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LSI LOGIC LSI Logic Japan Semiconductor Manufacturing Process LSI LOGIC What part at LLJS ? LSI Logic Japan Semiconductor LSI Logic Japan Si wafer Patterned wafer Customer Assembly Sorted wafer LSI LOGIC LSI Logic Japan Semiconductor CMOS Cross Section Poly Si Gate Gate Oxide N-MOS Tr. Field Oxide P-MOS Tr. Field Oxide N+ S/D P+ S/D P-Well Silicon N-Well LSI LOGIC CMOS 3LM Cross Section W Plug LSI Logic Japan Semiconductor Meatl-3 Metal-2 Insulator Metal-1 Silicon LSI LOGIC Cross Section of Process Flow - Field Oxidation Si3N4 SiO2 Pad P-Sub. Oxidation SiO2 Bird’s beak P-Sub. LSI Logic Japan Semiconductor LSI LOGIC Cross Section of Process Flow - Implantation, Diffusion - Impla Resist SiO2 P-Sub. Diff (Anneal at ~900℃） Well P-Sub. LSI Logic Japan Semiconductor LSI LOGIC Process Cycle LSI Logic Japan Semiconductor Diffusion Ion Implant Cleaning Masking CMP Etching PVD CVD LSI LOGIC Masking Process LSI Logic Japan Semiconductor - Stepper Optics - Fly’s Eye Lens Mask Elliptic Mirror Mercury Arc Lamp Photo Resist Si Wafer Projection Lens LSI LOGIC Masking Process - Development Exposure Resist Developer Sub. Sub. Sub. Etching LSI Logic Japan Semiconductor LSI LOGIC Masking Process - Projected Image - LSI Logic Japan Semiconductor LSI LOGIC Cleaning Process LSI Logic Japan Semiconductor - RCA Wet Station Filter Filter DIW P P HF bath OR bath SC-1 bath QDR bath Oxide Strip DI water Rinse Organic Remove DI water Rinse Cooling tube Filter DIW P IPA vapor bath FR bath Drying DI water Rinse H-QDR bath SC-2 bath Hot DI water Rinse Metal Remove LSI LOGIC Oxidation Process LSI Logic Japan Semiconductor - Vertical Furnace - Wafer Quartz Boat Quartz Tube Heater TC Exhaust Lamp Silicon chip H2, N2 O2, N2, HCl LSI LOGIC LSI Logic Japan Semiconductor Ion Implatation Process Accelerator Analyzer Magnet Y-Scanning Plate Wafer Ion Beam Slit Ion Source X-Scanning Plate Gas Source Power Supply Disk LSI LOGIC LP-CVD Process ( Hot Wall Type Vertical Furnace ) Heater Outer Tube Boat Wafe r Inner Tube Quartz Cap Reactive Gas Vacuu m LSI Logic Japan Semiconductor LSI LOGIC PE-CVD Process LSI Logic Japan Semiconductor (Dual Frequency, Multi-station Sequential Deposition) #2 #1 Loadlock Chamber #3 Reactor Chamber #4 #5 #7 #6 LSI LOGIC AP-CVD Process LSI Logic Japan Semiconductor (Wafer Face Down, Multi-D/H Sequential Deposition) LSI LOGIC PVD Process LSI Logic Japan Semiconductor - DC Magnetron Sputtering Plasma Area Magnet Target Shield Al or Ti Ar+ Ar+ Power Supply Wafer + Vacuum Pump Ar Gas LSI LOGIC LSI Logic Japan Semiconductor Etching Process Process chamber GAS [ CF4, CHF3 , Cl2 ] ANODE WAFER CATHODE RF POWER VACUUM PUMP LSI LOGIC LSI Logic Japan Semiconductor CMP (Chemical Mechanical Polishing) Process Principle Force Slurry Wafer Carrier Polishing Pad Wafer Table The surface of the wafer is polished by the slurry. LSI LOGIC In-Line Monitoring Tools Inspection Tool Die to Die Wafer Inspection LSI Logic Japan Semiconductor Review Tool Microscope In-Line SEM KLA2608 JWS-7500 KLA2132 Ultrapointe LIS-1010 KLA2138 Laser Particle Monitor HITACHI IS-3270 JFS-9815 Leica INS-3000 etc. Defect Classification Microscope SEM Date Lot W afer 08/20 Z834096X #24 08/20 Z834096X #01 08/19 Z834064X #12 08/19 Z834036X #24 08/19 Z834036X #01 08/18 Z834001X #12 08/17 Z833180X #03 08/17 Z833180X #01 08/11 Z833032X #12 08/11 Z833002X #24 08/11 Z833002X #01 08/10 Z832248X #12 08/07 Z832130X #24 08/07 Z832130X #01 08/06 Z832090X #12 08/04 Z832039X #24 08/04 Z832039X #01 08/04 Z832001X #12 Defect Map 08/02 Z831244X #24 08/02 Z831244X #01 08/02 Z831206X #12 07/31 Z831170X #24 07/31 Z831170X #01 07/30 Z831134X #12 Defect Density (cm-2) Wafer Inspection 07/30 Z831083X #24 07/30 Z831083X #01 LSI LOGIC In-Line Monitoring Flow 1 LSI Logic Japan Semiconductor Trend Chart 2.0 1.8 C ontact M ask 1.6 1.4 1.2 1.0 0.8 0.6 0.4 0.2 0.0 LSI LOGIC In-Line Monitoring Flow 2 LSI Logic Japan Semiconductor Elemental Analysis (EDX) Analysis & Investigatio n Cross-Section (FIB) Feedback to Root Cause Electron Mode Ion Mode LSI LOGIC Process Trend Lithography : KrF, ArF, F2, EUV Metallization : Cu, Low-K Manufacturing : 300mm, Single Wafer LSI Logic Japan Semiconductor LSI LOGIC LSI Logic Japan Semiconductor Semiconductor Business 226.5 B$ ~ World / yr 2000 2.7 ~ LSI B$ / yr 2000
