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IC / Microfluidic Hybrid Microsystem for 2D Magnetic Manipulation of Individual Biological Cells Negin Nematollahi Winter 2006 Advanced VLSI Course Tehran university Based on the paper by Hakho Lee, Yong Liu, E. Alsberg, D. Ingber, R. M. Westervelt, & Donhee Ham From ISSCC 2005_4.3 Harvard University & Harvard Medical School Outline 1. IC / Microfluidic Hybrid System 2. First Prototype: SiGe IC / Microfluidic Hybrid 3. Second Prototype: CMOS IC / Microfluidic Hybrid 4. Tissue Assembly in Progress IC / Microfluidic Hybrid IC / Microfluidic Hybrid Magnetic Manipulation Magnetic bead Bead-bound cell Hybrid System - Summary Ultimate Goal : Tissue Assembly • Assemble cells in a controlled way Outline 1. IC / Microfluidic Hybrid System 2. First Prototype: SiGe IC / Microfluidic Hybrid 3. Second Prototype: CMOS IC / Microfluidic Hybrid 4. Tissue Assembly in Progress SiGe IC Micrograph Microcoil arrays Control electronics Control electronics Chip size 1 mm 4 mm Microcoil array [4] Control electronics Microcoil Array Design Microcoil Array Design Microcoil Array Design • Single magnetic field peak generation Cross section of a microcoil with contours of magnetic field magnitude[4] Microcoil Array Design Magnetic field magnitude on the surface Microfluidic Channel Fabrication • Dicing silicon wafer Microcoil arrays Silicon chip Microfluidic Channel Fabrication • Dicing silicon wafer • Patterning microfluidic channel Polyimide Microfluidic Channel Fabrication • Dicing silicon wafer • Patterning microfluidic channel • Sealing with coverslip Resist coating Coverslip Microfluidic Channel Fabrication • Dicing silicon wafer • Patterning microfluidic channel • Sealing with coverslip Coverslip Microfluidic Channel Fabrication • Dicing silicon wafer • Patterning microfluidic channel • Sealing with coverslip • Tubing[1] Tube fitting st 1 Hybrid Prototype Tube fitting Coverslip Microcoils Polyimide Silicon chip Fluidic flow Fluidic channel Magnetic Bead Manipulation • Individual magnetic beads control[2] 10 mm Magnetic Beads 10 mm Biological Cell Manipulation • Cell preparation Cells with engulfed magnetic beads Outline 1. IC / Microfluidic Hybrid System 2. First Prototype: SiGe IC / Microfluidic Hybrid 3. Second Prototype: CMOS IC / Microfluidic Hybrid 4. Tissue Assembly in Progress CMOS IC Micrograph TSMC 0.18 mm 2 mm 5 mm Large array of coils Logic/timing circuits Temperature sensors Large Array of Microcoils • Problem – Current consumption Ex) Turning on 64 microcoils Current : 64 x 15 mA ~ 1 A Solution: Time-division of a dc current[3] Time Division of a DC Current Sequential distribution of a dc current Resolution Enhancement • Magnetic field peak between coils – Controlling the direction of currents Current Current Resolution Enhancement • Moving magnetic field peak – Controlling the direction and magnitude of currents Overall Architecture Outline 1. IC / Microfluidic Hybrid System 2. First Prototype: SiGe IC / Microfluidic Hybrid 3. Second Prototype: CMOS IC / Microfluidic Hybrid 4. Tissue Assembly in Progress Microscale Tissue Engineering • Multi-cellular network assembly • Protein patterning for cell adhesion Microscale Tissue Engineering • Multi-cellular network assembly • Protein patterning for cell adhesion • Spontaneous tissue formation Microscale Tissue Engineering • Multi-cellular network assembly • Protein patterning for cell adhesion • Spontaneous tissue formation Microscale Tissue Engineering • Multi-cellular network assembly • Protein patterning for cell adhesion • Spontaneous tissue formation • Bringing in another type of cells[4] Microfluidics Integrated Circuits Programmable Microfluidic System • Simultaneous manipulation of individual cells. • Accurate spatial control. • Miniaturized and low cost. • Single-use, disposable unit. • New tool for tissue engineering REFRENCES [1] D. Meldrum et al., “Microfluidics: Microscale Bioanalytical Systems,” Science, vol. 297, pp. 1197-1198, 2002. [2] T. Thorsen et al., “Microfluidic Large-Scale Integration,” Science, vol. 298, pp. 580-584, 2002. [3] N. Manaresi et al., “A CMOS Chip for Individual Cell Manipulation and Detection,” IEEE J. Solid-State Circuits, vol. 38, no. 12, pp. 2297 -2305, 2003. [4] H. Lee, A.M. Purdon, and R.M. Westervelt, “Manipulation of Biologica l Cells Using a Microelectromagnet Matrix,” Applied Physics Letters, vol. 85, pp. 1063-1065, 2004.