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Piezo-Ceramic Servo Motors
Confidential
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Linear, Rotary or Spherical Motion
Confidential
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Agenda
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Corporate Overview
Theory of Operation
Product Features
Applications
Question / Answer
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Corporate Introduction
Nanomotion
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Established in 1992 for the design, manufacture and marketing of
piezo-ceramic motors and electronics (for linear and rotary
motion)
Subsidiary of Johnson Electric ($2.5B, 38,000 employees, 3
million motors/day)
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Saia Burges (step motors, switches, solenoids)
Nihon Mini Motor (step & dc motors for camera & dvd)
Parlex (flex circuits and contract mfg)
Nanomotion is 65 people with ~35% in the engineering and R&D.
>75,000 motors in field
>10,000 linear axes in the field
>Shipping 700k motors in 2008, for cell phone auto focus
Confidential
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Nanomotion
Theory of Operation
Traditional Piezo VS
Reversed Piezo VS
Standing Wave
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Piezo Direct and Reverse Effect
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Poling a Piezo Element
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Basic Structure of Nanomotion’s
Piezoelectric Element
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Nanomotion Motor Basics
Ultrasonic Standing Waves
Bending Mode
Longitudinal Mode
Simultaneous excitation of both modes
Creates motion at the tip of the motor finger
Slide
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PZT Element
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Finite Element Simulation
Bending Mode Longitudinal Mode
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“Ultrasonic Standing Wave”
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Motor Ellipse
 Amplitude of ellipse varies with voltage
 Slow speed – ellipse at the few nm level
 High speed- ellipse at the tens of microns
 The larger the ellipse, the more the mechanical
stress, the more the heat, the less the duty
cycle
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Nanomotion Motor Basics
Rotary
Table
Linear Stage
PZT
Linear Motion
PZT
Rotary Motion
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Same Motor for Linear or Rotary Motion
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Motor Assembly
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Motor Features
 Standard motors for most operating environments
 Unlimited travel with small operating package (Drive
strips to 4m length)
 Superior move & settle & Slow speed CV
 Vacuum motors for high and UHV
– Up to 10-10 Torr
 Non-Magnetic motors / No EMI from motor
 No servo dither & no hysteresis
 Built in holding / braking without power consumption
 Wide range of dynamic performance
– (Resolution to 1nm, velocity from 1u/sec to
300mm/sec)
 Cost effective direct drive solution
Confidential
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Nanomotion Applications
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Edge Motor & ASIC for
Optical Image Stabilization
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The “EDGE”
 ‘High volume’ industrial motor.
– Low voltage
– Supported by ASIC based driver
– Low price in volume
 Performance Characteristics
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Max velocity: 150mm/sec
Max force: 30g (.3N)
Highest resolution: 1um
Requires straight slide (to 10um)
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Nanomotion Applications
 Bio-Medical/Pharmaceutical
– Instrumentation
– Microscopy
– Hand-held devices and tools (pumps, endoscopes)
 Military/Security
– Aperture/Shutter Control
– Auto Focus
– Pan & Tilt
 Semiconductor
– SEM & ION beam
– Wafer Metrology
– Storage media
 Metrology and Assembly Automation
 Consumer Products (cell phone, digital camera)
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Nanomotion Solution
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ION Beam Etching of MEMs
 4 Axis (X/Y/Z/T)
Vacuum Rated
Low Magnetic Field
(VN motors, SS Bearings)
Spring Counterbalance in Z
Resolution of 100nm (available
to 10nm)
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Multi Axis X Ray Inspection System
 2Axis (X/Y)
X-Ray Inspection
(radiation environment)
Demonstrated ability to use
vibration cancellation with
AB2/DC Mode.
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Multi Axis Stage
 3 Axis (X/Z/T)
Laser assisted – Chemical
Micromachining for
Semicon & Biomedical
applications.
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6 Axis Hexapod
 Travel in XYZ +
Pitch/Roll/Theta
 Parallel Kinematics
eliminating stacked
axis errors
 Equal stiffness in all
directions
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Biomedical Application Base
 Cell Imaging (Cytopathology, Gene/DNA analysis)
– Microscopes
– Hand held imaging tools
 Surgical Robots & Manipulators (MRI compatible)
 Microfluidics (drug discovery & development)
– Pumps & Micro Pumps
 Proteomics & Dispensing
 End User Device Manufacturing (Angioplasty
balloons, implant devices)
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Virtual Microscopy: Scan on-the-fly
 Digitized entire microscope
slide with line scan operation
 Motion system resolution to
50nm
 X: Index Axis
 Y: Scan Axis
 Z: Auto Focus Axis
 Constant Velocity for scanning
and integrated Z axis for
managing Cell Terrain
Table Top Machine
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Cell Imaging: Move & Settle
Rapid scan & locates 22 areas of
interest (field of view) with step and
repeat motion
Slide imaged in 4 min/ 360 slides
per day.
Improve Sensitivity & Specificity
(false positive)
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Multi Layer Tissue Imaging
 Cross sectional imaging for
women’s health
 Lower cost diagnosis than pap
smear and can be made widely
available to under developed
countries.
 Miniature motion system to move
lenses inside the body
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Cell Imaging Benefit
 Ability to achieve high move & settle rate due to
inherent motor braking capability
 Higher resolution, faster moves for increased
throughput and image accuracy.
 Ability to track autofocus, on-the-fly.
 Highest performance in smallest motor/stage
package
 Simple drive assembly (2 piece construction)
 Cost effective technology compared to other devices
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Auto Focus Axis
 Resolution from
10nm to 100nm
 DuraMotor option for
continuous step
operation
 Spring counterbalance for optics
 Anti-migration
crossed rollers for
vertical operation
 Available with a
variety of motor sizes
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neuroArm
neuroArm robotic system is a 2
robotic arms, each with 6
degrees of freedom for extra &
intra-cranial functions
(ultimately for spinal surgery)
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Biomedical Device Applications
MRI Process (with
non-magnetic motors
Robotic arm for micro
surgery of the brain
MRI breast biopsy
Other diagnostic tools
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MRI Probes (Brain & Prostate)
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MR Tumor Ablation
A
B
C
Prostate Boundary
Target
Boundary
Spatial
Heating
Pattern
Direction
of rotation
Heating
Applicator
Confidential
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Biomedical / Bioprocessing Automation
 Automation for Drug
Discovery/Development
 Motion modules for precise
dispensing of syringes,
capable of reaching 9mm
pitch
 Laboratory Robots for DNA
Analysis
 Chromatography
Confidential
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Biomedical /Pharmaceutical
 Flow Cytometry
 Cell Analysis
 Medical Robot (end of arm
tooling / grippers)
 Micro-Fluidics
 Dispensing
 Pumps
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Miniature Motors for Drug Delivery Pumps
Precise Dosage
from the smallest available
non-magnetic servo motors
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Non-Consumer Vision Applications
 Industrial Vision Applications for:
Security identification
Medical imaging
Part inspection
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Gastro- Pill & Endoscope Auto Focus
 Nanomotion’s expertise in
combining miniature motors
with small optics and
electronics lends itself
exceptionally well to medical
devices used on the surface or
internal to the body.
 Miniature motor embedded in
an optics module provides
focus capability for
gastrointestinal camera
 Miniature motor/optics module
for focus of endscopy
Confidential
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Military/Security Application Base
 Aperture/Shutter Control
 Auto Focus
 Pan & Tilt
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Aperture & Shutter Control
 Aperture/Shutter
Control
– Light weight
– Fast response
– Low power
consumption
– Built in
holding/braking
without power
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Auto Focus
 Focus & Zoom
capability
– Ability for rapid
moves
– Capability to hold
position with high
shock load
– Small package for
auto focus
Moving lens A
Moving lens B
Linear guide
Fixed lens
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Pan & Tilt Assemblies
Platform used for:
 Satellite tracking
 XRay beam focus
 Optics positioning
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Competitive Large Volume Application
 Small motors deliver
performance in a restricted
package. It pans a full 360º
(non-continuous) and tilts
90º, giving you more
coverage than multiple fixed
cameras.
 No Noise
 Position Stability
 Long Distance focal
capability
Confidential
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Semicon Application Base
 Ebeam /Ion Beam wafer processing
 Mask correction machines
 Surface analysis equipment
 Wafer inspection, processing, and packaging
 Hard disk drive certification
 Other storage media
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(13) ST Motors on Nanotechnology tool
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(24) ST Motors+ Closed loop XYZ assembly
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Semiconductor / Electronics
 E-Beam writing &
inspection
 Wafer Metrology
 Thin Film Measurement
 Head Testing
 Storage Media testing/
writing
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Disk Media Testing
 Hard Disk Certification
 2000 Tracks per hour
 Moves 1 to 15 um in
5msec & settle to
100nm.
 Inspection rates
increase to 3000 and
4000 tracks per hour
next year
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Scan and Step
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7 Axis SEM Motion Platform
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X Axis
Tilt Axis
Y Axis
Rotary Axis (& 3 point leveling)
Uses round bodied motor
Bottom axis moves 65kg
All motors vacuum/nonmagnetic
Confidential
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Aerospace Application Base
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 Space Vehicles
 Spectrometers
 Sensors
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Custom Motion Platform
 Vacuum and UHV
motion systems
 Providing high
resolution positioning
and stability
 Complete multi-axis
system with drive and
control
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Metrology
3-Axis system for Optical Surface Scanning,
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Assembly / Automation
 Long Travel Actuation
(Travel to 4 meters)
 Inspection Device
 Pick & Place
assemblies
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Summary
 Ceramic Servo Motors deliver the most force
per motor volume over conventional motor
technology, making it well suited to a diverse
application base of motion requirements.
 Ceramic Servo Motors are robust, with the
ability to work in wide range of challenging
environments.
 Nanomotion’s motors & amps can be used
with any servo control, providing flexibility in
applications.
Confidential
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