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A theory for the temperature and time dependence of current carrier concentration in
semiconductors with different non-equilibrium nanocluster structure has been developed. It was shown
that the scale-invariant fractal self-similar and self-afﬁne laws can exist near by the transition point to
the equilibrium state. Results of the theory have been compared to the experimental data from
electrical properties of semiconductor ﬁlms with nanoclusters.

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