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MOSIS PARAMETRIC TEST RESULTS RUN: T15D TECHNOLOGY: SCN05 VENDOR: AMI FEATURE SIZE: 0.5 microns INTRODUCTION: This report contains the lot average results obtained by MOSIS from measurements of MOSIS test structures on each wafer of this fabrication lot. SPICE parameters obtained from similar measurements on a selected wafer are also attached. COMMENTS: American Microsystems, Inc. C5N TRANSISTOR PARAMETERS W/L MINIMUM Vth 3.0/0.6 SHORT Idss Vth Vpt 20.0/0.6 WIDE Ids0 20.0/0.6 LARGE Vth Vjbkd Ijlk Gamma 50/50 N-CHANNEL P-CHANNEL K' (Uo*Cox/2) Low-field Mobility UNITS 0.80 -0.94 volts 457 0.68 10.0 -248 -0.92 -10.0 uA/um volts volts < 2.5 < 2.5 pA/um 0.72 11.4 <50.0 0.47 -0.96 -11.7 <50.0 0.59 volts volts pA V^0.5 57.2 463.82 -18.8 152.44 uA/V^2 cm^2/V*s COMMENTS: Poly bias varies with design technology. To account for mask and etch bias use the appropriate value for the parameter XL in your SPICE model card. Design Technology XL ----------------------SCN_SUBM (lambda=0.30) 0.00 AMI_C5 0.00 SCN (lambda=0.35) -0.10 FOX TRANSISTORS Vth GATE Poly PROCESS PARAMETERS N+ACTV P+ACTV Sheet Resistance 80.9 104.3 Width Variation -0.21 -0.22 (measured - drawn) Contact Resistance 67.0 150.5 Gate Oxide Thickness 140 PROCESS PARAMETERS Sheet Resistance Width Variation (measured - drawn) Contact Resistance POLY_HR 1077 N+ACTIVE >15.0 P+ACTIVE <-15.0 POLY 21.8 -0.15 POLY2 41.5 -0.07 15.8 27.5 N\PLY 838 COMMENTS: N\POLY is N-well under polysilicon. MTL1 0.09 0.05 N_WELL 835 UNITS volts MTL2 0.09 -0.06 MTL3 0.06 -0.07 UNITS ohms/sq microns 0.82 0.64 ohms angstrom UNITS ohms/sq microns ohms CAPACITANCE PARAMETERS N+ACTV P+ACTV Area (substrate) 426 733 Area (N+active) Area (P+active) Area (poly) Area (poly2) Area (metal1) Area (metal2) Fringe (substrate) 328 263 Fringe (poly) Fringe (metal1) Fringe (metal2) Overlap (N+active) Overlap (P+active) CIRCUIT PARAMETERS Inverters Vinv Vinv Vol (100 uA) Voh (100 uA) Vinv Gain Ring Oscillator Freq. DIV256 (31-stg,5.0V) Ring Oscillator Power DIV256 (31-stg,5.0V) POLY 88 2459 2375 POLY2 M1 31 36 M2 16 16 M3 10 12 915 51 47 15 9 31 13 36 38 28 32 49 74 58 59 38 47 N_WELL 40 215 234 UNITS aF/um^2 aF/um^2 aF/um^2 aF/um^2 aF/um^2 aF/um^2 aF/um^2 aF/um aF/um aF/um aF/um aF/um aF/um UNITS K 1.0 1.5 2.0 2.0 2.0 2.0 2.12 2.38 0.25 4.74 2.55 -22.79 volts volts volts volts volts 106.46 MHz 0.42 uW/MHz/gate COMMENTS: SUBMICRON T15D SPICE Level 3 PARAMETERS * * DATE: Jun 27/01 * LOT: T15D WAF: * DIE: N_Area_Fring DEV: * Temp= 27 .MODEL CMOSN NMOS ( + TOX = 1.4E-8 NSUB + PHI = 0.7 VTO + UO = 662.6984452 ETA + KP = 1.259355E-4 VMAX + RSH = 7.513418E-3 NFS + XJ = 3E-7 LD + CGDO = 2.15E-10 CGSO + CJ = 4.258447E-4 PB + CJSW = 3.147465E-10 MJSW * .MODEL CMOSP PMOS ( + TOX = 1.4E-8 NSUB + PHI = 0.7 VTO + UO = 250 ETA + KP = 3.924644E-5 VMAX + RSH = 33.9672594 NFS + XJ = 2E-7 LD + CGDO = 2.34E-10 CGSO + CJ = 7.285722E-4 PB + CJSW = 2.955161E-10 MJSW * 02 N3740/10 = = = = = = = = = 1E17 0.7640855 3.162045E-6 1.442228E5 1E12 1E-13 2.15E-10 0.9140376 0.1977689 LEVEL GAMMA DELTA THETA KAPPA TPG WD CGBO MJ ) = = = = = = = = = 3 0.5483559 3.0541177 0.1013999 0.3 1 2.334779E-7 1E-10 0.435903 = = = = = = = = = 1E17 -0.9444911 0 1E6 1E12 5E-13 2.34E-10 0.96443 0.3184873 LEVEL GAMMA DELTA THETA KAPPA TPG WD CGBO MJ ) = = = = = = = = = 3 0.6243261 0.1118368 0.1633973 30.1015109 -1 4.11531E-7 1E-10 0.5