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Semiconductor Device Modeling and Characterization EE5342, Lecture 25 -Sp 2002 Professor Ronald L. Carter [email protected] http://www.uta.edu/ronc/ L25 16Apr02 1 MOSFET Device Structre Fig. 4-1, M&A* L25 16Apr02 2 n-channel enh. circuit model G RG S RB Cgd Cgs RDS Cbs Idrain DSS RD DSD Cbd D Cgb RB L25 16Apr02 B 3 SPICE mosfet Model Instance CARM*, Ch. 4, p. 290 M MOSFET General Form M<nam e> < drain node> <gate node> < source node> + <bulk /subs trate node> <model nam e> + [L=< value>] [W=< value> ] L = Ch. L. [m] + [AD= <value>] [AS= <value>] W = Ch. W. [m] + [PD= <value>] [PS= <value>] + [NRD=< value>] [NRS=<value>] AD = Drain A [m2] + [NRG=<v alue>] [NRB= <value>] AS = Source A[m2] + [M= <value>] Examples NRD, NRS = D and S diff in squares L=25u W=12u M1 14 2 13 0 PNOM M13 15 3 0 0 PSTRONG M16 17 3 0 0 PSTRONG M=2 M = device L25 16Apr02 M28 0 2 100 100 NWEAK L=33u W=12u multiplier 4 SPICE mosfet model levels • Level 1 is the Schichman-Hodges model • Level 2 is a geometry-based, analytical model • Level 3 is a semi-empirical, shortchannel model • Level 4 is the BSIM1 model • Level 5 is the BSIM2 model, etc. L25 16Apr02 5 SPICE Parameters Level 1 - 3 (Static) Param. Parameter Description Def. Typ. Units 1 1 V VTO Zero-bias Vthresh KP Transconductance GAMMA Body-effect par. 0.0 0.35 V^1/2 PHI Surface inversion pot. 0.6 0.65 V 0.0 0.02 1/V LAMBDA Channel-length mod. 2.E-05 3.E-05 TOX Thin oxide thickness NSUB Substrate doping 0.0 1.E+15 cm^-3 NSS Surface state density 0.0 1.E+10 cm^-2 LD Lateral diffusion 0.0 8.E-05 m L25 16Apr02 1.E-07 1.E-07 A/V^2 m 6 SPICE Parameters Level 1 - 3 (Static) Param. Parameter Description Def. Typ. 1 1 600 700 Units TPG Type of gate material* UO Surface mobility IS Bulk jctn. sat. curr. JS Bulk jctn. sat. curr. dens. PB Bulk junction potential 0.8 0.75 V RD Drain ohmic resistance 0 10 Ohms RS Source ohmic resistance 0 10 Ohms RSH S/D sheet ohmic res. 0 10 Ohms/sq 1.E-14 1.E-15 cm^2/V-s A A/m^2 * 0 = aluminum gate, 1 = silicon gate opposite substrate type, 2 = silicon gate same as substrate. L25 16Apr02 7 SPICE Parameters Level 1 - 3 (Q & N) Param. Parameter Description Def. Typ. Units 0 1.E-09 Fd/m^2 CJ Zero-bias bulk cap./A MJ Bulk jctn. grading coeff. 0.5 0.5 CJSW Zero-bias perimeter C/l 0 1.E-09 MJSW Per. C grading coeff. 0.5 0.5 FC For.-bias cap. coeff. 0.5 0.5 CGBO Gate-bulk overlap C/L 0 2.E-10 Fd/m CGDO Gate-drain overlap C/L 0 4.E-11 Fd/m CGSO G-S overlap C/L 0 4.E-11 Fd/m AF Flicker-noise exp. 1 1.2 KF Flicker-noise coeff. 0.0 1.E-26 L25 16Apr02 Fd/m 8 Level 1 Static Const. For Device Equations Vfb = -TPG*EG/2 -Vt*ln(NSUB/ni) - q*NSS*TOX/eOx VTO = as given, or = Vfb + PHI + GAMMA*sqrt(PHI) KP = as given, or = UO*eOx/TOX CAPS are spice pars., technological constants are lower case L25 16Apr02 9 Level 1 Static Const. For Device Equations b = KP*[W/(L-2*LD)] = 2*K, K not spice GAMMA = as given, or = TOX*sqrt(2*eSi*q*NSUB)/eOx 2*phiP = PHI = as given, or = 2*Vt*ln(NSUB/ni) ISD = as given, or = JS*AD ISS = as given, or = JS*AS L25 16Apr02 10 Level 1 Static Device Equations vgs < VTH, ids = 0 VTH < vds + VTH < vgs, id = KP*[W/(L-2*LD)]*[vgs-VTH-vds/2] *vds*(1 + LAMBDA*vds) VTH < vgs < vds + VTH, id = KP*[W/(L-2*LD)]*(vgs - VTH)^2 *(1 + LAMBDA*vds) L25 16Apr02 11 SPICE Parameters Level 2 Param. Parameter Description Def. Typ. 1 5 NEFF Total channel chg coeff. UCRIT Critical E-field for mob. UEXP Expon. coeff. for mob. 0 0.1 UTRA Transverse field coeff. 0 0.5 L25 16Apr02 1.E+04 1.E+04 Units V/cm 12 SPICE Parameters Level 2 & 3 Param. Parameter Description Def. Typ. Units NFS Surface-fast state dens. 0.0 1.E+10 cm^-2 XJ Metallurgical jctn. depth 0.0 1.E-06 m VMAX Max. drift v of carr. 0.0 5.E+04 m/s XQC Coeff. of ch. Q share 0.0 0.4 DELTA Width eff. on Vthresh 0.0 1.0 L25 16Apr02 13 Level 2 Static Device Equations Accounts for variation of channel potential for 0 < y < L For vds < vds,sat = vgs - Vfb - PHI + g2*[1-sqrt(1+2(vgs-Vfb-vbs)/g2] id,ohmic = [b/(1-LAMBDA*vds)] *[vgs - Vfb - PHI - vds/2]*vds -2g[vds+PHI-vbs)1.5-(PHI-vbs)1.5]/3 L25 16Apr02 14 Level 2 Static Device Eqs. (cont.) For vds > vds,sat id = id,sat/(1-LAMBDA*vds) where id,sat = id,ohmic(vds,sat) L25 16Apr02 15 Level 2 Static Device Eqs. (cont.) Mobility variation KP’ = KP*[(esi/eox)*UCRIT*TOX /(vgs-VTH-UTRA*vds)]UEXP This replaces KP in all other formulae. L25 16Apr02 16 SPICE Parameters Level 3 Param. Parameter Description Def. Typ. KAPPA Saturation field factor 0.2 1.0 ETA Stat. feedbk on Vthresh 0.0 1.0 THETA Mobility modulation 0.0 0.05 DELTA Width eff. on Vthresh 0.0 1.0 L25 16Apr02 Units 1/V 17 Project 4 Part 1 Generate outputs duplicating any 8 of the following 14 figures in A&M* Figure 4-7a and b, Figure 4-8a and b, Figure 4-9a and b, Figure 4-10, L25 16Apr02 Figure 4-11a only, Figure 4-12a only, Figure 4-13, Figure 4-15, Figure 4-19, Figure 4-20, Figure 4-23 18 4-7a (A&M) L25 16Apr02 19 Figure 4-7b (A&M) L25 16Apr02 20 Figure 4-8a (A&M) L25 16Apr02 21 Figure 4-8b (A&M) L25 16Apr02 22 Project 4 Parts 2, 3, and 4 2. Generate outputs duplicating Fig 9.9 in M&K* 3. For each simulation, give the complete list of model parameters used. L25 16Apr02 4. Give a brief discussion of how Level 1, 2, and 3 are selected by Pspice depending on the parameter set used. 23 Body effect data Fig 9.9** L25 16Apr02 24 References • CARM = Circuit Analysis Reference Manual, MicroSim Corporation, Irvine, CA, 1995. • M&A = Semiconductor Device Modeling with SPICE, 2nd ed., by Paolo Antognetti and Giuseppe Massobrio, McGraw-Hill, New York, 1993. • M&K = Device Electronics for Integrated Circuits, 2nd ed., by Richard S. Muller and Theodore I. Kamins, John Wiley and Sons, New York, 1986. L25 16Apr02 25