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Abstract for micropump A prototype of a peristaltic micropump is designed, fabricated and tested. The goal of this project is to build a micropump using the state-of-the-art Microelectromechanical system (MEMS) technology for use as a medical drug delivery system in medical applications. The unique implantable micropump design can be mass produced using MEMS technology. A Finite Element Modeling and Analysis of the micropump chamber in mechanical-electrical coupled field is developed to predict the pumped volume of the micropump. The micropump is fabricated using MEMS technology. The characteristics of the micropump performance are tested. The potential users are diabetics, chemotheropy cancer patients and permenently ill patients.