Download title of abstract goes here, title of abstract goes here, title of abstract

yes no Was this document useful for you?
   Thank you for your participation!

* Your assessment is very important for improving the work of artificial intelligence, which forms the content of this project

Document related concepts

Ultra-high-temperature ceramics wikipedia, lookup

Advancements In Packaging Technology Driven By Global Market Return
M. G. Todd
Electronic Materials, Henkel Corporation, Irvine, California 92618, USA
Recently, the focus of attention in the IC packaging industry has
been squarely on removing costs from the manufacturing supply
chain. As the economic recovery accelerates, however, advances in
innovative IC package design and manufacture are likely to lead
the headlines. IC integration technologies, in particular, such as
wafer-level packaging design, through silicon via (TSV)
technology – especially in the area of IC/memory integration – and
an explosion of new developments in the area of multi-die and die
stacking technologies are poised to move the industry further and
faster than in recent years. This paper will review how materials
suppliers have invested significant resources to deliver marketready materials aligned with this renewed emphasis on packaging
technology development.
An Industry in Recovery
Recent statistics regarding inventory levels and corporate earnings suggest that the
semiconductor packaging market appears to be recovering from the Q4 2008 – Q1 2009
low point much faster than many industry experts had anticipated. Sales and unit volume
shipments of NAND flash between January and July of 2009 increased by 98% and 67%
respectively, with similar increases realized for DRAM, analog and microprocessors (1).
Industry analysts are now projecting the market for ICs to show strong growth through
2010 and 2011, with even a potential for industry-wide wafer fab utilization being maxed
out in the coming months, resulting in longer lead times, spot shortages and escalating
average selling prices throughout the industry (2).
Though the improvements seem to be occurring in a wide range of markets and
applications, recovery in some segments is following a faster curve than others. Over
proportional growth in emerging markets coupled with new applications in advanced
packaging is driving packaging engineers to exploit recent advances in packaging
technology. IC integration technologies, for example, including new wafer-level
packaging design, through silicon via (TSV) technology – especially in the area of
IC/memory integration – and an explosion of new developments in the area of multi-die
and die stacking technologies are poised to move the industry further and faster than ever
before in high density die packaging. Halogen-free initiatives are driving the redesign of
entire families of products. And, finally, the rapid growth of new photovoltaic,
automotive and display technologies are advancing the development of new IC package
Materials suppliers have invested significant resources to deliver market-ready materials
aligned with this renewed emphasis on packaging technology development. Examples
which will be reviewed in this paper include:
Wafer backside coating materials developed for thinner bondlines, lower total
package cost and improved manufacturing throughput.
Innovations in compression molding technology for wafer-level redistribution
Passive and active materials for the robust, low-cost production of photovoltaic
devices, which are helping to define an entire new market segment.
Thermo-compression bonding materials for low-cost flip-chip manufacturing.
Epoxy-flux materials for improved CSP package assembly yield and reliability
These technologies, among others, will accelerate a strong recovery in the IC packaging
market in 2010.
Packaging Materials Innovations
Throughout the recent global economic downturn, companies with an eye to the future
have continued (or accelerated) investments in research and development. The IC
packaging and design industry is no exception. As the economic recovery gathers speed,
advances in innovative IC package design and manufacture are likely to lead the
headlines. The following innovations highlight this movement:
Wafer Backside Coatingfor Leadframe/Power IC Packages
Traditional silver-filled die attach adhesives have been successfully employed to bond
ICs to leadframes and laminate substrates for decades. In a conventional die attach
process, paste is dispensed onto the leadframe pad and the chip placed into the paste. The
leadframe pad must be designed significantly larger than the chip, to allow for the flow of
the paste and the formation of a fillet around the die edge. In addition, the die must have a
minimum thickness to prevent the paste flowing onto the top surface of the chip. To
address these issues, Wafer Backside Coating (WBC) technology has been developed.
WBC is a b-stage paste that is coated on the backside of a wafer prior to dicing (Figure 1).
WBC provides fillet control for reduced package size, bondline thickness (BLT) control
for reduced die tilt and minimal processing steps for reduced manufacturing cost.
Figure 1. WBC application onto wafer prior to dicing and after die placement
In test packages assembled using the WBC technology, a consistent 25-micron print
thickness was achieved over a period of several hours of continuous printing.
Additionally, optimal die assembly parameters were established using a 4mm x 4mm die
size, 10N bondforce, 1000msecs bond time, and 130ºC die attach temperature. Finally,
functional packages were assembled using the WBC technology and subjected to MSL
Level 1 / 260°C reliability testing. Using two die sizes (0.5x0.5mm and 1.5x1.5mm) on
NiPdAu leadframes, all packages passed MSL Level 1 / 260°C.
Compression Mold Materials
Compression molding is gaining ground as an alternative to transfer molding in various
applications including eWLB, MCP, SiP and others. The benefit in utilizing compression
molding is that a larger area can be molded at once, improving manufacturing throughput,
while also minimizing waste. Additionally, compression molding eliminates various
materials and/or process steps used in advanced packages, such as the elimination of
laminate substrates in some WLSCP packages and the elimination of underfill processes
in FC-CSP packages.
As an example, eWLB (embedded wafer level package), a WL-CSP, is made in a batch
process starting from a “virtual wafer”. This next generation wafer level package uses a
fan-out design, which enables higher I/O and the use of known good die (KGD) – both
factors helping to reduce overall package cost. Compression molding technology is being
used for this application to realize a previously unachievable target of 0.5mm warpage
across an 8-inch wafer area. The compression molding material possesses unique process
and performance that enable this package design. Both liquid and powder compression
molding materials are being developed for this application.
Figure 2. eWLB-type package before and after compression molding
Electrically Conductive Adhesives for Assembly of Photovoltaic Modules
Next generation flexible thin film, dye sensitized and/or organic solar cells often rely on
temperature sensitive substrates. Making an electrical interconnection onto these flexible
substrates requires low temperature interconnection processes, eliminating traditional
SnPb and lead-free SnAgCu soldering processes from consideration. Electrically
conductive adhesives have been used for many years as an alternative to traditional
solders in high reliability electronics applications such as satellite, automotive, medical
and telecommunication electronics. The major limitation of electrically conductive
adhesives, however, has been their instability on non-noble electronic termination metals
such as copper and Sn.
To address this limitation, new innovations in conductive adhesives have been achieved.
Recent work has shown that the unstable contact resistance of electrically conductive
adhesives on copper and tin is due to electrochemical corrosion of these metals under
elevated temperature and humidity conditions. (3) Based on the above fundamental
understandings, a new class of conductive adhesives has been developed which exhibit
exceptional contact resistance stability on surfaces including OSP copper, Sn alloys and
even 100% Sn. The result is a new electrically conductive adhesive product line for use
on thin film solar substrates.
To demonstrate the performance of these new electrically conductive adhesives for thinfilm solar cell applications, a test device having indium tin oxide (ITO) terminations was
bonded to non-noble metal interconnection tabs using the electrically conductive
adhesives. Contact resistance measurements were performed according the TLM-method,
as described by Herz et al. (4). The results of this testing are illustrated in Figure 3, in
which the new conductive adhesives designed for compatibility with non-noble
interconnects (samples A, E, F) exhibit stable electrical contact between ITO and a Sn
termination through 1000-hours of 85°C/85%RH exposure..
Reliability test 85°C/85%RH
Sn tab
Contact resistance (ohm)
Time (hrs)
Figure 3. Contact resistance stability under 85%RH/85°C conditions of conductive
adhesives when bonding a Sn metallized tab onto ITO-coated glass
As the electrically conductive adhesives are processed at temperatures significantly
below the melting temperature of traditional SnPb and lead free SnAg solders, the
reliability data from this report, indicate that electrically conductive adhesives containing
new corrosion inhibitors are a viable alternative to solder interconnections for
applications requiring low-temperature processing.
Thermo-compression Flip-Chip
In addition to their use in microprocessors, flip-chip packages are now also being used in
many IC packages. Typically these flip-chip devices use solder reflow to form the
electrical interconnect. However, for very fine-pitch devices, conventional solder reflow
cannot be used due to solder bridging. Recent work (5) has shown that thermocompression bonding (TCB) may be used for a growing number of very fine-pitch flip-
chip applications, including copper pillar and gold stud flip-chip interconnects, when
aided by a new NCP underfill material.
The new non-conductive paste (NCP), offering fast bonding time and good reliability
performance, has been designed for copper pillar and Au stud-bump flip-chip
interconnect processing. Analysis has shown that flip-chip bonding using this new NCP
can occur in as little as one-second bond time (Figure 4).
NCP with Au
Au bump
NCP dispensing
Heat Bonding
Au bump
Au pad
Figure 4. Thermo-compression flip-chip process and cross-section
Thermo-compression flip-chip devices were assembled using the new NCP material.
After bonding, the devices were subjected to MSL L3/260°C and HAST testing. For all
tests, 100% yield and passing MSL/HAST performance was reported at most bonding
Epoxy Flux Technology for Improved Reliability Solder Interconnections
Since their inception over 30 years ago, underfill materials have enabled numerous new
package designs by providing mechanical support and reliability for miniaturized solder
interconnections. But, as the industry continues its march forward toward higher density,
flexible and miniaturized devices and component configurations, traditional underfill
materials fail to meet the needed demands. A breakthrough underfill material technology
called epoxy flux has recently been developed. Designed to offer process efficiency,
epoxy flux underfills deliver a fluxing component that facilitates solder joint formation as
well as an epoxy system that offers added device protection by encapsulating individual
bumps (Figure 5). Because epoxy fluxes are cured during the reflow process, they offer
an in-line alternative to other underfill methods and, depending on the process, may
eliminate the need for a dedicated dispensing system and the time required to dispense
and cure. These new materials also provide deposition flexibility and, depending on the
application and process, can be screen printed, dipped, jetted or dispensed as required.
Figure 5. CSP device assembled using epoxy-flux technology (after reliability testing)
In a recent analysis of PoP attachment reliability, several fluxing materials were studied:
No-clean tacky fluxes, SAC 305 solder paste and epoxy flux. The devices were subjected
to drop testing (JEDEC 22-B111, horizontal dropping, 2900G, 0.3msec, 10% resistance
criteria), and results indicate that epoxy flux offers the most robust performance with the
most number of drops before the first failure as well as the longest characteristic life
(Table 1).
TABLE I. Drop-Shock Test Results
Interconnect Process
Solderpaste (Type IV)
Epoxy-Flux (2.5-mil dip)
Epoxy-Flux (6-mil dip)
1st Failure (# of drops)
Characteristic Life (# of drops)
Epoxy flux material technology provides improved manufacturing rates through
enhanced throughput and improved reliability required for fine-pitch assembly. With a
dual function flux and underfill in one material, epoxy fluxes have a broad application
range for both packaging and board assembly environments. In addition to CSP array
package attach and reinforcement, these new materials are finding application in ball
attach processes for BGA and CSP performance improvement.
As the economic recovery accelerates in 2010, advances in innovative IC package design
and manufacture are likely to lead the headlines. As in previous recessionary periods,
those companies that continued to invest in new technologies and manufacturing
efficiencies during the recent market downturn will be the first to come to market with
technology-leading new products (6). Several novel packaging materials technologies,
such as WBC, NCP flip-chip bonding, non-noble conductive adhesive bonding and
compression molding materials are likely to lead the way towards new innovative
package designs.
I would like to acknowledge the contributions to this paper by many team members
within the Henkel organization: Kevin Becker, Minghai Wang, George He, Jeff Leon,
Anja Henckens, Gunther Dreezen, Bruce Chan, Renyi Wang, Tony Winster, Don Frye,
Shashi Gupta.
1. J. Walko, “Analyst: IC sales set for ‘V’ shaped recovery”, EE Times Europe,
TechInsights, (2009).
2. S. Deffree, “Swift recovery under way with shortages possible”, Electronic News,
Reed Elsevier Inc. (2009)
3. D. Lu, C.P. Wong, Q. Tong, IEE Trans. Elec. Pack. Man., July 1999, 2-3, p. 223
4. K. Herz et al: Conductive Adhesives for Flexible CIGS Solar Modules, 22nd
European Photovoltaic Solar Energy Conference, Milano, Italy, 2007
5. M.J. Lee et al, “Study of Interconnection Process for Fine Pitch Flip Chip”, 2008
ECTC, p 720-723.
6. C Brown, G. Linden, Chips and Change; How Crisis Reshapes the Semiconductor
Industry, MIT Press, 2009, p. 27-36.