-1/2014100500TL