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Optical and thermal imaging of nanostructures with a scanning fluorescent particle as a probe. Near-field experiments : ESPCI, Paris, France Lionel Aigouy, Benjamin Samson Samples : IEF, Orsay, France TIMA, Grenoble, France LAAS, Toulouse, France LPS, Orsay, France Gwénaelle Julié, Véronique Mathet Benoît Charlot Christian Bergaud Rosella Latempa, Marco Aprili Fluorescent particles : ENSCP, Paris, France Michel Mortier OUTLINE Introduction : fluorescent particle as a local sensor OUTLINE Introduction : fluorescent particle as a local sensor A local optical sensor (evanescent fields) Local field around metallic nanoparticles OUTLINE Introduction : fluorescent particle as a local sensor A local optical sensor (evanescent fields) Local field around metallic nanoparticles Surface plasmons polaritons launched by apertures OUTLINE Introduction : fluorescent particle as a local sensor A local optical sensor (evanescent fields) Local field around metallic nanoparticles Surface plasmons polaritons launched by apertures A local thermal sensor Hot zones in a polysilicon resistive stripe OUTLINE Introduction : fluorescent particle as a local sensor A local optical sensor (evanescent fields) Local field around metallic nanoparticles Surface plasmons polaritons launched by apertures A local thermal sensor Hot zones in a polysilicon resistive stripe Heating of an aluminum track HOW DOES IT WORK ? PM Filters Microscope objective Electromagnetic field on the surface Sample Laser Map of the field distribution on the surface HOW DOES IT WORK ? PM Filters Many dipoles randomly oriented Microscope objective Electromagnetic field on the surface APL, 83, 147 (2003) Sample Simplicity Detection of the total electromagnetic field on the surface (Ex, Ey, Ez) Laser Map of the total field distribution on the surface HOW DOES IT WORK ? PM Many dipoles randomly oriented Filters Microscope objective Electromagnetic field on the surface APL, 83, 147 (2003) Simplicity Detection of the total electromagnetic field on the surface (Ex, Ey, Ez) Er / Yb ions Robust : inorganic → no photobleaching Infrared excitation : (= 550nm) emission and absorption lines well separated Non linear excitation : fluo I2 → Contrast enhanced Sample Laser (=974nm) TIP FABRICATION Attachment of the particle Applied Optics, 43(19) 3829 (2004) Optical images : 16.5 x 11.7 mm2 TIP FABRICATION Attachment of the particle Applied Optics, 43(19) 3829 (2004) Optical images : 16.5 x 11.7 200nm size particle exc = 975 nm mm2 Lateral resolution : / 5 LOCAL OPTICAL FIELDS : NANOPARTICLES Gold and latex particles on a surface Particle diameter : 250 nm AFM LOCAL OPTICAL FIELDS : NANOPARTICLES Gold and latex particles on a surface Particle diameter : 250 nm AFM Fluorescence LOCAL OPTICAL FIELDS : NANOPARTICLES Gold and latex particles on a surface AFM Fluorescence Particle diameter : 250 nm Gold Latex Latex Fluorescence is enhanced on gold particles JAP, 97 104322 (2005). LOCAL OPTICAL FIELDS : NANOPARTICLES Gold and latex particles on a surface AFM Fluorescence Particle diameter : 250 nm Gold Latex Latex Fluorescence is enhanced on gold particles Map of the field distribution on the structure Dark ring around the particle : interference between the incident and the scattered wave. Circular symmetry of the field distribution JAP, 97 104322 (2005). LOCAL OPTICAL FIELDS : NANOSLIT APERTURES scan TM-polarized excitation SEM 10,44µm LOCAL OPTICAL FIELDS : NANOSLIT APERTURES d=10,44µm scan TM-polarized excitation SEM 10,44µm LOCAL OPTICAL FIELDS : NANOSLIT APERTURES d=10,44µm scan TM-polarized excitation Period = 480.5 nm ± 2 nm spp / 2 = 481.6 nm Good agreement with the SPP wavelength OTHER APPLICATION : TEMPERATURE MEASUREMENTS Fluorescent particle Emission varies with temperature OTHER APPLICATION : TEMPERATURE MEASUREMENTS Fluorescent particle Emission varies with temperature Tip Laser beam Fluorescent particle Stripe Microelectronic device OTHER APPLICATION : TEMPERATURE MEASUREMENTS Fluorescent particle Emission varies with temperature Tip Laser beam Fluorescent particle Stripe T° I Microelectronic device If we know the temperature dependence of the fluorescence, then we can determine the temperature OTHER APPLICATION : TEMPERATURE MEASUREMENTS Improvement of the lateral resolution Pollock & Hammiche, J. Phys. D 34, R23 (2001) Highly localized sensor OTHER APPLICATION : TEMPERATURE MEASUREMENTS Improvement of the lateral resolution Pollock & Hammiche, J. Phys. D 34, R23 (2001) Highly localized sensor Low parasitic heating by convection through the air HOW CAN WE DEDUCE THE TEMPERATURE ? Er / Yb ions PL spectrum of Er / Yb doped particles HOW CAN WE DEDUCE THE TEMPERATURE ? PL spectrum of Er / Yb doped particles Er / Yb ions 4F 7/2 2H 11/2 4S 3/2 I green I yellow exp( E ) k .T (527 nm) (980 nm) (550 nm) (980 nm) 4I 15/2 EXPERIMENTAL SET-UP Topography Oscillating tip Tapping mode (f=6kHz, amplitude=10nm) Microelectronic circuit Scanning stage EXPERIMENTAL SET-UP Topography F=620Hz Oscillating tip Tapping mode (f=6kHz, amplitude=10nm) Microelectronic circuit Scanning stage EXPERIMENTAL SET-UP Topography F=620Hz Oscillating tip Tapping mode (f=6kHz, amplitude=10nm) Microelectronic circuit Scanning stage EXPERIMENTAL SET-UP Optical image 1 PMT Lock-in 520nm Filter Topography F=620Hz Oscillating tip Tapping mode (f=6kHz, amplitude=10nm) Microelectronic circuit Scanning stage EXPERIMENTAL SET-UP Optical image 1 PMT Lock-in 520nm Filter 550nm Lock-in Filter PMT Topography F=620Hz Oscillating tip Tapping mode (f=6kHz, amplitude=10nm) Optical image 2 Microelectronic circuit Scanning stage DOES THAT WORK ? Collaboration : B. Charlot (TIMA, Grenoble), G. Tessier (ESPCI, Paris) Microelectronic device : Polysilicon resistor stripe (covered with SiO2 and Si3N4 layers) Topography Yellow optical image (550nm) Green optical image (520nm) DOES THAT WORK ? First experiment : no current circulating in the resistor Green fluorescence image (520nm) Yellow fluorescence image (550nm) Topography Scan size : 45µm x 60µm DOES THAT WORK ? First experiment : no current circulating in the resistor Green fluorescence image (520nm) Yellow fluorescence image (550nm) Topography I = 0 mA Uniform temperature (room temperature) Optical contrast visible between different zones Reference image Scan size : 45µm x 60µm DOES THAT WORK ? Second experiment : a current circulates in the resistor I = 50 mA I = 0 mA Hot spots Uniform temperature (room temperature) Optical contrast visible between different zones Reference image APL, 87, 184105 (2005). CONCLUSION Scanning near-field fluorescent probes have really interesting imaging capabilities ! • Nano-optics : evanescent fields (localized, surface plasmons polaritons) • Nano-thermics : heating in stripes, failure analysis, … UNIVERSAL DETECTOR ! Future : - Reduce the size of the fluorescent particle : to get a better resolution - Many studies : plasmonics and thermics Acknowledgments : Philippe Lalanne (Institute of Optics, Orsay, and US Dax supporter)
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