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Semiconductor Device
Modeling and Characterization
EE5342, Lecture 25 -Sp 2002
Professor Ronald L. Carter
[email protected]
http://www.uta.edu/ronc/
L25 16Apr02
1
MOSFET Device
Structre
Fig. 4-1, M&A*
L25 16Apr02
2
n-channel enh.
circuit model
G
RG
S
RB
Cgd
Cgs
RDS
Cbs
Idrain
DSS
RD
DSD
Cbd
D
Cgb
RB
L25 16Apr02
B
3
SPICE mosfet Model
Instance
CARM*, Ch. 4, p. 290
M
MOSFET
General Form
M<nam e> < drain node> <gate node> < source node>
+ <bulk /subs trate node> <model nam e>
+ [L=< value>] [W=< value> ]
L = Ch. L. [m]
+ [AD= <value>] [AS= <value>]
W = Ch. W. [m]
+ [PD= <value>] [PS= <value>]
+ [NRD=< value>] [NRS=<value>] AD = Drain A [m2]
+ [NRG=<v alue>] [NRB= <value>]
AS = Source A[m2]
+ [M= <value>]
Examples
NRD, NRS = D and
S diff in squares
L=25u W=12u
M1 14 2 13 0 PNOM
M13 15 3 0 0 PSTRONG
M16 17 3 0 0 PSTRONG M=2
M = device
L25 16Apr02
M28 0 2 100 100 NWEAK L=33u W=12u
multiplier
4
SPICE mosfet
model levels
• Level 1 is the Schichman-Hodges
model
• Level 2 is a geometry-based, analytical
model
• Level 3 is a semi-empirical, shortchannel model
• Level 4 is the BSIM1 model
• Level 5 is the BSIM2 model, etc.
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5
SPICE Parameters
Level 1 - 3 (Static)
Param. Parameter Description
Def.
Typ.
Units
1
1
V
VTO
Zero-bias Vthresh
KP
Transconductance
GAMMA
Body-effect par.
0.0
0.35
V^1/2
PHI
Surface inversion pot.
0.6
0.65
V
0.0
0.02
1/V
LAMBDA Channel-length mod.
2.E-05 3.E-05
TOX
Thin oxide thickness
NSUB
Substrate doping
0.0
1.E+15
cm^-3
NSS
Surface state density
0.0
1.E+10
cm^-2
LD
Lateral diffusion
0.0
8.E-05
m
L25 16Apr02
1.E-07 1.E-07
A/V^2
m
6
SPICE Parameters
Level 1 - 3 (Static)
Param. Parameter Description
Def.
Typ.
1
1
600
700
Units
TPG
Type of gate material*
UO
Surface mobility
IS
Bulk jctn. sat. curr.
JS
Bulk jctn. sat. curr. dens.
PB
Bulk junction potential
0.8
0.75
V
RD
Drain ohmic resistance
0
10
Ohms
RS
Source ohmic resistance
0
10
Ohms
RSH
S/D sheet ohmic res.
0
10
Ohms/sq
1.E-14 1.E-15
cm^2/V-s
A
A/m^2
* 0 = aluminum gate, 1 = silicon gate opposite substrate type,
2 = silicon gate same as substrate.
L25 16Apr02
7
SPICE Parameters
Level 1 - 3 (Q & N)
Param. Parameter Description
Def.
Typ.
Units
0
1.E-09
Fd/m^2
CJ
Zero-bias bulk cap./A
MJ
Bulk jctn. grading coeff.
0.5
0.5
CJSW
Zero-bias perimeter C/l
0
1.E-09
MJSW
Per. C grading coeff.
0.5
0.5
FC
For.-bias cap. coeff.
0.5
0.5
CGBO
Gate-bulk overlap C/L
0
2.E-10
Fd/m
CGDO
Gate-drain overlap C/L
0
4.E-11
Fd/m
CGSO
G-S overlap C/L
0
4.E-11
Fd/m
AF
Flicker-noise exp.
1
1.2
KF
Flicker-noise coeff.
0.0
1.E-26
L25 16Apr02
Fd/m
8
Level 1 Static Const.
For Device Equations
Vfb = -TPG*EG/2 -Vt*ln(NSUB/ni)
- q*NSS*TOX/eOx
VTO = as given, or
= Vfb + PHI + GAMMA*sqrt(PHI)
KP = as given, or
= UO*eOx/TOX
CAPS are spice pars., technological
constants are lower case
L25 16Apr02
9
Level 1 Static Const.
For Device Equations
b = KP*[W/(L-2*LD)] = 2*K, K not spice
GAMMA = as given, or
= TOX*sqrt(2*eSi*q*NSUB)/eOx
2*phiP = PHI = as given, or
= 2*Vt*ln(NSUB/ni)
ISD = as given, or = JS*AD
ISS = as given, or = JS*AS
L25 16Apr02
10
Level 1 Static
Device Equations
vgs < VTH, ids = 0
VTH < vds + VTH < vgs,
id = KP*[W/(L-2*LD)]*[vgs-VTH-vds/2]
*vds*(1 + LAMBDA*vds)
VTH < vgs < vds + VTH,
id = KP*[W/(L-2*LD)]*(vgs - VTH)^2
*(1 + LAMBDA*vds)
L25 16Apr02
11
SPICE Parameters
Level 2
Param. Parameter Description
Def.
Typ.
1
5
NEFF
Total channel chg coeff.
UCRIT
Critical E-field for mob.
UEXP
Expon. coeff. for mob.
0
0.1
UTRA
Transverse field coeff.
0
0.5
L25 16Apr02
1.E+04 1.E+04
Units
V/cm
12
SPICE Parameters
Level 2 & 3
Param. Parameter Description
Def.
Typ.
Units
NFS
Surface-fast state dens.
0.0
1.E+10
cm^-2
XJ
Metallurgical jctn. depth
0.0
1.E-06
m
VMAX
Max. drift v of carr.
0.0
5.E+04
m/s
XQC
Coeff. of ch. Q share
0.0
0.4
DELTA
Width eff. on Vthresh
0.0
1.0
L25 16Apr02
13
Level 2 Static
Device Equations
Accounts for variation of channel
potential for 0 < y < L
For vds < vds,sat = vgs - Vfb - PHI
+ g2*[1-sqrt(1+2(vgs-Vfb-vbs)/g2]
id,ohmic = [b/(1-LAMBDA*vds)]
*[vgs - Vfb - PHI - vds/2]*vds
-2g[vds+PHI-vbs)1.5-(PHI-vbs)1.5]/3
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14
Level 2 Static
Device Eqs. (cont.)
For vds > vds,sat
id = id,sat/(1-LAMBDA*vds)
where id,sat = id,ohmic(vds,sat)
L25 16Apr02
15
Level 2 Static
Device Eqs. (cont.)
Mobility variation
KP’ =
KP*[(esi/eox)*UCRIT*TOX
/(vgs-VTH-UTRA*vds)]UEXP
This replaces KP in all other formulae.
L25 16Apr02
16
SPICE Parameters
Level 3
Param. Parameter Description
Def.
Typ.
KAPPA
Saturation field factor
0.2
1.0
ETA
Stat. feedbk on Vthresh
0.0
1.0
THETA
Mobility modulation
0.0
0.05
DELTA
Width eff. on Vthresh
0.0
1.0
L25 16Apr02
Units
1/V
17
Project 4
Part 1
Generate outputs
duplicating any 8 of
the following 14
figures in A&M*
Figure 4-7a and b,
Figure 4-8a and b,
Figure 4-9a and b,
Figure 4-10,
L25 16Apr02
Figure 4-11a only,
Figure 4-12a only,
Figure 4-13,
Figure 4-15,
Figure 4-19,
Figure 4-20,
Figure 4-23
18
4-7a (A&M)
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19
Figure 4-7b (A&M)
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20
Figure 4-8a (A&M)
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21
Figure 4-8b (A&M)
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22
Project 4
Parts 2, 3, and 4
2. Generate outputs
duplicating Fig 9.9
in M&K*
3. For each simulation, give the complete list of model
parameters used.
L25 16Apr02
4. Give a brief
discussion of how
Level 1, 2, and 3 are
selected by Pspice
depending on the
parameter set used.
23
Body effect data
Fig 9.9**
L25 16Apr02
24
References
• CARM = Circuit Analysis Reference Manual,
MicroSim Corporation, Irvine, CA, 1995.
• M&A = Semiconductor Device Modeling with SPICE,
2nd ed., by Paolo Antognetti and Giuseppe
Massobrio, McGraw-Hill, New York, 1993.
• M&K = Device Electronics for Integrated Circuits,
2nd ed., by Richard S. Muller and Theodore I.
Kamins, John Wiley and Sons, New York, 1986.
L25 16Apr02
25
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