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OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
Jean-Marie MACKOWSKI
Université Claude Bernard Lyon 1
SMA-VIRGO
Bât 213
22, Bd Niels Bohr
69622 Villeurbanne Cedex
[email protected]
Phone : + 33 04 72 43 26 69
Fax : + 33 04 78 89 19 36
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
TODAY MENU
COATING DEPOSITION TECHNIQUES
VIRGO EXPERIENCE
VIRGO METROLOGY
&
OPTICS PERFORMANCES
LIMITATIONS SOURCES
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
TODAY MENU
COATINGS DEPOSITION TECHNIQUES
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
ION ASSISTED DEPOSITIONAD
substrat
coating
Vapor flow
Assistance source
material
crucible
Electron beam, Joule effect, Laser, …
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
I.B.S. Deposition Principles
Sample Holder
Assist
Source
O2
+
+
-
Ar
Neutralizor
-
-
+
+
-
+
-
( Planetary Motion )
+
Substrates
(Filament, PBN)
Targets
Meissner Trap
NATO/ASI and Euro Summer School September 16-27, 2002
Quartz
Sputtered
Particles
+
+
+
-
O2
-
+
+
-
-
+
+
- -
Neutralizor
Sputtering
Source
Ar
Ar
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
I.B.S. Deposition Systems
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
C.V.D Plasma Deposition Systems
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
FROM SOURCE TO SUBSTRAT SURFACE
Vapor flow:
nature, direction, energy
Source
Temperature
Emission law
Substrat
Medium
pressure
Temperature
Evaporation:
0.1 eV (1100K)
m.s-1
Sputtering:
10 to 50 eV
km.s-1
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
VIRGO LARGE COATER
•Dimension: 2x2.2x2.2 m3
•Vacuum: 2.10-8 mBar
•DIBS technology
•Environment: Class 1
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
CLASS 1 CLEAN ROOM BEFORE INTEGRATION
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
VIRGO LARGE COATER
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
COATING THICKNESS UNIFORMITY
•6.10-3 without masking on f 350 mm
•3.10-3 with masking on f 700 mm
C 01035
C 01041
C 01043
C 01047
PC=50°
PC=50° Mask 1
PC=50° Mask 2
PC=50° Mask 3
Thickness uniformity (%)
Ta2O
5
5
0
-5
-10
-15
-20
-25
-400
-300
-200
-100
0
100
200
300
400
Position (mm)
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
CORRECTIVE COATING
Source
Ion d’ions
Source
SiO2
Cible Target
SiO2
Mask
Masque
Atomes
Sputtered
Sputtered
pulvérisésAtoms
Atomes
Robot
Robot
Y
X
Miroir
Mirror
Interféromètre
Interferometer
Contrôle du front d’onde
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
before
correction
CORRECTIVE COATING
30 nm P.V.
6 nm R.M.S
0
after
correction
14 nm P.V.
1.5 nm R.M.S.
0
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
IBS COATER
 Absorption @ 1064 nm : 0.2 / 1 ppm
 Process Difffusion @ 1064 nm : 0.6 / 4 ppm
 Centring Wavelength repeatability : +/- 0.4 %
 Wavefront after Corrective Coating : <1 nm
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
TODAY MENU
VIRGO EXPERIMENT
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
VIRGO
FRANC0-ITALIEN PROJECT
11 Laboratories
5 in France 11 in Italy
200 people
100 M€
Antenna Located at PISA
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
VIRGO
INTERFEROMETER
ME1
MIRROR HR
R=0.99995
3 km
MIRROR
R=0.88
MI1
MR
MI2
B.S.
BS
R=0.5
3+
LASER YAG:Nd
20 W
AR
-4
R<5.10
AR
-4
R<5.10
AR -3
R<10
MIRROR
R=0.92
AR
-4
R<5.10
MIRROR
R=0.88
3 km
ME2
MIRROR HR
R=0.99995
DETECTOR
détecteur
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
VIRGO SITE
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
VIRGO TUNNEL
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
VIRGO CENTRAL BUILDING
W
N
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
NATO/ASI and Euro Summer School September 16-27, 2002
VIRGO SUSPENSIONS
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
Beam splitter
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
TODAY MENU
VIRGO METROLOGY
&
OPTICS PERFORMANCES
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
FIRST VIRGO MIRROR
• Bulk diameter : 350 mm
• Coating diameter : 330 mm
• Bulk Thickness : 96 mm
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS
OPTICS
IN ASTROPHYSICS
IN ASTROPHYSICS
Coatings
Coatings
Performances
Performances
& Limitations
& Limitations
SMA
NATO/ASI and Euro Summer School September 16-27, 2002
METROLOGY
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
ABSORPTION BENCH
Mesurement of the coating absorption …
… as well as the bulk absorption
28W CW YAG:Nd3+ pump laser
Mappings up to Ø400 mm
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
COATING ABSORPTION (VEM04) @ 1064 nm on Ø 150 mm
0,63  0.07 ppm
Ø 150mm
Sensitivity: 20 ppb
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
BULK ABSORPTION (VIM03) @ 1064 nm on Ø 150 mm
0,74  0.05 ppm.cm-1
Ø 150mm
Sensitivity: 30 ppb.cm-1
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
BIREFRINGENCE BENCH
Mesurement of the amplitude as
well as the principle axis direction.
Mappings up to Ø400 mm.
losses due to birefringence in P or S polarisation
(log10)
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
BIREFRINGENCE (VIM01) on Ø 150 mm
Amplitude. Sensitivity: 10-5 rad.cm-1
NATO/ASI and Euro Summer School September 16-27, 2002
Principle axis direction
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
RELATIVE REFLEXION
BENCH
SENSITIVITY: dR/R = 2.10-5
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
WAVE FRONT MEASUREMENT
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
WAVE FRONT (VEM04) on Ø 150 mm
3.8 mn RMS
29 nm PV
Ø 150mm
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
STITCHING
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
STITCHING WAVE FRONT (VEM04)
on Ø 280 mm
11.6 mn RMS
73.8 nm PV
Ø 280mm
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
SCATTERING MEASUREMENT
Multiplexeur
Electronique
Platine
Goniométrique
Détecteur
Réflexion
Spéculaire
Miroir de Focalisation
S
Echantillon
Iris
d'alignement
Lumière Diffusée
Filtre
Spatial
Modulateur
Laser
(He-Ne, Yag, CO2)
NATO/ASI and Euro Summer School September 16-27, 2002
Détecteur
de référence
Iris
d'alignement
M1
M2
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
SCATTERING (VEM04) on 150150 mm2
75
37.5
4 ppm
150150 mm2
0
- 37.5
-75
-75
NATO/ASI and Euro Summer School September 16-27, 2002
- 37.5
0
37.5
75
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
TRANSMISSION (VEM04) on 150150 mm2
42.9  0.2 ppm
Ø50mm
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
MICROMAP
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
END MIRROR (VEM04) OPTICAL PERFORMANCES
SIDE B
measurements
VIRGO
requirements
average
scattering
< 5 ppm
4 ppm
150150 mm2
average
transmission
10 < T < 50 ppm
42,9 +/- 0,2 ppm
50 mm
average
absorption
< 5 ppm
0,63 +/- 0,07 ppm
150 mm
birefringence
-4
< 5.10
SMA-VIRGO
measurements
-1
rad.cm
< 5.10-4 rad.cm-1
150 mm
wave front
flatness
< 8 nm RMS
150 mm
3,8 nm RMS
150 mm
shape
concave
3450 +/- 100 m
150 mm
concave
3580 +/- 17 m
f150 mm
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
TODAY MENU
LIMITATION SOURCES
OF PERFORMANCE
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
LIMITATION SOURCES
MATERIALS PURITY
SUBSTRATE (BULK)
CHEMICALS USED FOR THE POLISHING PROCESS
CHEMICALS USED FOR THE CLEANING PROCEDURE
SPUTTERING TARGETS
COATER WALLS
ION SOURCES COMPONENTS
GAZ USED FOR DEPOSITION PROCESS, …
ENVIRONNEMENTAL CONDITIONS
PARTICULATE CONTAMINATIONS
ORGANIC CONTAMINATIONS
BOXES FOR TRANSFERT & TRANSPORTATION
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
LIMITATION SOURCES
MATERIALS PURITY
&
ENVIRONNEMENTAL CONDITIONS
CONTROL
PHYSICO-CHEMICAL ANALYSIS TOOLS
LIKE :
ESCA, RBS, AUGER, SEM, XTM, SIMS…
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
SIMS PRINCIPLES
Acquisition
Magnetic Quadrupole
Scintillator
Electron
beam
(flood gun)
Secondary Ions
m/e
e-
Common Ions Sources
SAMPLE
NATO/ASI and Euro Summer School September 16-27, 2002
O+, Ar+, Cs+, Ga+…
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
MIRRORS :SIMS PROFILES
1,E+05
Oxyde 1
1,E+04
SiO2
Ta205
23
Na Na+
+ 23
K + 39
Oxyde 2
intensité (u.a.)
K+ 39
1,E+03
1,E+02
1,E+01
1,E+00
0
0,1
0,2
0,3
profondeur (µm)
NATO/ASI and Euro Summer School September 16-27, 2002
0,4
0,5
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
MIRRORS :SIMS PROFILES
Ta+
NATO/ASI and Euro Summer School September 16-27, 2002
Si+
Ti+
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
MIRRORS :SIMS PROFILES
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M
OPTICS IN ASTROPHYSICS
Coatings Performances & Limitations
SMA
CONCLUSION
AT THIS STEP,
OPTICAL LOSSES IMPROVEMENT
NEEDS BIG R&D EFFORTS
NATO/ASI and Euro Summer School September 16-27, 2002
JM.M