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EEL5225: Principles of MEMS Transducers (Fall 2003) Instructor: Dr. Hui-Kai Xie Introduction to Interface Electronics z Lumped Circuit Elements z General Amplifiers z Operational Amplifiers Reading: Senturia, Chapter 14, p.353-395 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) Lecture 32 by 1 H.K. Xie 11/21/2003 Lumped Circuit Elements z Linear 1-port (2-terminal) passive devices z z z Resistor: energy dissipation Capacitor: energy storage Inductor: energy storage 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 2 Lumped Circuit Elements z Non-linear 1-port (2-terminal) passive devices z z P/N junction diode Nonlinear I-V characteristic qvkTD iD = I S e − 1 Note: Diode voltage, vD = VD + vd qVkTD DC : I D = I S e − 1 qI Small − signal : i d = D kT 1 = v d r vd d Ref. Sedra and Smith, Microelectronic Circuits, p. 132. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 3 P/N Diode z z Low-frequency large-signal equivalent circuit ≈ 0.7V (silicon diode at room temp.) High-frequency small-signal equivalent circuit Ref. Sedra and Smith, Microelectronic Circuits, p. 170. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 4 Zener Diode z Exploits very sharp current-voltage characteristic at reverse breakdown for voltage regulation 11/21/2003 Ref. Sedra and Smith, Microelectronic Circuits, p. 172. 5 EEL5225: Principles of MEMS Transducers (Fall 2003) Diode Circuits AC-to-DC converter Ref. Sedra and Smith, Microelectronic Circuits, p. 176,184. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 6 Active Devices z Sources z Energy supplied into system from external source (sometimes not shown) z Independent voltage source z with series source resistance i v v i z Independent current source z 11/21/2003 with shunt source resistance EEL5225: Principles of MEMS Transducers (Fall 2003) 7 Active Devices z Sources z Dependent sources 11/21/2003 z Dependent voltage source z Dependent current source EEL5225: Principles of MEMS Transducers (Fall 2003) Ref. Van Valkenbur, Network Analysis, p. 38. 8 Active Devices -- BJT & MOSFET z Cross-section z N/P/N Bipolar Junction Transistor (BJT) z n-channel Metal Oxide Semiconductor Field Effect Transistor (n-channel MOSFET) 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) Ref. Sedra and Smith, Microelectronic Circuits, p. 231, 355. 9 Active Devices -- BJT & MOSFET z Common-emitter configuration z z iC vs. vCE DC characteristics with base-emitter voltage (or base current) as parameter Other configurations are common-base and commoncollector 11/21/2003 z Common-source configuration z z iD vs. vDS DC characteristics with gate-to-source voltage as parameter Other configurations are commongate and common-drain Ref. Sedra and Smith, Microelectronic Circuits, p. 240, 367. EEL5225: Principles of MEMS Transducers (Fall 2003) 10 Active Devices -- BJT & MOSFET z z BJT High-Frequency Small-signal Equivalent Circuit MOSFET High-Frequency Small-signal Equivalent Circuit 11/21/2003 Ref. Sedra and Smith, Microelectronic Circuits, p. 470, 445. 11 EEL5225: Principles of MEMS Transducers (Fall 2003) General Amplifiers z Signal Amplification Voltage gain, A V ≡ vO vI ( 20 log A dB ) ( 20 log A dB ) V Current gain, A I ≡ iO iI Power gain, A P ≡ PL vO iO = PI vI iI I (10 log AP dB ) Note: We will discuss the frequency response later. Ref. Sedra and Smith, Microelectronic Circuits, p. 11. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 12 General Amplifiers z Amplifier Saturation z z hard limit at power supply limits Jargon: “rail” = power supply z z rail-to-rail Amplifier Nonlinearity AV = dvO dvI At operating point (known also as Quiescent point) vO (t ) = VO + vo (t ) vI (t ) = VI + vi (t ) Ref. Sedra and Smith, Microelectronic Circuits, p. 16. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 13 General Amplifiers z Voltage Amplifier Equivalent Circuit Ri ≡ input resistance RO ≡ output resistance AV 0 ≡ open circuit voltage gain z Voltage amplifier with signal source and load connected vO = ( AV 0 vi ) vi = vS RL RL + RO Ri Ri + RS Overall gain: vO Ri RL = AV 0 vS Ri + RS RL + RO Ref. Sedra and Smith, Microelectronic Circuits, p. 16. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 14 General Amplifiers z Frequency Response of Amplifiers For a linear circuit, for a sinusoidal input, vi (t ) = Vi sin ω t , the output is sinusoidal with the same frequency: vo (t ) = Vo sin(ω t + φ ) Amplifier transfer function, T(ω ): T(ω ) = Vo Vi function of ω ∠T(ω )= φ function of ω Analyze amplifier circuit in the complex frequency variable (s- or Laplace-domain). Ref. Sedra and Smith, Microelectronic Circuits, p. 20, 21. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 15 General Amplifiers z Frequency Response of Amplifiers Capacitively coupled ac-amplifier Tuned or bandpass amplifier 11/21/2003 Direct-coupled dc-amplifier Ref. Sedra and Smith, Microelectronic Circuits, p. 26.. EEL5225: Principles of MEMS Transducers (Fall 2003) 16 Single Time-Constant Networks z Review of Single Time-Constant Networks z circuits that can be reduced to one reactive component (capacitance or inductance) and one resistive component Low Pass Filter High Pass Filter Ref. Sedra and Smith, Microelectronic Circuits, p. 22. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 17 Single Time-Constant Networks z Low Pass Filter Replacing the circuit elements with their impedances, 1 R → R and C → sC V (s) 1 1 T (s) = o = = s Vi ( s ) 1 + sRC 1+ ω0 where ω 0 = T ( jω ) = 1 τ = 1 . Replacing s with jω , RC 1 ω 1+ ω0 2 Vi ( s ) 1 sC Vo ( s) ω ∠T ( jω ) = − tan −1 ω0 Ref. Sedra and Smith, Microelectronic Circuits, p. 22. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 18 Single Time-Constant Networks z Magnitude and Phase Response of Low Pass STC Network ω = ω0 = 1 RC Ref. Sedra and Smith, Microelectronic Circuits, p. 32. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 19 Single Time-Constant Networks z High Pass Filter Replacing the circuit elements with their impedances, 1 sC V (s) sRC s T (s) = o = = Vi ( s ) sRC + 1 s + ω 0 R → R and C → where ω 0 = T ( jω ) = 1 τ = 1 . Replacing s with jω , RC 1 sC 1 ω 1+ 0 ω 2 Vi ( s ) ω ∠T ( jω ) = tan −1 0 ω Vo ( s) Ref. Sedra and Smith, Microelectronic Circuits, p. 22. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 20 Single Time-Constant Networks z Magnitude and Phase Response of High Pass STC Network ω = ω0 = 1 RC Ref. Sedra and Smith, Microelectronic Circuits, p. 33. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 21 Single Time-Constant Networks z Amplifier Frequency Response A V0Vi Find the amplifier voltage transfer function, DC gain, and high frequency roll-off. Ref. Sedra and Smith, Microelectronic Circuits, p. 33. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 22 Single Time-Constant Networks z Direct-coupled amplifier with input capacitance Vo ( s ) = RL AV 0Vi ( s ) and Vi ( s ) = RL + Ro Ri // 1 sCi 1 + RS Ri // sCi Vs ( s ) Vo ( s ) 1 1 1 A V0Vi = AV 0 T (s) = Ro Rs 1 + sCi ( RS // Ri ) Vi ( s ) + + 1 1 RL Ri This voltage transfer function has the same form as the low pass STC network. 1 1 DC gain: T(s) s →0 = AV 0 Ro Rs + + 1 1 RL Ri 1 1 High frequency rolloff: ω 0 = = τ Ci ( RS // Ri ) 11/21/2003 Ref. Sedra and Smith, Microelectronic Circuits, p. 22. EEL5225: Principles of MEMS Transducers (Fall 2003) 23 Single Time-Constant Networks z Direct-coupled Amplifier with Input Capacitance Example: Rs = 20k Ω, Ri = 100k Ω, Ci = 60 pF A V0 = 144 V , Ro = 200Ω, RL = 1k Ω V A V0Vi DC gain: 1 1 K = A V0 Ro Rs + + 1 1 RL Ri V = 100 V High frequency rolloff: ω0 = 1 τ = 1 Ci ( RS // Ri ) = 159kHz Ref. Sedra and Smith, Microelectronic Circuits, p. 33. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 24 Single Time-Constant Networks z Capacitively-coupled Voltage Amplifier Example: Capacitively coupled ideal voltage amplifier T (s) = Vo ( s ) = AV 0 Vi ( s ) s s+ 1 RC High frequency gain: K = AV 0 = 100 Low frequency rolloff: 1 1 ω0 = = = 15.9 Hz τ RC Ref. Sedra and Smith, Microelectronic Circuits, p. 33. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 25 Application: Piezoresistive Microphone z Capacitively coupled amplifier used to reject DC offset Vs+ Hybrid Package Microphone R0 Lid Capacitor Microphone Resistor R0 Diff. Amp. C R Vb G R0 R0 OUT C R Amplifier GND Silicon Substrate Vs- Package Body Ref. Arnold, MEMS-based Directional Acoustic Array, M.S. Thesis 2001. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 26 Operational Amplifiers z Operational Amplifiers z Basic building block for analog signal processing circuits z z z z First integrated circuit operational amplifier, µ709, made by Fairchild Semiconductor in 1960s followed by the µ741. Consists of active transistors, resistors, and limited number of capacitors Approximated by single-pole frequency response Power supply Inverting input Three stages ¦ z § ¨ Output Differential amplifier stage Amplifies difference between two inputs High-gain amplifier stage Output amplifier stage Non-inverting input Power supply Ref. Senturia, Microsystem Design, p. 382. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 27 Operational Amplifiers z u741 Opamp 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 28 Operational Amplifiers Wide variety of operational amplifiers: •High power •Low power •Precision •Low noise 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 29 Operational Amplifiers 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 30 Operational Amplifiers 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 31 Operational Amplifiers z General input signals z z Differential signal from transducer Common mode signal z For example, 60 Hz electromagnetic interference appearing on both inputs vd + vcm 2 v v− = − d + vcm 2 vd v+ = z Differential gain v vo Ad = o = vd ( v+ − v− ) z Common-mode gain Acm = 11/21/2003 vo vo = vcm ( v+ + v− ) / 2 Common Mode Rejection Ratio (CMRR) CMRR = Ad A or 20 log d Acm Acm Actual opamps, CMRR range from 1000 to 100,000 (60dB to 100dB) EEL5225: Principles of MEMS Transducers (Fall 2003) Ref. Senturia, Microsystem Design, p. 382. 32 Operational Amplifiers z Voltage Follower z Output follows input z Vo=Vi z z z 11/21/2003 Serves as buffer Very high input impedance Low output impedance EEL5225: Principles of MEMS Transducers (Fall 2003) 33 Operational Amplifiers z Non-inverting Amplifier Short op-amp analysis method: Assume that the input current is zero (infinite input impedance) and ε =0 (v+ ≈ v− ). Using this method, we can analyze the transfer function for the non-inverting amplifier: vo R = 1+ 1 R2 vs If R 2 = ∞, vo =1 vs [Unity-gain buffer or voltage follower.] Ref. Senturia, Microsystem Design, p. 387. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 34 Operational Amplifiers z Inverting Amplifier Open-loop gain is A. Equating currents: Vs − ε ε + Aε = R1 R2 Vo R2 1 → − R2 Closed-loop gain: =− Vs R1 R1 R2 1 1 + 1 + A R1 ∵ ε → 0 when A → ∞. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) Ref. Senturia, Microsystem Design, p. 385. 35 Operational Amplifiers z Inverting Amplifier What is the frequency response of this configuration? Replace A with the STC single-pole response, A( s ) = A0 s 1+ s0 . Substituting the single-pole response for A gives: Vo A0 s0 R2 with a DC gain of R 2 =− R1 Vs R1 R2 + s s A0 s0 + 1 + ( ) 0 R 1 R2 + + A 1 0 s0 R1 and 3dB frequency determined by the pole at s0 = − . R2 1+ R1 ω0 A0ω 0 Note that the gain-bandwith product is preserved: A0 s0 . Ref. Senturia, Microsystem Design, p. 387. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 36 Operational Amplifiers z Transimpedance Amplifier Since the input current is negligible, vo = − R1 I s The transimpedance amplifier (voltage at output proportional to current at input) is used as a current-to-voltage converter. Ref. Senturia, Microsystem Design, p. 389. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 37 Operational Amplifiers z Integrator Since the input current is negligible and the voltage at v− is approximately the same as v+ at ground, vs − 0 dv = ic = C c R1 dt vc = 1 Vs (t )dt R1C ∫ Note that the output voltage, vo = −vc . Therefore, vo = − 1 Vs (t )dt ∫ R1C [Output is integral of input!] Note: The integrator circuit is extremely sensitive to parasitic DC leakage currents. Ref. Senturia, Microsystem Design, p. 389. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 38 Operational Amplifiers z Differentiator Similarly, we find that for the differentiator circuit, vo = − R1C dvs dt [Output is derivative of input!] Note: The output of the differentiator is limited by how fast the output of the change in output voltage . time Typical slew rates are on the order of 1V/µ sec. op-amp can change, defined by the slew rate= Ref. Senturia, Microsystem Design, p. 390. 11/21/2003 EEL5225: Principles of MEMS Transducers (Fall 2003) 39