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Download MEMS Device Treasure Hunt assignments Accelerometer using capacitive sensing Sensitivity in g’s
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MEMS Device Treasure Hunt assignments Device Type Accelerometer using capacitive sensing Accelerometer using tunneling-based sensing Silicon pressure sensor Silicon pressure sensor Microfabricated capillary electrophoresis device Microfluidic flow cytometer Room-temperature microfabricated bolometer Room-temperature microfabricated bolometer MEMS thermal actuator MEMS thermal actuator MEMS thermal actuator MEMS nanopositioner MEMS tunable capacitor Microfabricated optical switch Surface micromachined tunable capacitor Microfabricated electrophoresis chip for proteins Microfabricated RF switch Active gaseous valve Active liquid valve Gyroscope (any type) Micro mechanical resonator Micro mechanical resonator Specification for Best Performance Sensitivity in g’s Sensitivity in g’s Operating temperature range Pressure-measuring range (e.g., span) DNA separation speed Sorting rate Response time Sensitivity Fastest response time Largest force Largest displacement Best resolution Actuation voltage Power and insertion loss Tuning ratio or range Number of theoretical plates Switching speed Highest back pressure Highest flow rate Noise floor Resonant frequency Quality factor (Q) Cite as: Carol Livermore and Joel Voldman, course materials for 6.777J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
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