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Transcript 
MOSIS PARAMETRIC TEST RESULTS
RUN: T15D
TECHNOLOGY: SCN05
VENDOR: AMI
FEATURE SIZE: 0.5 microns
INTRODUCTION: This report contains the lot average results obtained by MOSIS
from measurements of MOSIS test structures on each wafer of
this fabrication lot. SPICE parameters obtained from similar
measurements on a selected wafer are also attached.
COMMENTS: American Microsystems, Inc. C5N
TRANSISTOR PARAMETERS
W/L
MINIMUM
Vth
3.0/0.6
SHORT
Idss
Vth
Vpt
20.0/0.6
WIDE
Ids0
20.0/0.6
LARGE
Vth
Vjbkd
Ijlk
Gamma
50/50
N-CHANNEL P-CHANNEL
K' (Uo*Cox/2)
Low-field Mobility
UNITS
0.80
-0.94
volts
457
0.68
10.0
-248
-0.92
-10.0
uA/um
volts
volts
< 2.5
< 2.5
pA/um
0.72
11.4
<50.0
0.47
-0.96
-11.7
<50.0
0.59
volts
volts
pA
V^0.5
57.2
463.82
-18.8
152.44
uA/V^2
cm^2/V*s
COMMENTS: Poly bias varies with design technology. To account for mask and
etch bias use the appropriate value for the parameter XL in your
SPICE model card.
Design Technology
XL
----------------------SCN_SUBM (lambda=0.30)
0.00
AMI_C5
0.00
SCN (lambda=0.35)
-0.10
FOX TRANSISTORS
Vth
GATE
Poly
PROCESS PARAMETERS
N+ACTV P+ACTV
Sheet Resistance
80.9 104.3
Width Variation
-0.21 -0.22
(measured - drawn)
Contact Resistance
67.0 150.5
Gate Oxide Thickness 140
N+ACTIVE
>15.0
P+ACTIVE
<-15.0
POLY
21.8
-0.15
POLY2
41.5
-0.07
15.8
27.5
MTL1
0.09
0.05
UNITS
volts
MTL2
0.09
-0.06
MTL3
0.06
-0.07
UNITS
ohms/sq
microns
0.82
0.64
ohms
angstrom
PROCESS PARAMETERS
Sheet Resistance
Width Variation
(measured - drawn)
Contact Resistance
POLY_HR
1077
N\PLY
838
N_WELL
835
UNITS
ohms/sq
microns
ohms
COMMENTS: N\POLY is N-well under polysilicon.
CAPACITANCE PARAMETERS N+ACTV P+ACTV
Area (substrate)
426
733
Area (N+active)
Area (P+active)
Area (poly)
Area (poly2)
Area (metal1)
Area (metal2)
Fringe (substrate)
328
263
Fringe (poly)
Fringe (metal1)
Fringe (metal2)
Overlap (N+active)
Overlap (P+active)
CIRCUIT PARAMETERS
Inverters
Vinv
Vinv
Vol (100 uA)
Voh (100 uA)
Vinv
Gain
Ring Oscillator Freq.
DIV256 (31-stg,5.0V)
Ring Oscillator Power
DIV256 (31-stg,5.0V)
POLY
88
2459
2375
POLY2
M1
31
36
M2
16
16
M3
10
12
915
51
47
15
9
31
13
36
38
28
32
49
74
58
59
38
47
215
234
N_WELL
40
UNITS
aF/um^2
aF/um^2
aF/um^2
aF/um^2
aF/um^2
aF/um^2
aF/um^2
aF/um
aF/um
aF/um
aF/um
aF/um
aF/um
UNITS
K
1.0
1.5
2.0
2.0
2.0
2.0
2.12
2.38
0.25
4.74
2.55
-22.79
volts
volts
volts
volts
volts
106.46
MHz
0.42
uW/MHz/gate
COMMENTS: SUBMICRON
T15D SPICE Level 3 PARAMETERS
*
* DATE: Jun 27/01
* LOT: T15D
WAF:
* DIE: N_Area_Fring
DEV:
* Temp= 27
.MODEL CMOSN NMOS (
+ TOX
= 1.4E-8
NSUB
+ PHI
= 0.7
VTO
+ UO
= 662.6984452
ETA
+ KP
= 1.259355E-4
VMAX
+ RSH
= 7.513418E-3
NFS
+ XJ
= 3E-7
LD
+ CGDO
= 2.15E-10
CGSO
02
N3740/10
=
=
=
=
=
=
=
1E17
0.7640855
3.162045E-6
1.442228E5
1E12
1E-13
2.15E-10
LEVEL
GAMMA
DELTA
THETA
KAPPA
TPG
WD
CGBO
=
=
=
=
=
=
=
=
3
0.5483559
3.0541177
0.1013999
0.3
1
2.334779E-7
1E-10
+ CJ
= 4.258447E-4
+ CJSW
= 3.147465E-10
*
.MODEL CMOSP PMOS (
+ TOX
= 1.4E-8
+ PHI
= 0.7
+ UO
= 250
+ KP
= 3.924644E-5
+ RSH
= 33.9672594
+ XJ
= 2E-7
+ CGDO
= 2.34E-10
+ CJ
= 7.285722E-4
+ CJSW
= 2.955161E-10
*
PB
MJSW
= 0.9140376
= 0.1977689
MJ
)
= 0.435903
NSUB
VTO
ETA
VMAX
NFS
LD
CGSO
PB
MJSW
=
=
=
=
=
=
=
=
=
LEVEL
GAMMA
DELTA
THETA
KAPPA
TPG
WD
CGBO
MJ
)
=
=
=
=
=
=
=
=
=
1E17
-0.9444911
0
1E6
1E12
5E-13
2.34E-10
0.96443
0.3184873
3
0.6243261
0.1118368
0.1633973
30.1015109
-1
4.11531E-7
1E-10
0.5
T15D SPICE BSIM3 VERSION 3.1 PARAMETERS
SPICE 3f5 Level 8, Star-HSPICE Level 49, UTMOST Level 8
* DATE: Jun 14/01
* LOT: T15D
WAF:
* Temperature_parameters=Default
.MODEL CMOSN NMOS (
+VERSION = 3.1
TNOM
+XJ
= 1.5E-7
NCH
+K1
= 0.8138857
K2
+K3B
= -7.6829409
W0
+DVT0W
= 0
DVT1W
+DVT0
= 3.3812941
DVT1
+U0
= 455.8212463
UA
+UC
= 1.871789E-11
VSAT
+AGS
= 0.1245402
B0
+KETA
= -2.751014E-3
A1
+RDSW
= 1.297087E3
PRWG
+WR
= 1
WINT
+XL
= 0
XW
+DWB
= 5.550376E-8
VOFF
+CIT
= 0
CDSC
+CDSCB
= 0
ETA0
+DSUB
= 0.1717116
PCLM
+PDIBLC2 = 2.890851E-3
PDIBLCB
+PSCBE1 = 5.629014E8
PSCBE2
+DELTA
= 0.01
RSH
+PRT
= 0
UTE
+KT1L
= 0
KT2
+UB1
= -7.61E-18
UC1
+WL
= 0
WLN
+WWN
= 1
WWL
+LLN
= 1
LW
+LWL
= 0
CAPMOD
+CGDO
= 2.15E-10
CGSO
+CJ
= 4.228884E-4
PB
+CJSW
= 3.56272E-10
PBSW
+CJSWG
= 1.64E-10
PBSWG
+CF
= 0
PVTH0
+PK2
= -0.0338264
WKETA
*
.MODEL CMOSP PMOS (
+VERSION = 3.1
TNOM
+XJ
= 1.5E-7
NCH
+K1
= 0.5526871
K2
+K3B
= -0.5706084
W0
+DVT0W
= 0
DVT1W
+DVT0
= 2.3523777
DVT1
+U0
= 221.332531
UA
+UC
= -5.29755E-11
VSAT
+AGS
= 0.1434459
B0
+KETA
= -3.702499E-3
A1
+RDSW
= 3E3
PRWG
+WR
= 1
WINT
+XL
= 0
XW
+DWB
= 2.184592E-8
VOFF
02
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
27
1.7E17
-0.0762569
1E-8
0
0.4195418
1.052138E-13
1.707997E5
2.831408E-6
1.772392E-4
0.0502651
2.495013E-7
0
-3.376733E-4
2.4E-4
0.0014995
2.2954854
-0.1267271
5.268798E-5
80.9
-1.5
0.022
-5.6E-11
1
0
0
2
2.15E-10
0.99
0.1
0.1
0.0601933
-0.0213488
LEVEL
TOX
VTH0
K3
NLX
DVT2W
DVT2
UB
A0
B1
A2
PRWB
LINT
DWG
NFACTOR
CDSCD
ETAB
PDIBLC1
DROUT
PVAG
MOBMOD
KT1
UA1
AT
WW
LL
LWN
XPART
CGBO
MJ
MJSW
MJSWG
PRDSW
LKETA
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
49
1.4E-8
0.6739432
23.316539
1E-9
0
-0.0976246
1.60328E-18
0.5973318
5E-6
0.3604111
0.0351053
2.447934E-8
-1.882273E-8
1.0263478
0
-1.245874E-3
-0.1582631
0.3496078
0
1
-0.11
4.31E-9
3.3E4
0
0
1
0.5
1E-9
0.449304
0.1213831
0.1213831
48.8936612
5.133767E-3
=
=
=
=
=
=
=
=
=
=
=
=
=
=
27
1.7E17
9.463397E-3
1E-8
0
0.5408808
3.087011E-9
1.859021E5
1.097924E-6
0
-0.046293
2.942356E-7
0
-0.0678112
LEVEL
TOX
VTH0
K3
NLX
DVT2W
DVT2
UB
A0
B1
A2
PRWB
LINT
DWG
NFACTOR
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
49
1.4E-8
-0.9365465
6.3646558
1.900907E-8
0
-0.1254584
1E-21
0.8487879
5E-6
0.3
-0.0399508
4.298608E-8
-2.097829E-8
0.9055153
)
+CIT
+CDSCB
+DSUB
+PDIBLC2
+PSCBE1
+DELTA
+PRT
+KT1L
+UB1
+WL
+WWN
+LLN
+LWL
+CGDO
+CJ
+CJSW
+CJSWG
+CF
+PK2
*
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
0
0
1
4.351411E-3
1.268943E10
0.01
0
0
-7.61E-18
0
1
1
0
2.34E-10
7.297461E-4
2.993609E-10
6.4E-11
0
3.73981E-3
CDSC
ETA0
PCLM
PDIBLCB
PSCBE2
RSH
UTE
KT2
UC1
WLN
WWL
LW
CAPMOD
CGSO
PB
PBSW
PBSWG
PVTH0
WKETA
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
2.4E-4
6.960867E-3
2.183651
-0.0435832
1.235043E-9
104.3
-1.5
0.022
-5.6E-11
1
0
0
2
2.34E-10
0.9341338
0.99
0.99
5.98016E-3
8.349055E-3
CDSCD
ETAB
PDIBLC1
DROUT
PVAG
MOBMOD
KT1
UA1
AT
WW
LL
LWN
XPART
CGBO
MJ
MJSW
MJSWG
PRDSW
LKETA
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
0
-0.1077986
0.1051767
0.2989224
6.162441E-6
1
-0.11
4.31E-9
3.3E4
0
0
1
0.5
1E-9
0.4930142
0.3295232
0.3295232
14.8598424
-5.164353E-3
)
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