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Power Supply RF Power Generator [RFS-N Series] RFS-1310N/RFS-1305N is the power generator for the plasma process that can output 13.56MHz·1kW/500W. Downsizing and weight saving are realized by carrying a high efficiency RF amplifier. Furthermore, power and matching control are capable only by main unit because auto-matching control function is in the RF power generator. RFS-1310N A p p lic a tio n s Feat ures Sputtering CVD Plasma etching RF ion source Display (LCD / PDP / LED) processing system Photovoltaic processing system MEMS processing system Power Supply 13.56MHz 1kW is Realized with High Efficiency Amplifier Energy saving is achieved with high power conversion efficiency RF circuit. High-Speed Auto-Matching High-speed auto-matching is realized by high speed algorithm. Built-In Auto-Matching Function in the RF Power Generator Matching system control is capable only by main unit. Manual operation of RF power generator and matching box are capable by optional controller. Flexible Control External analog control, serial communication control and control by optional controller are capable. Cooling Water is Not Necessary Forced air cooling system High Reliability Design based on long time experienced know-how as the vacuum process equipment manufacturer RF Power Generator [RFS-N Series] Specifications (Power Generator) Model RFS-1305N Specifications (Matching Box) RFS-1310N Model AC200 to 220V AC180 to 242V 1phase 50/60Hz Bayonet netlock round connector DCA3106F16-10S G-D-BSN-0 Input capacity 1.2 kVA or less 2 kVA or less Input current 10.0A or less Leak current 5mA or less 13.56MHz Output Spec. Oscillating frequency Rated traveling-wave power 500W (50Ω load) 1000W (50Ω load) Maximum reflected wave power 100W Output impedance 50Ω Harmonic distortion ratio -40dB or less (Rated output,Continuous mode) Output connector Coaxial connector output (N type) Control method Power control mode Control Control precision Rated output ±2% or less Control guarantee range Rated power 10 to 100% 240mm×495mm×150mm Demensions W×D×H (Excepting projection portion) Weight Approx. 11kg Input Spec. Input rated voltage Input voltage fluctuation range Phase, frequency Input connector RF input RF output MBX-1310N Input frequency Rated power Input connector Allowable output voltage Allowable output current Load impedance Residual reflected wave power Cooling system Demensions W×D×H Weight 13.56MHz 50 to 1000W Coaxial connector (N type) 2.5kVpp or less /2.5kVdc or less 40A or less Real part: 0.5Ω≦R≦10.0Ω (Only the range of regulation voltage and current) Big either input travelling wave power 0.3% or less or 10W or less Forced air cooling system using fan 375mm×250mm×170mm (excepting projection portion) Approx. 8kg * Operating ambient temperature : 10˚C to 40˚C (non condensing) * Operating environment : Avoid a vibration,direct sunlight, heat,dust,do not contain corrosive gas D im e n s io n s 100 RFS-1310N/RFS-1305N (RF POWER SUPPLY) 30 3 25 224 375 250 14 31 15 125 4-M4 18 120 MBX-1310N (MATCHING BOX) Unit: mm 495 150 240 17 M5 3 187.5 20 40 328 10-M6 112 77 88 112 77 48 137.5 172.5 137.5 172.5 www.ulvac.co.jp/en ULVAC, Inc. Components Division Overseas Sales in Japan TEL +81-467-89-2261 USA : ULVAC Technologies, Inc. GERMANY : ULVAC GmbH CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TAIWAN : ULVAC TAIWAN, Inc. KOREA : ULVAC KOREA, Ltd. SINGAPORE : ULVAC SINGAPORE PTE LTD TEL +1-978-686-7550 TEL +49-89-960909-0 TEL +86-21-6127-6618 TEL +886-3-579-5688 TEL +82-31-683-2922 TEL +65-6542-2700 PHILIPPINES : ULVAC SINGAPORE PTE LTD Philippines Branch TEL +63-46-437-7700 VIETNAM : ULVAC SINGAPORE PTE LTD Vietnam Representative Office TEL +84-8-6299-8262 INDONESIA : ULVAC SINGAPORE PTE LTD Indonesia Representative Office TEL +62-21-8990-5070 THAILAND : ULVAC (THAILAND) LTD TEL +66-2-7388883 MALAYSIA : ULVAC MALAYSIA SDN. BHD. TEL +60-3-5121-4700 INDIA : ULVAC, Inc., India Branch TEL +91-40-27007006 This catalog is subject to change without notice. This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan. 2455E-1/2014100500TL