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Federal Agency on Technical Regulating and Metrology
(Rostekhregulirovanie)
CENTER FOR SURFACE AND VACUUM RESEARCH
Nanodisplacement Laser Meter
Field of application
Real-time linear
displacement
measurement, including
calibration of scanning
and positioning systems
in microelectronic,
nanotechnology, precise
mechanical engineering,
robot-technique,
micromechanic and
scanning electron and
atomic force microscopy.
General technical data
Range of linear displacement measure
Step of displacement
Accuracy of measure
Highest possible value of measuring
displacement velocity
Dimension of system
Weight
40 Novatorov str.
119421, Moscow, Russia
Ph.:
(007-095) 935-9777
Ph./Fax: (007-095) 935-9690
E-mail
[email protected]
1 nm ÷ 10 mm
0.1 nm
0.5 ÷ 3 nm
3 mm/s
450×270×180 mm
10 kg
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