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Semiconductor Gas Mixtures
232
Diborane Mixtures
Cylinder Specifications
Description
Formula:
Gas Data
Molecular Weight
Specific Volume:
Shipping Information
CAS Registry Number:
UN Number:
DOT Proper Shipping Name:
DOT Classification:
DOT Label:
TC Shipping Name:
TC Classification:
TC Label:
Semiconductor Products
Gas Grade Purity
Specifications
Diborane
ULSI 4N Purity
Gas Specifications
Nitrogen
Oxygen
Carbon Dioxide
Methane
Hydrogen
Boron Trifluoride
B5H9
B4H10
B5H11
Diborane
ULSI 4N Purity
Gas Specifications
Nitrogen
Oxygen
Carbon Dioxide
Methane
Hydrogen
Boron Trifluoride
B5H9
B4H10
B5H11
Cylinder
Size
Pressure
psig @ 70°F
Pressure
kPa @ 21.1°C
QB
QF
UF
Varies
Varies
Varies
Varies
Varies
Varies
Diborane
B2H6
Nitrogen
N2
Hydrogen
H2
27.68
0.872 m3/kg @ 21.1°C, 101.325 kPa
13.99 ft3/lb @ 70°F, 14.696 psia
28.01
0.867 m3/kg @ 21.1°C, 101.325 kPa
13.89 ft3/lb @ 70°F, 14.696 psia
2.02
12.0 m3/kg @ 21.1°C, 101.325 kPa
192 ft3/lb @ 70°F, 14.696 psia
19287-45-7
UN 1911
Diborane, Liquid
(2.3) Toxic Gas and Flammable Gas
INHALATION HAZARD
FLAMMABLE GAS
Diborane, Liquid
2.3
INHALATION HAZARD
FLAMMABLE GAS
Transportation by air is not permitted
7727-37-9
UN 1066
Nitrogen, Compressed
2.2 (Nonflammable Gas)
NON-FLAMMABLE GAS
1333-74-0
UN 1049
Hydrogen, Compressed
2.1 (Flammable Gas)
FLAMMABLE GAS
Nitrogen, Compressed
2.2
NON-FLAMMABLE GAS
NON-POISONOUS GAS
Hydrogen, Compressed
2.1
FLAMMABLE GAS
ppmv max.
10
1
5
5
500
50
10
180
10
ppmv max.
10
1
5
5
500
50
10
180
10
Nitrogen
Semiconductor 5N Purity
Gas Specification
ppmv max.
Oxygen
3
Carbon Monoxide
1
Carbon Dioxide
1
Methane
1
Moisture
3
Hydrogen
Semiconductor 5N Purity
Gas Specification
ppmv max.
Nitrogen
5.0
Oxygen
2.0
Carbon Monoxide
1.0
Carbon Dioxide
1.0
Methane
0.5
Moisture
3.0
Diborane
Concentrations
50-999 ppm
0.1 %-1.0 %
2%
5%
6 %-10 %
15 %
QB/QF
Total Contents/ft3
189
189
181
158
118
79
UF
Total Contents/ft3
30
30
28
24
18
12
50-999 ppm
0.1 %-1.0 %
2%
5%
6 %-10 %
15 %
176
176
171
149
113
77
28
28
26
23
18
12
Pneumatic and Manual Valves are available for products with DISS 632 connection.
A lot analysis is provided for each order. Individual analysis is also available.
Other concentrations are available.
Nitrogen is the preferred gas for mixes with concentrations of Diborane > 500 PPM.
NOTE: Other grades for a mixture are available. Please inquire.
www.mathesontrigas.com
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