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High Conductivity UNCD films : Synthesis and Applications of I-Nan Lin 林諭男 Department of Physics, Tamkang University, Tamsui 淡江大學物理系 [email protected] IPLAS CVD SYSTEM MCD UNCD OUTLINE Background Synthesis of UNCD High conductivity UNCD films N2- plasma grown UNCD (N- UNCD) Nanostructured UNCD films Application of UNCD Electron field emitters Bio- and chemical - sensors Conclusion OUTLINE 4 1 IPLAS CVD SYSTEM UNCD MCD Background Advantages & Applications of Diamond/UNCD Good Electron field emission properties (Field emission display) Highest surface acoustic wave velocity (SAW devices) Highest thermal conductivity (Heat sink for LED and other devices) Optical property, Highest hardness & Electrochemical electrodes, etc. Nanodiamond probes RF MEMS Switch Field Emission (imaging) RF MEMS Resonator UNCD seals SAW Device 3D Structures UNCD Wafer Ref. www.thindiamond.com 6 IPLAS CVD SYSTEM MCD UNCD Background Advantages & Applications of UNCD Enhanced properties as compared to micro-diamond Device compatible surface smoothness (No polishing is required!) ….. many more………. UNCD (CH4/Ar) MCD (CH4/H2) Micron to Ultranano grains HRTEM 7 2 IPLAS CVD SYSTEM UNCD MCD Background Growth species Microstructure (Grain size) Surface roughness Electronic bonding Hydrogen content Microcrystalline Ultrananocrystallin diamond (MCD) e diamond (UNCD) CH3 (CH4/H2 plasma) C2 (CH4/Ar plasma) Columnar (0.5–10 m) 400 nm–1 μm Equi-axed (2–10 nm) < 40 nm sp3 2–5% sp2 <1% <1% 4 IPLAS CVD SYSTEM UNCD MCD Background How are UNCD Films Grown ?? New microwave plasma technology OES C2 Ar Ar/CH4 Plasma 8 3 IPLAS CVD SYSTEM UNCD MCD Background UNCD Growth Mechanism UNCD films grown using Ar(99%) /CH4 (1%) plasmas C2H2 1 (C2 Chemistry) Thermal Dissociation of CH4 2 H2 H0 C2 Dimer Nucleation C2 Ar CH3 C2 Dimer Formation C2 dimers form sp3-bonded carbon (diamond) with Low activation energy (6 kcal/mol) High secondary-nucleation rate (1010 /cm2) • • Ref. D. M. Gruen, et. al., Ann. Rev. Mater. Sc. 29, 211 (1999) 9 IPLAS CVD SYSTEM MCD UNCD Introduction Nucleation Stage Requirements • Nucleation density • Secondary nucleation • Adhesion • Grain size • Diamond structure Seeding Technique – – – – – Mechanical abrasion Ultrasonication Bias enhanced nucleation (BEN) Diamond powder seeding Intermediate layer: DLC, carbide metal Ref.: R. Stöckel et al., J. Appl. Phys. Vol. 83, 1 (1998) 10 4 IPLAS CVD SYSTEM MCD UNCD Introduction Nucleation Stage Scratched Ultrasonication (U) Spin Coating (diamond slurry) Pre-nucleation treatment of substrates is important for the growth of continuous and very smooth UNCD films. Ultrasonication (U-m) (diamond/Ti mixture) Pre-Carburize + U (PC-U) Bias enhanced nucleation (BEN) 11 IPLAS CVD SYSTEM MCD UNCD Background Growth & Characterizations * NEXAFS FESEM HRTEM * 282 284 286 288 290 292 Binding energy (eV) G AFM image 3 G' D 1 Grain size ~510 nm Roughness < 2nm Intensity (arb. units) UNCD Deposition MW Power: 1200 W Press: 120 Torr, CH4/Ar (1:99) Substrate temp. ~460oC XPS C1s 1100 1200 1300 1400 1500 1600 1700 -1 Raman shift (cm ) 13 5 IPLAS CVD SYSTEM MCD UNCD OUTLINE Background Synthesis of UNCD High conductivity UNCD films N2- plasma grown UNCD (NUNCD) Nanostructured UNCD films Application of UNCD Electron field emitters, microplasma cathode Bio- and chemical – sensors Conclusion UNCD applications 4 IPLAS CVD SYSTEM MCD UNCD Conclusion Synthesis of high conductivity UNCD : Microstructure control (N2/CH4 plasma; 2-step MPE-CVD Nanostructuring (templates, RIE) Application of UNCD Electron souces • Electron field emitters; • Microplasma electrodes conclusion Bio- and chemical sensors • Dopamine, NADH, Urea, • Heavy metal, Amitrole 6 7 Microstructure Effect of (Ar-%H2)/Ar plasma. H2 0% H2 80% control for UNCD: samples plasma CH4/Ar/H2 ratio 1:(99-x):x x=0, 1.5, 2.5 … 20, 30…..…80 ultrasonicating 100 Torr 1200 W 3h Seeding Method Pressure Power Growth time 13 SEM H2 0% H2 1.5% H2 2.5% H2 3.5% H2 5% H2 8% H2 10% H2 20% H2 30% H2 40% H2 50% H2 80% 1 Normalized Absorption (a.u.) 15 NEXAFS 0 H2 1.5 H2 2.5 H2 3.5 H2 5 H2 8 H2 10 H2 12 9 (Near edge x-ray absorption spectroscopy) 6 3.5 3 0 270 15% H2 20% H2 30% H2 40% H2 320 50% H2 80% H2 3.0 280 290 2.5 310 2.0 300 Photon Energy (eV) 1.5 1.0 0.5 0.0 280 290 300 310 320 Photon Energy (eV) 10000 Raman spectroscopy 8000 6000 4000 100000 2000 80000 1000 1200 1400 Intensity (a.u.) Intensity (a.u.) UV Raman (244 nm) 1600 80 H2 60 H2 50 H2 40 H2 30 H2 20 H2 15 H2 10 H2 8 H2 5 H2 3.5 H2 2.5 H2 1.5 H2 0 H2 1800 Visible (514 nm ) 80 H2 60 H2 2000 50 H2 40 H2 -1 Raman shift (cm 60000 ) 30 H2 20 H2 15 H2 10 H2 8 H2 5 H2 3.5 H2 0 H2 40000 20000 0 1000 1200 1400 1600 -1 1800 200 Raman shift (cm ) 2 EFE 0.6 0% 22.13 1% 23.16 H2 3.5% 2% 25.56 3% 25.72 H2 0% H2 5% 5% 27.78 H2 2.5% 8% 28.37 10% 30.33 15% 32.38 20% 39.10H 1.5% 2 30% 50.01 40% 55.00 2 J (mA/cm ) 0.5 0.4 0.3 0.2 0.1 H2 10% H2 20% H2 40% 0.0 H2 8% -0.1 0 50 H2 30% 100 E (V/m) H2 0% H2 1.5% H2 2.5% H2 3.5% 20 nm 100 nm 100 nm 500 nm H2 5% H2 8% H2 10% H2 20% 500 nm 500 nm 500 nm 500 nm H2 30% H2 40% H2 50% H2 80% 500 nm 1000 nm 500 nm 500 nm TEM 3 (Optical Emission spectroscopy) OES 7000 Intensity (a.u.) 6000 H Ar C2 H 100% H2 80% H2 60% H2 50% H2 40% H2 30% H2 20% H2 15% H2 10% H2 8% H2 5% H2 0% H2 5000 4000 3000 2000 1000 0 400 500 600 700 800 Wavelength (nm) H2plasma CH3+ & Atomic H H2 80% Large faceted grains 4 Arplasma C2-dimers C2-dimers+H Spherical grains Ar-H2 plasma Acicular grains To enhance the EFE properties of UNCD films Use UNCD films [CH4/Ar plasma] as the nucleation layer the growth of MCD films [CH4/(50%Ar-50%H2 plasma] 5 Hybrid granular structured (HiD) diamond films: NCD/UNCD JOURNAL OF APPLIED PHYSICS 109, 033711 (2011) N-ion implanted HiD diamond films Electron Energy Loss Spectroscopy 6 High conductivity UNCD I. Hybrid diamond II. Semiconductor doing of UNCD. III. CH4/N2 – Plasma (at 700℃). IV. Nanostructuring • nanostructure templates • RIE etching II. Semiconductor doing of UNCD N, C, B-ion implantation. Implanted ion Ion energy (keV) Dosage (Ions/cm2) Nitrogen (N) Boron (B) Carbon (C) 100 130 130 11015 11015 11015 Ion implantation & annealing E0 (V/m) J (mA/cm2) 9.2 1.54 8.8 5.42 11.3 1.17 10.7 0.13 N, C, B-ion implantation. Ag- and Au- ion irradiation. Au and Cu-ion implantation. Au-ion implantation on UNCD-Au_Si 1 Enhancement in electron field emission in ultrananocrystalline and microcrystalline diamond films upon 100 MeV silver ion irradiation JOURNAL OF APPLIED PHYSICS 105, 083707 2009 Melting and recrystallization process have occurred along the trajectory of the heavy ions. Such a process induced the formation of interconnected nanocluster networks, facilitating the electron conduction and enhancing the EFE properties for the materials. Effect of 2.245 gigaelectron volt Au-ion irradiation on the characteristics of ultrananocrystalline diamond films J. Appl. Phys. 108, 123712 (2010), & AIP Advances, 2011 Formation of nanographites along the trajectory of the irradiating ions. Nanographite formed an interconnected path for electron transport that facilitated the EFE process. 2 Ag & Au Ion-irradiation on UNCD films How about directly ion implantation ??? Gold and Copper ion implantation induced high conductivity and enhanced electron field emission properties in ultrananocrystalline APPLIED PHYSICS LETTERS 102, 061604 (2013) diamond films Cu-implanted UNCD Au-implanted UNCD The formations of Cu and Au nanoparticles and the introduction of nanographitic phases among the diamond grains advance the conducting nature of the films, Enhancing the EFE properties of the Cu and Au implanted UNCD films. 3 Gold ion implantation on UNCD films using Au as interlayer Ion Dosage Ion implantation & annealing energy (Ions/cm2) J E0 (keV) ( cm)-1 (V/m) (mA/cm2) 9.2 1.54 15 100 110 200 8.8 5.42 0.3 8.2 3.3 300 11017 17 185 4.88 1.17 500 110 Implanted ion N/UNCD/Si Cu/UNCD/Si Au/UNCD/Si Au Au Au Au Au Au Au Au Au Au Au Au Au UNCD Si Au Au Au Au Au Au Au-implt UNCD/Si Si UNCD/Au-Si Au Au Au Au Au UNCD UNCD Au Au Au Au Si Au-impt UNCD/Au-Si Gold ion implantation on UNCD/Si films using Au as interlayer Expansive apparatus ?? Expansive apparatus ?? Expansive apparatus ?? Expansive apparatus ?? Expansive apparatus ? Expansive apparatus 4 III. CH4/N2 – Plasma (at 700℃). Origin of needle-like granular structure for ultrananocrystalline diamond films grown in CH4/N2 plasma J. Phys. D: Appl. Phys. 45 (2012) Structural and Electrical Properties of Conducting N-UNCD films ACS Appl. Mater. Interfaces 2013, 5, 1294 High conducting grain boundaries of N-UNCD films (700C) demonstrates a high efficiency in field emission. 5 Arplasma C2-dimers+CH C2-dimers+CN Spherical grains CH4/N2 Ar-N2 plasma Needle-like grains – Plasma (at 700℃) IV. Nanostructuring UNCD • High conductivity UNCDfilms • nanostructure templates • RIE etching 6 On the enhancement of field emission performance of ultrananocrystalline diamond coated nanoemitters Appl. Phys. Lett. 91 (2007) 063117 Nanotechnology, 18 (2007) 435703 Electron Field Emission Enhancement of Vertically Aligned Ultrananocrystalline Diamond-Coated ZnO Core–Shell Heterostructured small 2013 Nanorods ZnO nanorods UNCD/ZnO nanorods Introduction of graphitic phases in the interface region between the ZNRs and UNCDs layer lowers the resistivity of the interfacial layer. 7 Investigations on Diamond Nanostructuring of Different Morphologies by the Reactive-Ion Etching Process and Their Potential Applications ACS Appl. Mater. Interfaces 2013, 5, 7439 NCD MCD N-UNCD UNCD Nanostructuring of diamond is a function of the initial diamond morphology, the phase composition of the diamond, the mask size, and the etching time. The enhanced EFE properties are observed for N-UNCD nanograss. 8 Application of high conductivity UNCD films Electron sources Bio- & Chemical sensors EFE flat panel display, Microplasms electrodes Blood testing • Dopamine, NADH, Urea Water monitoring • Heavy metal; Amitrole Field Emission Flat Panel Display (EF-FPD) Advantages: Thin, lightweight emissive display Bright and efficient Wide viewing angle Video speed Wide operating temperature range 1 Enhancing the plasma illumination behaviour of microplasma devices using microcrystalline/ultrananocrystalline hybrid Nanoscale, 2013, 5, 7467 diamond materials as cathodes Flexible EFE Emitters Fabricated Using Conducting UNCD Pyramidal Microtips on Polynorbornene Films 2 High Stability Electron Field Emitters made of NCD coated Carbon Nanotubes (CNTs) Microplasma Neutral Atoms Negative Electrons Positiv e Ions 3 Cathode materials for microplasma: diamond coated Si-tips. Fabrication of diamond coated Si-nanotips 1. Lithography 2. Reactive ion etching 3. Removal of PR 5. Growth of UNCD 4. Deposition of Au film 4 Diamond coated Si-nanotips as cathode UNCD/Au/Si (CH4/Ar=4/196 sccm) Si (a) Si pyram. (a) UNCD/Si (c) UNCD/Au/Si-pyram. 100 nm 4 m UNCD/Si (CH4/Ar=4/196 sccm) (b) UNCD/Au-Si 4 m 1m 1m (MCD/UNCD)/Au/Si (CH4/Ar=4/196 sccm; CH4/[49%Ar+50%H2]) (b) UNCD/Si-pyram. (d) MCD-UNCD/Au/Si-pyram. 100 nm (c) MCD‐UNCD/Au/Si 4 m 4 m 1m 1m Electron field emission & plasma illumination 100 nm (a) Si-tips 200V 210V 220V 230V 240V 250V 260V 270V 280V 290V 300V 310V 320V 330V 340V 350V 200V 210V 220V (c) UNCD/Au/Si-tips 230V 200V 210V 220V 240V 250V 260V (d) MCD-UNCD/Au/Si-tips 200V 210V 220V 250V 240V 260V 300V 280V 290V 230V 270V 230V 270V 310V 240V 280V 320V 250V 290V 330V 260V 300V 340V 270V 310V 350V 280V 320V 290V 330V 300V 340V 310V 350V 320V 330V 340V 350V Si-tips UNCD/Si-tips (CH4/Ar=4/196 sccm) UNCD/Au/Si-tips (CH4/Ar=4/196 sccm) 3.2 2.8 2.4 2.0 1.6 1.2 0.8 0.4 (i) Si-pyramid (ii) UNCD/Si-pyramid (iii) UNCD/Au/Si-pyramid (iv) MCD-UNCD/Au/Si-pyramid ln(J/E2)((mA/cm2)/(V/m)2) Current Density (mA/cm2) MCD/UNCD/Au/Si (CH4/Ar=4/196 sccm; CH4/[49%Ar+50%H2]) 0.0 -30 0 -1 -2 -3 -4 -5 -6 -7 -8 -9 (iv) (iii) (ii) (i) 0.0 0.4 0.8 1.2 1.6 2.0 2.4 2.8 3.2 1/E (m/V) -20 -10 0 10 20 30 40 (b) UNCD/Si-tips Electric Field (V/m) 5 6 (ii) UNCD/Si-pyramid (iii) UNCD/Au/Si-pyrmid (iv) MCD-UNCD/Au/Si-pyramid (ii) UNCD/Si-pyramid 4 (iii) UNCD/Au/Si-pyrmid 2 6 (iv) MCD-UNCD/Au/Si-pyramid (iv) (iii) (ii) 240 280 320 (i)) Electric Field (V/mm 2 (․cm)-1 (a) Si-tips (iv) MCD-UNCD/Au/Si-pyramid 0.6 0.4 (iv) (iii) (ii) 0.2 (i) 0.0 -0.2 360 0 2000 4000 6000 8000 Time (seconds) EFE Plasma (Eth)pl. Jpl. E0 Je (V/m) (mA/cm2) (V/mm) (mA/cm2) 230 3.8 <0.01 0.04 210 5.9 0.05 210 6.5 3.40 200 7.8 (c) UNCD/Au/Si-tips tips 330V 340V 350V 340V 350V (b) UNCD/Si-tips 320V (ii) (i) 20.00 Si-tips0 UNCDSi-tips 200 240 280320 11.60360 0.78(V/mm) 9.23 UNCDAu/Si-tips Electric Field 24.0 5.99 MCD/UNCDAu/Si320V 0.8 (iii) UNCD/Au/Si-pyrmid (iii) 0 200 4 (i) Si-pyramid (ii) UNCD/Si-pyrmid (iv) Current (mA) Current Density (mA/cm2) Current Density (mA/cm2) 8 (i) Si-pyramid 1.0 8 (i) Si-pyramid 330V 320V 330V 340V 350V (d) MCD-UNCD/Au/Si-tips 320V 330V 340V 350V Plasma illumination characteritics of cylindrical microplasma using HiD as cathodes 6 Cylindrical microplasma devices (a) KOH etch SiO2 (a) 6.12 μm Silicon (c) Formation of cylindrical cavities (i) SiN patterning (ii) Dry Etch HiD HiD 50μm Cu/Ag HiD 1 m 100 m (b) Silicon 1 m 1 μm 150 μm (d) DC pulse + Bipolar Pulse-Mode 2 m 3.0 2.5 0 1 2 3 4 5 2.0 1.5 1.0 0.5 6 1/E (cm/V) ln(J/E2) (A/V2) 2 475 μm 100 m Current density (mA/cm ) Silicon (iii) KOH Etch -3 -4 -5 -6 -7 -8 -9 -10 -11 -12 II I I.Planar HiD II.HiD array 2.7 0.0 0 2 3.75 4 6 8 10 Electric field (V/m) 12 Plasma illumination characteistics 7 Why HiD films? Life stabilits of HiD cathodes for microplasma devices Plasma Current (A) 540 480 420 360 300 240 N-UNCD/Au-Si MCD-UNCD/Au-Si UNCD/Au-Si 180 120 350 400 450 500 550 Voltage (V) 600 650 700 8 Application of high conductivity UNCD films Electron sources Bio- & Chemical sensors EFE flat panel display, Microplasms electrodes Blood testing • Dopamine, NADH, Urea Water monitoring • Heavy metal; Amitrole DNW (N-UNCD) as Electrochemical Bio- and chemical sensor Electrochemical (EC) Sensing Applications Using conductive UNCD films Biosensor 9 Analytes: 1. Dopamine 2. NADH 3. Urea NADH in Krebs Cycle: citric-acid cycle Conversion of proteins, carbohydrates and fats into ATP (Energy) Deficiency Alzheimer’s disease In the brain, Dopamine functions as a neurotransmitter—a chemical released by nerve cells to send signals to other nerve cells Parkinson's disease. Dopamine pathway in Brain Urea ((NH2)2CO) is basically an organic compound deal with the excretion of nitrogen waste from protein and amino acid catabolism. The normal level of urea in serum is from 1.7-8.3 mM. An increase blood and urine causes renal failure, urinary tract, gastrointestinal bleeding. Reduced urea level results in hepatic failure, nephritic s ndrome and cache ia DNW (N-UNCD) as Dopamine sensor 10 In situ Detection of Dopamine using Nitrogen Incorporated Diamond Nanowire Electrode Nanoscale 5 (2013) 115 C=N C-N C=N C-N C=C C-C 700 C-C C=C 100 nm 100 nm (d) 800 C (c) 700 C 800 oC oC 286 600oC 550oC nd 2 diamond gap 288 290 282 284 286 B.E (eV) 288 0.00004 Current (A) 0.003 0.000 550 C -0.003 600 C 700 C -0.009 800 C Graphite -3 -2 -1 0 1 2 Electrode 0.00000 550C 600 C 700 C 800 C -0.00004 -0.00006 3 -0.1 0.0 Potential (V) 0.1 0.2 0.3 0.4 ΔEp (mV) 175 90 95 210 98 DNWs-550 DNWs-600 DNWs-700 DNWs-800 Graphite BDD 0.00002 -0.00002 -0.006 310 0.5 Potential (V) Ipa/ Ipc (µA) ASA – Active surface area Conductivity ASA (Ω-cm)-1 (Cm2) 1.16 0.98 0.90 1.10 0.82 1.2 106 186 90 106.9 0.217 0.254 0.250 0.132 0.202 Differential pulse Voltammetry 157 mV 0.000010 0.0000075 UA 0.0000060 125.8 mV 0.0000045 -0.2 -0.1 0.0 0.1 0.2 0.3 0.4 0.5 -0.2 Current (A) 138 mV AA -0.2 0.000085 0.1 0.2 0.3 Potential (V) 0.4 0.5 0.6 DA 286.1 mV AA 0.1 0.2 0.3 Potential (V) 0.4 0.5 AA DA 0.000065 -0.2 0.0 -6 0.2 0.4 0.6 Potential (V) Boron Doped Diamond 3.0x10 304.2 mV 0.000015 0.0 0.6 0.000070 3.5x10 138.2 mV 0.000020 0.000010 -0.2 -0.1 0.0 0.4 0.000075 -6 UA 0.2 (b) Glassy Carbon 0.000080 0.000060 0.000025 0.0 Potential (V) 0.000090 167.7mV -0.1 0.0000003 0.0000000 (d) 800C 0.000012 DA 0.0000006 0.000006 0.000030 148.5 mV 0.000008 131.2 mV 0.000035 UA 0.000010 0.000008 -0.2 -0.1 0.0 0.6 0.000016 0.000014 164.6 mV (a) Graphite 0.0000009 0.000004 Potential (V) DA (c) 700C UA AA 293.5 mV 284.6 mV 0.000018 0.0000012 DA Current (A) AA 0.0000030 (b) 600C Current (A) 0.000012 Current (A) Current (A) DA (a) 500C 0.0000090 Current (A) 0.0000105 Current (A) Current (A) 0.00006 300 Energy (eV) 290 Cyclic Voltammetry 0.006 290 100 nm 100 nm B.E (eV) 700oC 280 C-N C-N 284 800oC * C=N C=N 282 NXAFS * C-C C=C C=C 600 oC 550 oC (b) 600 C C-C Intensity (arb. units) Intensity (arb.units) Intensity (arb.units) XPS (a) 550 C -6 2.5x10 -6 2.0x10 AA -6 1.5x10 DA -6 1.0x10 0.1 0.2 0.3 Potential (V) 0.4 0.5 0.6 -0.2 -0.1 0.0 0.1 0.2 0.3 0.4 0.5 Potential (V) The DNW electrodes show excellent electrocatalytic activity towards the oxidation of small molecules, such as AA, DA, and UA. High selectivity and reliable antifouling ability are superior to glassy carbon (GC) or boron-doped diamond (BDD). 11 0.00004 Detection limit 0.231 700 C 2.0 1.8 0.224 0.210 Current (A) 0.00001 1.6 0.207 0.203 0.196 0.00000 0 100 200 300 400 500 600 700 COOH-BDD electrodes GC electrode (AuNP Attachment) GC electrode - poly (p-nitrobenzenazo resorcinol)modified Graphite Pencil Electrode - Poly (Eriochrome Black T) Film Modified DNW film (700 °C) 0.201 0.198 0.195 0.192 0 0.189 0 Time (S) Electrode 1.4 0.204 Current (A) Current (A) 0.00002 0.217 100 200 2 4 6 8 Concentration ( 300 400 Concentration ( 1.4 1.2 1.2 1.0 1.0 Current (A) Current (A) 0.00003 10 500 DA dynamic range (µM) 0-30 DA detection limit (µM) 0.1 20-145 0.8 AA (mM) UA (mM) 0.5 - - 1.5 - 5-25 0.39 1.1 0.13 0.1-0.3 × 10−3 0.08 - 1 × 10−3 0.5-500 0.34 0.5 0.005 DNW (N-UNCD) as NADH sensor 12 Mediatorless N2 Incorporated Diamond Nanowire Electrode for Selective Detection of NADH at Stable Low Oxidation Potential Cyclic Voltammetry 3.1 BDD DNW 3.0 log Current (Ip) Current (A) 0.00012 2.9 2.8 0.00008 Slope= 0.48 2.7 2.6 2.5 1.2 1.4 1.6 1.8 2.0 2.2 2.4 log Scan rate () 0.00004 0.00000 -0.00004 -1.0 -0.5 0.0 0.5 1.0 Potential (V) The combination of long-term stability, high reproducibility and low operating potential of N-DNW films are superior to previous reports. 5.1 4.8 4.5 4.2 3.9 3.6 3.3 3.0 2.7 2.4 y = 0.127x + 0.2408 R?= 0.9981 NADH 500 M -6 5.0x10 Current (A) Current (A) Detection limit and Stability Schematic representation of NADH & AA Detection -6 4.0x10 -6 3.0x10 0.5 M -6 2.0x10 AA -6 1.0x10 2.1 y = 0.0264x + 1.8323 -0.4 -0.2 0.0 0.2 0.4 0.6 Potential (V) R?= 0.983 1.8 0 100 200 300 400 500 600 700 800 Concentration (M) 0.00003 After 20 days Fresh 0.00000 Current (A) Current (A) 0.00006 DNW -0.00003 -0.00006 8.0x10 -5 4.0x10 -5 Fresh 0.0 -4.0x10 BDD After 20 days -5 -1.0 -1.0 -0.5 0.0 -0.5 0.0 0.5 Potential (V) 0.5 1.0 1.0 1.5 Potential (V) Electrode N-UNCD Nanowire electrode Detection range 0.5 – 500 µM Oxidation potential + 0.15 V The range, sensitivity & detection limit of the N-DNW sensor are compared favorably with values for other electrode systems. 13 DNW (N-UNCD) as Urea sensor An Amperometric Urea Bisosensor based on Covalent Immobilization of Urease on (N-DNW) Electrode N-DNW electrode is wetchemically cleaned (oxidation) by boiling in a mixture of H2SO4 and HNO3 (3:1) at 200 °C for 2 h to remove graphite. Urs and GLDH are covalently attached to the oxidized N-DNW electrode by activating the COOH group of NDNW using EDC as the coupling agent and NHS as activator. 14 Urea Biosensors The developed N-DNW Electrode biosensor exhibited good performance in sensitivity, stability and reproducibility. Urs-GLDH/N-DNW exhibited linear and stability. Urs-GLDH/N-DNW bio-electrode retained 80% of its initial enzyme activity for 1 month, when stored at 4–6 °C in a refrigerator. CHEMICAL SENSORS Industrial waste greatly affect the Environment in terms of water, soil, air Soil and Air pollution Water pollution DNW (N-UNCD) in Heavy Metal Detection DNW (N-UNCD) as Nicotine Sensor 15 DNW (N-UNCD) in Heavy Metal Detection Selective and Simultaneous Detection of Toxic Metal Ions using Samarium Hexacyanoferrate (SmHCF) Modified Diamond Nanowire Electrode Simultaneous detection of Lead(pb), Cadmium(Cd), Zinc (Zn), Copper (Cu), Mercury (Hg) SmHCF was prepared electrochemically on the surface of DNW electrode (SmHCF/ DNW) . The interference between Zn2+, Cd2+, Pb2+, Cu2+ and Hg2+ were studied by using SmHCF/DNW film electrodes in a solution containing a mixture of with and without five analytes. 16 DNW (N-UNCD) as Amitrole (Pesticide) sensor Selective Detection of Amitrole( pesticide) using Gold Interlayered Diamond Nanowire Electrode 70 µm 10 µm -4 1.0x10 60 µm -5 Current (A) 8.0x10 Glassy carbon N-UNCD/Au/Si N-UNCD -5 6.0x10 -5 4.0x10 -5 2.0x10 0.0 0.5 µm -5 -2.0x10 -0.2 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 Potential (V) 17 Potential Applications Biosensors (chemical sensors ) play a part in the field of environmental quality, medicine and industry mainly by identifying material and the degree of concentration present. 18