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VACUUM PUMPS
ION PUMPING
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Meca 2000 ion pumps are Diode type. They can reach pressures down to 10 mbar thanks to their UHV design. They
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require no maintenance and are easily started from 10 mbar. They are often used in installations permanently kept under
vacuum.
Two types of ion pumps are proposed: the ionic pumps of the PID series and of the PIDG series. The PIDG ones are ion
pumps with integrated titanium sublimation.
For both series, the integrated pumping elements differ depending on the type of gas pumped. For the noble gases which do
not combine with titanium, we install special pumping elements for noble gases.
ION PUMPS PID SERIES :
The ion pumps of the PID series have an operating voltage of 5 kV supplied by dedicated power supplies. The current
absorbed by these pumps is proportional to the pressure (see graph on opposite page), its value is given by the power
supply. The shape of the ceramic insulators of the pumping elements and the high voltage connector minimize the risk of
electrical leaking current. The excellent symmetry of the magnetic circuit also gives a very low stray magnetic field. It consists
of standard ferrite elements (magnets) with a very large magnetic field. The maximum bakeout temperature of these pumps is
200 ° C with the magnetic field and 300 ° C without magnetic field.
Those pumps can have standard elements or noble gas elements.
- Standard elements: PID series pumps are composed of standard 25 L/s elements (12.5 L/s for PID 50) easily
interchangeable and experience has shown they were the most reliable and robust. The standard pumping element consists
of a cathode made by 2 getter materials (titanium) plates and one anode consisting of multiple stainless steel cylinders (see
schematic diagram on the opposite page).
- Noble gas elements: Noble gases do not combine with Titanium and can only be buried. Pumping speed on those gases is
reduced. If a high quantity of noble gases is to be pumped the pumps must be fitted with noble gas elements which combine
several materials. The pumping speed of noble gases is then considerably increased.
ION PUMPS PIDG SERIES:
The PIDG series combines a diode ion pump PID with a titanium sublimation pumping.
Operating principle:
o Ion pumping
With the same design as the PID pumps, PIDG pumps supply the basic pumping of a system and do not require any
maintenance.
o Titanium sublimation pumping
The titanium sublimation highly increases the pumping capacity. The pumping speed given by the sublimation is proportional
to the deposition surface and its temperature. Thus internal pumping speed higher than 2000 L/s can be obtained.
The lower the temperature of the cooling panel is, the higher the pumping speed will be. For a better pumping of the
hydrogen, liquid nitrogen cooling is needed in order to improve condensation.
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VINCI TECHNOLOGIES – Division MECA 2000
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VACUUM PUMPS
Current - Pressure curves
Pumping mechanism
PUMPING SPEED:
The pumping speeds are purely indicative as they depend on the conditioning of the pump and the gas mixture pumped.
The values given below refer to measurements made according to ISO standards. The maximum flow rate (number of
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molecules pumped per second) is typically around 5.10 mbar.
N2 pumping speed
Pumping speed on dry air is slightly higher than on nitrogen. However it is advised not to operate the pumps permanently
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under air pressure higher than 5.10 mbar as Argon could bring some unstability. If this kind of application is considered,
then pump should be fitted with noble gas elements.
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VACUUM PUMPS
ION PUMP PID
PID 25 – PID 25N
PID 50 – PID 50N
Nominal pumping speed
25 L/s
Number of elements
Power supply
Bakeout
1
APIV – ref: 302 121
Heating rod
Nominal pumping speed
Number of elements
Power supply
4
APIV - ref: 302 121
Bakeout
EP50
Inlet flange
40CF
Inlet flange
100CF
Mass
12 Kg
Mass
30 Kg
Reference standard model
300 358
Reference standard model
300 359
Reference noble gas model
300 822
Reference noble gas model
300 823
PID 100 – PID 100N
Nominal pumping speed
Number of elements
Power supply
Bakeout
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50 L/s
PID 200 – PID 200N
100 L/s
4
APIV – ref: 302 121
Heating rod
Nominal pumping speed
Number of elements
Power supply
200 L/s
8
APIV - ref: 302 121
Bakeout
EP200
Inlet flange
160CF
Inlet flange
160CF
Mass
58 Kg
Mass
65 Kg
Reference standard model
300 360
Reference standard model
300 361
Reference noble gas model
300 824
Reference noble gas model
300 825
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VACUUM PUMPS
PID 400 – PID 400N
Nominal pumping speed
Number of elements
Power supply
PID 600 – PID 600N
Nominal pumping speed
400 L/s
600 L/s
Number of elements
16
24
Power supply
APIV - ref: 302 121
APIV - ref: 302 121
Bakeout
EP400
Bakeout
EP600
Inlet flange
160CF
Inlet flange
160CF
Mass
150 Kg
Mass
165 Kg
Reference standard model
300 362
Reference standard model
300 363
Reference noble gas model
300 826
Reference noble gas model
300 827
PID 800 – PID 800N
Nominal pumping speed
Number of elements
Power supply
800 L/s
32
APIVD - ref: 302 122
Bakeout
EP800
Inlet flange
200CF
Mass
251 Kg
Reference standard model
302 813
Reference noble gas model
300 828
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VACUUM PUMPS
PIDG COMBINED ION PUMPS
PIDG 1020 – PIDG 1020N
Nominal pumping speed
Number of elements
Power supply
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PIDG 1040 – PIDG 1040N
1000 L/s
8
APIV / ASTI 7
Nominal pumping speed
Number of elements
Power supply
1500 L/s
8
APIV / ASTI 7
Bakeout
EP200
Bakeout
EP400
Inlet flange
160CF
Inlet flange
160CF
Mass
85 Kg
Mass
170 Kg
Reference standard model
300 385
Reference standard model
301 847
Reference noble gas model
301 843
Reference noble gas model
301 845
VINCI TECHNOLOGIES – Division MECA 2000
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VACUUM PUMPS
PIDG 1060 – PIDG 1060N
Nominal pumping speed
PIDG 1080 – PIDG 1080N
Nominal pumping speed
1600 L/s
Number of elements
Number of elements
24
Power supply
APIV / ASTI 7
Power supply
1800 L/s
32
APIV / ASTI 7
Bakeout
EP600
Bakeout
EP800
Inlet flange
200CF
Inlet flange
200CF
Mass
230 Kg
Mass
260 Kg
Reference standard model
302 780
Reference standard model
302 814
Reference noble gas model
302 964
Reference noble gas model
302 965
ION PUMPS SPARE PARTS
SPARE PARTS
Model
Description
Reference
EPI 12
Standard 12,5 L/s element
300 367
EPI 12 N
Noble gas 12,5 L/s element
300 368
EPI 25
Standard 25 L/s element
300 365
EPI 25N
Noble gas 25 L/s element
300 366
PMHT
HV feedthrough 16CF
300 406
PBHT
HV connector
300 463
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VACUUM PUMPS
CORDONS D’ETUVAGE
HEATING TAPES
Model
Model
Model
RC
RC
RC
RCL
RCL
RCL
RCT 2
RCT 2
RCT 2
RCT 4
RCT 4
RCT 4
BAKEOUT LAMPS
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ModEl
A
Specifications
Reference
LIEC 50.1
165
110 V, 500 W
300 819
LIEC 14.1
270
114 V, 1200 W
300 454
LI 05.01
Spare halogen lamp, puissance 500 W
300 820
LI 14.01
Spare infrared lamp, puissance 1200 W
300 455
VINCI TECHNOLOGIES – Division MECA 2000
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VACUUM PUMPS
ION PUMPS BAKEOUT ACCESSORIES
Bakeout accessories ensure the maintenance and regeneration of ion pumps in order to maintain their initial performance.
A periodic baking at around 150°C eliminates the wat er vapor and secures an excellent ultimate vacuum.
Bakeout accessories for ion pumps are of two types:
Heater rods BC models: for pumps 25 L/s and 100 L/s
They are placed in corresponding tubes, 1 for 25 L/s pumps, 4 for 100 L/s pumps
Bakeout ovens EP models for ion pumps 50 L/s to 800 L/s
They are placed around the pumps and they ensure of uniform temperature of the pump between 150°C and 200°C.
BATON CHAUFFANT : Modèle BC
ETUVE POUR PID 50 : Modèle EP50
Caractéristiques électriques : 220 V, 75 W
Caractéristiques électriques : 220 V, 300 W
Référence : 300 369
Référence : 300 370
ETUVE POUR POMPES IONIQUES PID 200 à PID 600
Modèle
EP 200
EP 400
EP 600
A
550
550
600
B
460
460
520
C
210
210
312.5
D
200
400
400
E
136
136
176
F
40
70
70
Caract.
électrique
220 V, 400 W
220 V, 600 W
220 V, 800 W
Référence
300 371
300 372
300 887
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VACUUM PUMPS
TITANIUM FILAMENT HOLDERS
Model
Reference
PFT.3
301 137
PFT.4
300 389
PFT.6
300 390
SPARE PARTS
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Model
Model
Model
FTIS 30
FTIS 30
FTIS 30
FTI 12
FTI 12
FTI 12
FTI 50
FTI 50
FTI 50
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VACUUM PUMPS
ION PUMPS POWER SUPPLIES
The high voltage power supply (3 kV to 7 kV) for ion pumps is a modular unit designed the extensive needs of users of
ion pumps. The APIVD model has been specially developed to offer the user the possibility to operate two pumps
simultaneously or independently with an individual reading of the current and pressure. It also has independent
setpoints. These power supplies are programmed to automatically convert the reading of the ion pump current into
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pressure measurement (range 10 mbar). The base unit comes in the form of a box 1/2 rack in which a high voltage
card is installed for the diodes ion pump 25 L/s to 800 L/s.
SPECIFICATIONS:
- Input voltage:
- Dimensions:
- Front panel readings:
- Output voltage:
220 V / 50 Hz
½ standard rack 19 inches
(H : 177, L : 211.4, P : 440)
Output voltage
Pressure
Current
adjustable between 3000V and 7000V
Model
Description
APIV
Reference
High voltage control unit
302 121
APIVD
High voltage control unit for 2 ion pumps
302 122
CPHTF
High voltage cable from controller to pump
302 120
TITANIUM SUBLIMATION POWER SUPPLY
The titanium sublimation power supply gives the necessary heating current for filaments used with the MECA 2000
titanium filament holder.
A controller installed on the front panel adjusts the interval between two cycles and the time of sublimation.
A 5 position switch allows the selection of the operating filament or the automatic control.
SPECIFICATIONS:
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Input voltage:
Sublimation time:
Sublimation intervals:
Current:
Dimensions:
220 V / 50 Hz
1 or 2 minutes
1 minute to 99 hours
automatic regulation
19 inches
(H: 88, L: 482.4, P: 370)
Model
ASTI 7
CABLE HI
Description
Reference
Universal power supply for titanium sublimation
301 938
HV cable – 6 meters
301 100
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