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MoS2 RF Transistor Suki Zhang 02/15/17 Motivation for MoS2 RF Transistor • MoS2 is a semiconductor, transition-metal dichalcogenide (TMD) materials [3] • • • • • • • • Bandgap, direct 1.8eV, indirect 1.3eV for SL good mechanical strength high mobility (> 80cm2/Vs) high on/off ratio (> 108) good current saturation, on state current density 300 uA/um 40uS/um transconductance Voltage gain >30 Av= gm/gds GHz RF performance • Self-consistent ballistic quantum transport simulations, cutoff frequencies well above 100 GHz , with channel lengths of Lg ∼ 15 nm, operating in the ballistic limit [2] • Large-area MoS2 can be prepared using either liquid-phase exfoliation or CVD growth. [2] Yoon, Y.; Ganapathi, K.; Salahuddin, S. How Good Can Monolayer MoS2 Transistors Be? Nano Lett. 2011, 11, 3768−3773. [3] A. Sanne et al., “Radio frequency transistors and circuits based on CVD MoS2 ,” Nano Lett., vol. 15, no. 8, pp. 5039–5045, Aug. 2015 • fT: cutoff frequency, unity current gain Intrinsic [6] Extrinsic [5] • fmax: maximum frequency of oscillation, unity power gain [5] [5 ]D. Krasnozhon, D. Lembke, C. Nyffeler, Y. Leblebici, and A. Kis, “MoS2Transistors Operating at Gigahertz Frequencies,” Nano Letters, vol. 14, no. 10, pp. 5905–5911, Aug. 2014. [6] Z. Dong and J. Guo, “Assessment of 2-D Transition Metal Dichalcogenide FETs at Sub-5-nm Gate Length Scale,” IEEE Transactions on Electron Devices, vol. 64, no. 2, pp. 622–628, 2017. • Thickness dependent • SL, fT 6.7 Ghz, fmax 5.3 Ghz [3] • ML, , fT 42 Ghz, fmax 50 Ghz [4] • Channel length dependent [1] • Rigid substrate and flexible substrate with strain [1]Cheng, R.; Jian, S.; Chen, Y.; Weiss, N.; Cheng, H. C.; Wu, H.; Huang, Y.; Duan, X. Nat. Commun. 2014, 5, 5143 [3] A. Sanne et al., “Radio frequency transistors and circuits based on CVD MoS2 ,” Nano Lett., vol. 15, no. 8, pp. 5039–5045, Aug. 2015 [4] R. Cheng et al., “Few-layer molybdenum disulfide transistors and circuits for high-speed flexible electronics,” Nature Commun., vol. 5, Oct. 2014, Art. no. 5143. 2015 [5] [1] fT 6.7 Ghz fmax 5.3 Ghz [1]Cheng, R.; Jian, S.; Chen, Y.; Weiss, N.; Cheng, H. C.; Wu, H.; Huang, Y.; Duan, X. Nat. Commun. 2014, 5, 5143 [5 ]D. Krasnozhon, D. Lembke, C. Nyffeler, Y. Leblebici, and A. Kis, “MoS2Transistors Operating at Gigahertz Frequencies,” Nano Letters, vol. 14, no. 10, pp. 5905–5911, Aug. 2014. • Exfoliated few layer MoS2 • fT 42 Ghz • fmax 50 Ghz • Higher than Single layer μfe=gm*L/(W*Cg*Vds) [5] [5 ]D. Krasnozhon, D. Lembke, C. Nyffeler, Y. Leblebici, and A. Kis, “MoS2Transistors Operating at Gigahertz Frequencies,” Nano Letters, vol. 14, no. 10, pp. 5905–5911, Aug. 2014. Flexible MoS2 RF Transistors with Strain CVD monolayer MoS 2016 2 • Bandgap increased with compressive strain, contact resistance increased, lower FT • Comparable FT with rigid substrate [5 ]D. Krasnozhon, D. Lembke, C. Nyffeler, Y. Leblebici, and A. Kis, “MoS2Transistors Operating at Gigahertz Frequencies,” Nano Letters, vol. 14, no. 10, pp. 5905–5911, Aug. 2014. [5] MoS2 Vs. Graphene RF Transistors • The highest cutoff frequency (fT) achieved in MoS2 is much lower than that in graphene • Much lower carrier mobility • Much higher contact resistance [7]K. D. Holland et al., "Impact of contact resistance on the fT and fmax of Graphene vs. MoS2 transistors," IEEE Transactions on Nanotechnology, pp. 1–1, 2016. Overall • Mos2 with bandgap enable integrating digital and analog circuit in a single chip • It is capable to make highly flexible electronics • High cut off frequency (fT) and High maximum frequency of oscillation (fmax) • Improve carrier mobility • Shorter channel length • Reduce contact resistance • Graphene between MoS2 and metal • Doping contacts • Use high K ALD dielectrics