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Integrated Circuit for High-Frequency Ultrasound Annular Array James R. Talmanl, Steven L. Garverick2, Geoffrey R. Lockwood3 I The Cleveland Clinic Foundation. ' Case Westem Reserve University, Queens University Abstract An integrated circuit capable of focusing a high-frequency ultrasound annular array is presented. It uses a novel unitdelay architecture to accomplish focusing of the array with a single control voltage. System measurements for a 5-element array indicate excellent pulse fidelity with a dynamic amplitude range of 60 dB at 50 MHz. This is the highest frequency single-chip ultrasound beamformer that has been demonstrated to date. Introduction High-frequency ultrasound (10-100 MHz) is attractive because of its superior resolution for intra-vascular imaging of the coronary arteries [I]. Single-element transducers have been developed for this application but they have limited depth of field [2]. The use of dynamically focused arrays in high-frequency ultrasound applications has been limited due to the need for high speed circuitry with lirge dynamic range. For example, a conventional digital beamforming system operating at 50 MHz would require A D converters with high-resolution (12 bits) and high sampling rates (500 MS/s), beyond the current state of the art [3]. Even if this technical challenge could be overcome, it would still be necessary to attach multiple RF coaxial cables to the miniature array. One solution to this problem is to multiplex the array signals and perform off-chip synthetic-aperture focusing [4]. However, this method is susceptible to motion artifacts when used in a moving catheter. Beamforming on chip solves this problem, and has been demonstrated at IO MHz using asynchronous sampling combined with an analog FIFO [SI. However, the method is dificult to implement at higher frequencies due to the need for accurate wideband sample-and-hold circuits. Furthermore, the die area must be small for insertion in a catheter and compatibility with the miniature high-frequency array, on the order of I mm2. The approach used in this paper addresses these problems by delaying and adding the array signals on an analog integrated circuit mounted adjacent to the array, thereby avoiding motion artifacts and eliminating the need for multiple RF cables. Architecture and Design Figure 1 shows the unit-delay architecture using identical analog variable delay cells to accomplish focusing of a 5element.planar annular array. It is suitable for integration because. it does not require predetermined absolute delays on each channel. Rather, it exploits the excellent matching of 0-7803-7842-3l031$17.00 0 2003 IEEE components available on an IC. In the configuration shown, the array is focused at an axial distance ofz=az/(2ss), where a is the radius of the central element of the array, s is the speed of sound, and r is the delay of each block. Control voltages allow adjustment of gain and delay. ----- ---- ---_ I I sum vm vm., ---,-----1 a t e p t r d cinvit v, Vm." Figure 1. Matehed-Cell focusing architecture for khanor1 planar annular array. VTcc adjusts preamplifier gdn, VGAINl and VGA,N, adjust gain. and VDEuyadjusts delay. The solid dot indicates summalion. A. RC-CR Delay A simplified schematic of a delay cell is shown in Figure 2. The circuit is a first-order, fully-differential, all-pass filter. For sinusoidal input voltage, e.g. v, = A cos(o I), the output voltage is a delayed version of the input voltage, given by v, - 2 lan.'(wRC)) = A cos (01 For small values of o R C , e.g. nit3 or less, the delay is approximately independent of frequency and is equal to 2RC. Thus, the phase response is approximately linear for delays corresponding to a phase shift of 45 degrees or less (e.g. 2.5 ns at 50 MHz). The delay can he easily changed by varying the value of R or C. To obtain longer delays, while maintaining linear phase response, each delay block in Figure 1 consists of a cascade of 7 RC-CR delay cells. Figure 2. BuNerred RC-CR delay circuit. 19-3-1 IEEE 2003 CUSTOM INTEGRATED CIRCUITS CONFERENCE 477 B. Delay Cell A schematic of the delay cell is shown in Figure 3, in which all transistors are NMOS and the substrate is connected to the negative power supply. Device dimensions are indicated in units of lambda, which is equal to 0.2 micron. Figure 3. Schematic of delay cell. All dimensions arc in units of lambda (0.2 micron). Substrate is connected to nrgativc power mpply. The input signal drives the differential amplifier formed by MI-M4. The RC-CR circuit consists of M7 and M8 operating in triode, and capacitors C l and C2, constructed using two poly layers. M5 and M6 are source followers with low output impedance (150 Ohm), M9 and MI0 are used to vary the gain of the delay cell, and MI l-Ml4 bias the differential amplifier and source followers. The supply voltages are f 3V and the delay cell draws 2 mA, divided equally between MIM2 and M5-M6. Signals from other channels are summed into the delay cell in the form of differential current, as indicated by ii. Thick-oxide devices (150 angstrom) are distinguished from the standard devices (75 angstrom) by a thicker gate electrode. All control devices are implemented with thick-oxide devices for greater breakdown voltage and improved large-signal linearity. The -3 dB bandwidth of the delay cell buffer (not including the RC-CR circuit) is 1.2 GHz. It would be extremely difficult to obtain this perfomance with an opamp having the same area. amplifier. C l and C2 compensate the CMFB, which has a low-frequency gain of 100 and -3 dB bandwidth equal to approximately 300 kHz. MI 5-23 provide level shifting using a delay cell with the gain control and delay circuits removed. V-to4 conversion is accomplished by M24-M28, in which M26 and M27 are biased at one-half the value of current carried by M28. Figure 4. Schematic of prcnmplifler, level shifter, sod V-10-1 c~nvirter. Substrate ir cooanted to negstiw power supply. N-well mnnraioni are -to positive pawer supply. Experimental Results Figure 5 shows a photograph of the CMOS integrated circuit that implements the architechxe shown in Figure 1. It was fabricated using the TSMC 0.35-micron, double-poly, fourmetal process through the MOSIS facility at the University of Southern California. The active area of the preamplifiers and delay cells is approximately 0.5 mm2. C. Preamplifier Figure 4 shows a simplified schematic of the preamplifier, including V-to4 conversion and associated circuitry. Substrate and well connections, omitted for clarity, are all connected to the negative and positive power supplies respectively. Bias voltages Vel, Ver. and Ve3 are provided by current mirrors that are not shown on the schematic. MI-M6 form a variable gain differential amplifier biased at 0.5 mA. The gain can be adjusted from approximately 1 to IO by controlling the value of Vc. The overall gain-bandwidth product of the amplifier is approximately 900 MHz. M7-MI4 provide common-mode feedback (CMFB) for the differential Figure 5. Die photograph. Si is 2 mm by 2 mm. 478 19-3-2 Figure 6 shows the experimental setup used to characterize the response of one delay cell. The delay cell under test is placed between two other delay cells in order to mimic the source and load conditions present when it is used in a cascade of delay cells. RF source-follower buffers are included on the IC to drive 50-ohm test equipment without suffering excessive loss of signal. The circuit is driven by the swept RF output from a network analyzer. A 1 :I RF transformer is used to convert from differential to single-ended signals. By displaying the ratio of input to output signals on the analyzer the responses of the RF buffers, transformers, and external cables are normalized out of the measurement, leaving only the response of one delay cell. The loading of the delay cell by the RF buffers adds some extra delay, but simulations indicate it is negligible. A MATCHED CABLES from an axial ultrasound point source. Interconnections are kept the same on all 5 channels by using 5 identical cables. Additional cables introduce differential delays between channels to emulate the signals from an ultrasound target. Three sets of cables were made having values of T equal to 6 ns, 9.3 ns, and 12 ns It 20 ps. The length of the longest cable, corresponding to a delay of 48 ns, was IO m. A FI.IU.~W(YW Figure 7. Amplihtdc and phase response of one delay cell with delay q u a l to 2.4 ns. In both cases, the dashed curve rep-nb the calculated respore ofthe RC-CR circuit with pansitin. The measured and esleuhted amplitude responses are both normalid to 0 dB at 50 MHz The 0.4 m delay ofthe hufler b subtncted from the phase raponre. Figure 6. Experimentalsehtp for measuringdelay cell characteristics Figure 7 shows the measured amplitude and phase response of one delay cell that was adjusted for a maximum delay of 2.4 ns. The dashed line indicates the theoretical frequency response of an RC-CR circuit with C and R equal to 0.25 pF and 4100 Ohms, respectively. These values are approximately optimum in terms of gain flatness for this value of delay when parasitic effects due to load capacitance from MI and M 2 (13 ff) and finite source impedance for M5 and M6 (150 Ohms) are taken into account. The agreement between theory and experiment is excellent, indicating that the amplitude response is dominated by the RC-CR component of the delay cell, i.e. the amplitude response of the buffer is negligible. The minimum measured delay of one delay cell is 0.86 ns. Simulations indicate that 0.4 ns is due to the buffer. Therefore, the minimum delay of the RC-CR circuit is 0.46 ns. A. System Measurements The experimental setup used to test the IC is shown in Figure 8. A broadband pulse centered at 50 MHz with 4 dB fractional bandwidth of approximately 25 % (44 MHz to 57 MHz) is used to emulate an ultrasound target. A power splitter is used to obtain 5 synchronous signals for the 5 inputs """ "- I-, Figure S. Experimental setup used for testing the IC. Figure 9 shows a comparison of input and output pulses when the value of T is adjusted to 12 ns, corresponding to a delay of 1.7 ns per delay cell. The amplitude of the pulse is 30 mVpp. The solid line is the measured output pulse and the dashed line is the measured input pulse, mathematically delayed and scaled according to the values of small-signal delay and gain of the circuit. The latter quantities are measured with a c w excitation at the center 6equency of the pulse. This procedure avoids errors due to subjective scaling and delaying of the input pulse, thereby providing a fair comparison. Slight widening of the output pulse is observed as a result of fmite bandwidth in the delay cells, but the overall agreement is excellent. 19-3-3 479 For ideal focusing, the output amplitude with all 5 inputs present simultaneously should he equal to the sum of the 5 output amplitudes due to each channel taken separately. This ideal focusing gain was measured at an extremely small input signal level (ImVpp), and the extrapolated result is indicated by the solid line in Figure 10. A series of input-output pulse comparisons were made as in Figure 9 for all three sets of cables and the results are displayed graphically in Figure 10. 50 1 1 ’100 ’150 1 200 of identical analog variable delay cells constructed from an all-pass RC-CR circuit. The axial focusing range, which is proportional to the ratio of maximum to minimum delay available from one delay cell, is approximately one octave with 85 % efficiency. This is the highest frequency singlechip ultrasound beamfonner that has been demonstrated to date. I 3w 250 Time (n.1 Figure 9. Input-output pulse comparison for Srhannel lofusing experiment when % is equal to 12 ns. At minimum delay (T equal to 6 ns) and small signal levels the 5 channels are summed together by the IC with essentially ideal focusing gain. The output saturates at large signal levels primarily due to the RC-CR circuits in the last r block in Figure 1, where the signal is largest. The output 1-dB compression amplitude is 750 mVpp, which is 60 dB larger than the noise voltage present on the output of the IC. At the largest value of delay ( r equal to 12 ns) the focusing gain is approximately 85 % of the ideal focusing gain, as indicated by the initial slope of the response. The discrepancy in output amplitude at large delay is due to imperfect matching between delay cells, resulting in destmctive interference between channels. However, the difference between the input and output pulses is slight, as indicated in Figure 9. Mismatches between delay cells are probably due to differences in threshold voltage and DC offsets. These errors represent a larger fraction of the control voltage at larger delays, where smaller control voltages are used, resulting ‘in poorer matching of delay cells. Thus, the maximum delay available from the circuit is actually limited by the matching between delay cells rather than by phase distortion considerations. Matching’could be improved significantly by using ac coupling and bener layout techniques. Conclusions An integrated-circuit suitable for focusing a high-frequency ultrasound annular array operating at 50 MHz has been demonstrated. The focusing architecture consists of a collection 480 w m g . Imp* 0h”r (vpp, Figure 10. Input-output pule comparison for 5 s h m n e l focusing experiment when % is equal lo 6 ns, 9.3 ns, and 12 ns. The solid PUN^ repmrnts ideal focusing. The dashdot C U N ~repmerits a SPICE dmQlation afthe ioput-output response when is q u a l to 12 os. References [ I ] G. R. L o c k w d , D. H. Tumbuli, D. A. Christopher, and F. S . Foster, “Bevond 30 MHz - Amlications of HiB-Iieauencv Uivasound ImaninR.” IEEE Engineering 6’ Medicine and Bio&v.. DD. 60-71. N & e k berlDecember, 1996. 121 A. Fleisehman, R. Modi, A. Nair, 1. R. Talman. 0. S . Loekwood, Roy, S , “Miniam High Frequency Ultrasonic Transducers for Minimally Invasive Imaging Pmedureo.” Journol ofSemom ondletuotors, January, 2003. I31 Bemard D. ., - Steinbere. Beamforming in Ultrasound.” IEEE _. “Dieital ” Tronroetiom on Ultrasonics. Ferroelectrics, and Frequency Control, vol. 39. No.6, 1992. pp. 716-721. [4] W. C. Black, and D. N. Stephens, “CMOS Chip for Invasive U l m u n d Imaging,” IEEE Jourml of Solid-State Circuits, vol. 29, No. 1I, November, 1994.p~.1381-1387. [SI B m o Slefanelli, Ian O’Connor, Lauren1 Quiqueres Andreas Kaiser, and Daniel Billet. “An Analog Beamforming Circuit for Ulvasound Imaging Using Swilched-Cumnt Delay Liner,” IEEE Journal of Solid-State Cimirr. voi. 35, No. 2,2000, pp.202-211 19-3-4