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Chipworks MEMS Reports
Dec - 2010 List ordered by date published with new in red
Code
MPR
SAR
PPR
CAR
CTR
ICS
FTR
Report Category
MEMS Process Review
Structural Analysis Report
Process Review Report
Circuit Analysis Report
Chiptease Report
ICWorks Surveyor
Focused Technology Review
Description
Report type created specifically to serve MEMS customers with relevant structural and architectural analysis
Comprehensive analysis including TEM images
Comprehensive analysis using SEM images
Hierarchical schematics of key blocks
Quick look at the essential information about a device
Very high magnification topographical mosiac of 1000's of SEM images
Customized report type used for non-standard reports
For every full MEMS Process Review (MPR) modules are available. Contact your salesperson for details.
Inertial Sensors
Manufacturer
Process
Circuit/Layout
Device
Description
STMicroelectronics
MPR-1011-903-1
EXR-1005-802
FAR-1012-903
L3G4200D Gyroscope
4x4mm LGS package. MPR is Module 1
Apple (ST)
MPR-1010-802
FAR-1012-904
Apple A2L Accelerometer
STMicroelectronics 2x2 sensor in the Apple iPod Nano, Modules 1 and 2
Invensense
MPR-1004-801
Invensense ITG-3200 Gyroscope
The ITG-3200 is a three-axis gyroscope.
STMicroelectronics
MPR-1002-802
STMicroelectronics LYPR540AH Gyroscope
The LYPR540AH is a three axis yaw, pitch and roll analog gyroscope featuring three separate analog output
channels.
Invensense
EXR-1005-802
IDG-650 Dual-Axis MEMS Gyroscope
The IDG-650 is an integrated dual-axis angular rate sensor (gyroscope) fabricated using InvenSense’s
MEMS technology. All required electronics are integrated onto a single chip within the sensor.
STMicroelecronics
MPR-1002-801
STMicroelectronics LSM303DLH Accelerometer +
Magnometer
The LSM303DLH has a linear acceleration full-scale of ±2 g / ±4 g / ±8 g and a magnetic field full-scale of
±1.3 / ±1.9 / ±2.5 / ±4.0 / ±4.7 / ±5,6 / ±8.1 gauss, both fully selectable by the user.
STMicroelectronics
EXR-0908-801
LPR530AL, LPY530AL, LPF430AL, LPR430AL
Exploratory analysis comparing multiple STMicroelectronics devices from a plan view and general structure.
Analog Devices
EXR-0910-802
ADXL346
Ultra Low Power MEMS Accelerometer
Bosch
EXR-1004-901
MPR-1011-904-1
BMA220
The BMA220 is an ultra small triaxial, low-g acceleration sensor with digital interfaces, aiming for low power
consumer market applications.
Bosch
EXR-0911-802
BMA140, BMA 150, SMB380
Comparison of 3-Axis Accelerometers from Bosch
Analog Devices
MPR-0907-802
ADXL345
Accelerometer using a standard process and not the iMEMS process that Analog Devices has used for over
10 years.
MEMSIC
MPR-0907-801
MMC312xM
3-Axis Magnetic Sensof
Freescale
PPR-0904-801
MMA6222AEG Accelerometer
This devicce uses a high-aspect ratio process (HARMEMS)
Sensor Dynamics
MPR-0903-802
SD755 Combination Inertial Sensor
This device combines an accelerometer and a gyroscope in a single package and on a dingle die.
Freescale
EXR-0810-802
MMA1211EG, MMA1250EG, MMA2201EG,
MMA2300D, MMA3201EG
Comparing basic structures of several Freescale MEMS devices
VTI
MPR-0901-801
CMA3000 Accelerometer
Small size and low power consumption in an innovative package delivers acceleration measurement with
sub-10 uA current consumption at 40 Hz sample rate.
STMicroelectronics
MPR-0809-802
-
STMicroelectronics LIS331DL Accelerometer
The latest 3-axis accelerometer from STMicroelectronics with notable design wins in the Apple Nano and
iTouch
STMicroelectronics
MPR-0809-801
-
STMicroelectronics LIS300AL Gyroscope
Their first MEMS gyroscope and presents one of the smallest footprints available on the market. Measuring
only 7mm x 7 mm x 1.5 mm it is less than half the overall size of some of its competitors.
MEMSIC
MPR-0805-803
FAR-1012-903
-
-
MEMSIC MXD6125QB Dual-Axis Micro-Machined
Thermal Accelerometer
Dual-axis micromachined accelerometer, the MXD6125QB is a low noise 0.13 mg/vHz, ±1 g
thermal convection based MEMS sensor.
Three-Axis Low g Digital Output Acceleration Sensor with fast response time, low current consumption, low
voltage operation and a standby mode in a small profile package.
Freescale
MPR-0805-802
-
Freescale MMA7455 Digital 3-Axis Accelerometer
Infineon
MPR-0804-801
-
Infineon SMM310E6433XT MEMS Microphone
Infineon's first MEMS Microphone, this device represents one of the early examples of a large
semiconductor company into this market.
Bosch
MPR-0708-801
Bosch SMB380 Accelerometer
The SMB380 is a triaxial low-g acceleration sensor with digital output with ultra-low-power capabilities, a
small footprint (3mm x 3mm) and a flat package (0.9mm height).
Bosch
MPR-0709-904
-
Bosch SMG070 Angular Rate Sensor
Bosch's latest angular rate sensor available only in OEM parts for rollover detection.
The LIS3L02AL is a low-power 3-axis linear capacitive accelerometer that includes a sensing element and an
IC interface.
CAR-0711-902
STMicroelectronics
MPR-0703-801
-
STMicroelectronics 3-Axis Accelerometer (from Wii)
LIS3L02AE
Analog Devices
PPR-0609-803
-
Analog Devices ADIS16250 MEMS Gyroscope
Sold under the brand iMEMS (integrated Micro Electro Mechanical System) Analog Devices has shipped
over 250 million such devices.
InvenSense
MPR-0702-801
InvenSense IDG-300 Dual-Axis Angular Sensor
The IDG-300 MEMS gyroscope is an integrated dual-axis angular rate sensor designed for consumer and
industrial applications requiring low cost, small size and high performance.
Analog Devices
PPR-0602-801
-
Analog Devices ADXL330 3-axis Accelerometer
The ADXL330 is a small, low power complete three axis accelerometer with signal conditioned voltage
outputs, all on a single monolithic IC.
Kionix
PPR-0512-802
-
Kionix KXM52 3 Axis Accelerometer
This report is a MEMS process review of the Kionix KXM52 tri-axis (XYZ) accelerometer and inclinometer
sensor and a basic analysis of the associated ASIC.
Freescale
PPR-0512-801
-
Freescale MMA7260 3 Axis Accelerometer
Freescale Semiconductor's MMA7260Q XYZ three-axis programmable low g acceleration sensor is
designed to detect on three axes.
Kionix
PPR-0505-001
-
Kionix KGF01-0000 Gyroscope Sensor
This report is a MEMS process review of the Kionix KGF01 Gyroscope Angular Rate Sensor. Kionix advertises
that the KGF01 applications include motion detection, inertial navigation and deductive reckoning.
Hokuriko
CTR-0503-002
-
Hokuriko HAAM-301B Accelerometer
The HAMM-301B is a single package accelerometer.
-
Analog Devices ADXL311JE 2 g Dual-Axis
Accelerometer
A fully integrated, low power, lowest priced and reliable MEMS =+/-2 g accelerometer for static and
dynamic applications.
Analog Devices
SAR-0401-001
CAR-0705-804
STMicroelectronics
SAR-0311-003
Analog Devices
CAR-0309-003
STMicroelectronics LIS3L02AQ Three-Axis
Accelerometer Sensor
The STMicroelectronics LIS3L02AQ 3-Axis 2g/6g Linear Acceleration Sensor is the sensor portion of the
LIS3L02AQ 3 Axis 2g/6g Linear Accelerometer, which includes the sensor die and IC interface die.
Analog Devices ADXL203 Dual Axis Accelerometer
The Analog Devices ADXL203 is a high-precision, low power, complete dual axis accelerometer with signal
conditioned voltage outputs, all on a single monolithic IC.
The Analog Devices ADXRS150 Gyroscope Sensor is a complete Z-axis rate-sensing device. The ADXRS150
Gyroscope Sensor is manufactured using a process that integrates a BiCMOS and mechanical MEMS.
Analog Devices
SAR-0306-005
-
Analog Devices ADXRS150 Gyroscope
STMicroelectronics
SAR-0304-010
-
ST Microelectronics LIS2L02AS 2-Axis/1g Acceleration This device allows for the sensing of acceleration or inclination in two directions, such as anti-theft systems,
Sensor
industrial production equip, robotic toys and automotive electronics.
Bosch
SAR-0210-001
-
Bosch CMB191 Z-Axis Sensor Structural Analysis
The Bosch CMB191 Z-Axis Acceleration Sensor is manufactured using a MEMS (Microelectromechanical
Systems) process.
Bosch
SAR-0206-001
-
Bosch 4929127851 Acceleration Sensor
The Bosch 4929127851 Acceleration Sensor is a one-axis acceleration sensor that is surface micromachined
polysilicon structure built on top of a silicon die.
Microphones
Manufacturer
Process
Circuit
Device
Description
Analog Devices
EXR-0912-901
CAR-1007-907
ADMP403
MEMS Microphone
Knowles Acoustics
EXR-0907-901
CAR-0909-903
SPM0405HD4H
Full analog circuit analysis of one of the leading knowles microphones. Includes the exploratory review of
the MEMS structure.
MEMSTech
MPR-0803-201
-
MEMSTech MSM3C-S4045 MEMS Microphone
MEMSTech is an innovative player in the MEMS market with devices covering all the high growth sectors.
The AKU2000 is a surface-mountable, digital-output silicon microphone that is optimal for use in
microphone array applications where noise immunity is required.
The TC100Z21A is a Silicon condenser microphone with an integrated ADC providing a digital output. The
component is compatible with SMD mounting techniques
The Emkay (now known as Knowles Acoustics) SP0103 microphone is a low-cost, high-performance
alternative to traditional ECMs (Electric Condenser Microphones).
Akustica
MPR-0704-802
CAR-0705-803
Akustica AKU2000 MEMS Microphone
Sonion
MPR-0611-801
CAR-0612-904
Sonion TC100Z21A Silicon Condenser Microphone
Knowles Acoustics
PPR-0608-801
CAR-0406-003
Knowles Acoustics SP0103BE3 (SP0103NC3-2)
Microphone
CAR-0311-004
Emkay SiSonic SP0103 Microphone Circuit Analysis
The Emkay (now known as Knowles Acoustics) SP0103 microphone is a low-cost, high-performance
microphone.
CAR-0805-806
Infineon SMM310E6433XT Silicon Microphone ASIC
Microphone designed for handheld devices and mobile applications.
Emkay
Infineon
MPR-0804-801
Printheads
Manufacturer
Process
Circuit
Device
Description
Xerox
EXR-1003-904
Xerox Colortube
The Xerox ColorQube Printhead is comprised of a metal body (102.4 mm x 68.5 mm x 2.5 mm thick). The
Xerox ColorQube printheads use Xerox's proprietary solid ink technology.
Toshiba
EXR-1003-904
Toshiba CA4
The Toshiba CA4 printhead is comprised of a ceramic body. The print swath is ~53.6 mm and is mounted
inside a copper or brass plate.The Toshiba CA4 printhead uses either oil based or UV curable inks.
OCE
EXR-1003-802
OCE ColorWave600
The OCE ColorWave 600 Printhead is based on OCE’s CrystalPoint Technology. Cross-sectional analysis of
the printhead region shows the the ink reservoirs, the ink channels, and the nozzles.
Fujifilm
EXR-1003-801
Fujifilm Dimatix
The Fujifilm Dimatix Inc. printhead is comprised of a 1 mm thick printed circuit board (42 mm x 76 mm),
with eight HV5623K7 chips mounted four on each side, plus a piezoelectric printhead, that features 256 ink
jet nozzles.
Hewlett-Packard
MPR-0805-901
-
Hewlett-Packard HP60 Printhead
Hewlett-Packard is a leader in the printhead market and this device is one of their high volume designs
delivering dye-based color and pigment-based black
Kodak
MPR-0704-901
-
Kodak Printhead 6J2032
The Kodak 6J2032 EASYSHARE is an all-in-one photo quality printhead. Kodak is adopting a strategy
pioneered by HP and Canon whereby the printhead is integrated into the printer, rather than into the print
cartridge.
Hewlett-Packard
FTR-0703-801
-
Hewlett-Packard - Canon Printhead Process
Comparison
The fully lithographic process represents a significant advance over the earlier manufacturing processes
that used a separately fabricated orifice plate affixed over the printhead die.
Lexmark
PPR-0607-802
-
Lexmark 18C0033 Color Inkjet Printhead
Chipworks takes you inside this printhead from the a leading manufacturer. Lexmark.
Hewlett-Packard
PPR-0605-801
-
Hewlett Packard K550/HP88 Inkjet Print Head
Hewlett Packard PrintHead HP8250 Process review takes you inside the latest from the #1 manufacturer.
Canon
PPR-0610-801
-
Canon PF-01 Printhead Process
Chipworks takes you inside this printhead from the a leading manufacturer. Canon.
Hewlett-Packard
PPR-0509-901
-
Hewlett Packard PrintHead HP8250
The HP Photosmart 8250 Printer uses HPs new scalable printing technology, in which the printhead is
completely fabricated at the wafer level.
Canon
SAR-0307-001
-
Canon i950 Print Head
The i950 incorporates Micro-Nozzles that have an ejection aperture measuring just 10 microns in diameter,
far narrower than the nozzles in competitor's products.
Other
Manufacturer
Process
Circuit
Device
Description
The MPL115A1 is an absolute pressure sensor with digital output for low cost applications. A miniature 5 x
3 x 1.2 mm LGA package is used.
Freescale
EXR-1005-806
Freescale MPL115A1 Digital Barometer
Texas Instruments
MPR-1005-901
Texas Instruments 1910-612M Digital Mirror Device
The 910-612M is Texas Instruments latest Digital Mirror Device.
FLIR ISC0601 Infrared Bolomoter
Each pixel contains and uncooled bolometer structure, formed using micro-electro-mechanical systems
(MEMS) technology. Report type is Imager Process Review
AK8973 Hall Effect Magnetic Compass
AKM's compass device integrates silicon base Hall effect geomagnetism with high precision mix-signal
sensor conditioning. Process and circuit analysis available in basic and detailed formats.
FLIR
IPR-1002-801
-
AKM
MPR-0910-801
MEMSIC
MPR-0907-801
-
MMC312xM Tri-Axis Magnetic Sensor
A detailed comparison of 2 generations of TI DMD devices to help you understand how TI took costs out of
this flagship product
Qualcomm
MPR-0806-801
-
Mirasol MEMS Display
The Interferometric Modulator (IMOD) element is composed of two conductive plates. One is a thin film
stack on a glass substrate, the other is a reflective membrane.
CAR-1001-801
TI S1076-6318W and TI S1076-7402 Digital Mirror
Comparison
A detailed comparison of 2 generations of TI DMD devices to help you understand how TI took costs out of
this flagship product
SiTime SiT1106 MEMS Oscillator
SiTime has carved an interesting niche as a leader in MEMS-based oscillators that compete and in some
instances exceed the capabilities of standard quartz-based systems.
-
SiTime SIiT8002AC Silicon Oscillator
SiTime's second generation MEMS oscillator.
SAR-0501-003
-
Freescale MPX5004G Pressure Sensor
This report is a structural analysis of the Motorola MPXV5004G Integrated Pressure Sensor. The
MPXV5004G piezoresistive transducer is a differential pressure sensor ideal for applications employing a
microcontroller.
Texas Instruments
SAR-0501-001
-
Texas Instruments S1076-7402 XGA Digital Mirror
Device
TI's Digital Mirror Devices are now being used in projection displays and portable projectors. This DMD
device removed from a Dell 2300MP projector is a 1024x768 micro-mirror array.
Texas Instruments
MPR-0802-902
-
Texas Instruments .55” XGA DC2 DMD (S1076-6318)
Texas Instruments latest generation digital mirror device with significant innovation in the packaging. Also
a shrink of the DMD structures.
Texas Instruments
CWR-0804-803
SiTime
MPR-0709-904
SiTime
MPR-0802-801
Freescale
-
CAR-0611-911
ICWorks Surveyor and Exploratory Reports (ordered by manufacturer)
ICWorks Surveyor reports are image mosiacs of 1000's of SEM-based images delivered in a software browser. Enables clients to measure the MEMS architecture for simulation.
Exploratory reports provide basic device information and varies by technology beind examined. Often they combine with an ICS report to provide both process and layout.
Manufacturer
Architecture
AKM
Analog Devices
Analog Devices
Analog Devices
Analog Devices
Analog Devices
Analog Devices
Analog Devices
Bosch
Bosch
Bosch
Bosch
Bosch
Freescale
Freescale
Freescale
Freescale
Invensense
Invensense
Kionix
Kionix
Process
EXR-0908-802
EXR-0910-803
ICS-0905-801
ICS-0807-801
ICS-0807-802
ICS-0808-805
ICS-0807-809
ICS-1004-901
ICS-0808-804
EXR-0808-804
EXR-0905-801
EXR-1004-901
ICS-0808-803
ICS-0807-803
ICS-0807-804
ICS-0907-802
ICS-0807-805
ICS-0903-804
ICS-1005-802
ICS-1004-802
EXR-0905-802
EXR-1005-802
EXR-0902-811
ICS-0807-806
ICS-0903-802
Sensor Dynamics
SiTime
STMicroelectronics
STMicroelectronics
STMicroelectronics
STMicroelectronics
STMicroelectronics
STMicroelectronics
STMicroelectronics
STMicroelectronics
STMicroelectronics
Analog Devices
MEMSIC
MEMSIC
Kionix
Kionix
Kionix
STMicroelectronics
STMicroelectronics
Bosch
Bosch
Analog Devices
Freescale
Panasonic
STMicroelectronics
STMicroelectronics
Texas Instruments
VTI Technologies
ICS-0807-807
ICS-1002-803
EXR-0908-801
ICS-0907-802
ICS-0907-803
ICS-0809-801
ICS-0808-802
ICS-0807-808
ICS-0809-802
ICS-0904-801
ICS-0807-809
EXR-0903-801
EXR-0904-801
EXR-0906-801
ICS-0807-810
ICS-0807-811
ICS-0808-801
EXR-0902-811
ICS-1006-801
EXR-1006-801
ICS-0808-802
ICS-0808-803
ICS-0808-804
ICS-0808-805
ICS-0808-808
EXR-0810-801
ICS-0809-801
ICS-0809-802
EXR-0903-802
EXR-0808-801
Report Title
AKM AK8974 Magnetic Compass MEMS Exploratory
Report
ADXL346 3-Axis, ±2 g/±4 g/±8 g/±16 g Ultralow Power Digital MEMS Accelerometer
Analog Deviced ADXL345 3-Axis Accelerometer
Analog Devices ADXL203 2-axis accelerometer
ICWorks Surveyor
Analog Devices ADXL330 3-axis Accelerometer
ICWorks Surveyor (MEMS)
Analog Devices ADIS16250 Gyroscope ICWorks
Analog Devices ADXL001 Vibration Sensor ICWorks
Analog Devices ADXL345 3-Axix Accelerometer MEMS Exploratory Report
Bosch BMS220 3-Axis Accelerometer
Bosch SMG061 Gyroscope ICWorks Surveyor
(MEMS)
Bosch SMB363/SMB365 3-axis Accelerometer
ICWorks Surveyor (MEMS)
Bosch SMB380 3-axis Accelerometer ICWorks
Bosch SMG070 Gyroscope ICWorks Surveyor
Freescale PMMA7660 Accelerometer ICWorks
Freescale MMA7260Q 3-axis Accelerometer ICWorks
Freescale MMA6222AEG Accelerometer ICWorks
Freescale MMA7660FC 3-Axis Accelerometer MEMS Exploratory Report
Invensense IDG-650 Dual-Axis Gyroscope (MEMS)
Invensense ITG-3200 3-Axis Digital Gyroscope (MEMS)
Kionix KXSDP9 3-axis Accelerometer
Kionix KXM52 3-axis Accelerometer ICWorks
Surveyor (MEMS)
Sensor Dynamics SD755 Combi-Sensor - Integrated
accelerometer and Gyro ICWorks Surveyor (MEMS)
SiTime SiT8002 MEMS Oscillator ICWorks Surveyor
STMicroelectronics LYPR540AH 3 Axis Analog Output
STMicroelectronics LPR530AL and LPY530AL
STMicroelectronics LPR530AL 2-Axis Accelerometer
STMicroelectronics LPY530AL 2-Axis Accelerometer
STMicroelectronics LISY300AL MEMS Gyroscope
STMicroelectronics LIS3L02AE 3-axis Accelerometer
STMicroelectronics LIS302DL 3-axis Accelerometer
STMicroelectronics LIS331DL 3-Axis Accelerometer
STMicroelectronics LY530AL Gyroscope ICWorksr
Analog Devices ADXL001 Vibration Sensor ICWorks
MEMSIC Electronic Compass Board MEMS Exploratory Report
MEMSIC C62125E 2-axis Accelerometer ICWorks
Kionix KXP74 3-Axis Accelerometer ICWorks
Surveyor (MEMS)
Kionix KXPB5 3-Axis Accelerometer ICWorks
KXSDP9 3-Axis Accelerometer
STMicroelectronics L3G4200D 3-Axis Gyroscope
STMicroelectronics LIS3L02AE 3-axis Accelerometer
ICWorks Surveyor (MEMS)
Bosch SMB363/SMB365 3-axis Accelerometer
Bosch SMG061 Gyroscope ICWorks Surveyor
Analog Devices ADIS16250 Gyroscope ICWorks
Freescale MMA7455 Three Axis Low-g Digital Output
Panasonic EWTS64N MEMS Angular Rate Sensor for
STMicroelectronics LISY300AL MEMS Gyroscope
STMicroelectronics LIS331DL 3-Axis Accelerometer
DLP from Pico Projector
VTI Technologies SCA3100-D04 3-axis Accelerometer with Digital SPI Interface MEMS Exploratory Report