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MTL - The Facilities • Integrated Circuits Laboratory – Class 10 - 2800 sq.ft. (6") – 1.25 micron CMOS baseline process • Technology Research Laboratory – Class 100 - 2200 sq.ft. (6") – Flexible Process Environment • Exploratory Materials Laboratory – Class 1000 - 2000 sq.ft. – Thin Film Process Facility • IC Design Laboratory – Foundry IC Processes Microsystems Technology Laboratories - MIT MTL Technology: A Tour of Scale Gyroscopes Displays Transistors Microengines mm mm nm Microchemical Plants Connectors Low Power IC Microsystems Technology Laboratories - MIT Nanotips Microfabrication Project Lab - 6.151 / MAS.96(…) [6.152 - pre-req for fab and class] F99 - interferometric accelerometer (1) S01 - ID stress-sensor S02 - Field effect biosensor with integrated fluidics S00 - interferometric accelerometer (2)
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