Download SUPER SCOPE MICROSCOPE

Optical System
SUPER SCOPE MICROSCOPE
O P T I C A L
S Y S T E M
Optical System
SUPER SCOPE MICROSCOPE
This microscope is a high-power, high-resolution instrument and is ideal as a probe station
for the semiconductor industry and for LCD assembly. The PS-888L features a 3 lens turret which mounts the 1064nm, 532nm and 355nm tube lenses. Additionally, a YAG Laser
can be mounted on the PS-888L for semiconductor circuit and LCD substrate repair.
PS-888／PS-888L System Chart
Monitor
PS-888
PS-888L
Eyepiece
LCD
Optical Scales
light path change knob
NW laser adapter
installation place
Iris control knob
Iris control
knob
fiber insertion
place
WF 20X（1Pair）
30
3-M3 depth 6
P.C.D 45
A
7.5
192
32 Cross
φ
fiber
insertion
place
33 Micrometer
A：top view
↑
25mm
74
4-M4 depth 6
↑
25mm
63.5
74
5mm 1/50
63.5
4-M4 depth 6
Auto Focus
Unit
Electric Line
Generator
Laser
YR Series
532nm
532／355nm
1064／532／355nm
④-888
turret for
tube lens
117
145
61
【OPTIONS】
②-888
model
model #
Camera adaptor
LCA-1
Power Supply
FA-100EN／FA-150EN
Illuminator
Fiber Light Guide SL-B5-3000 (3M)
Motorized Turret
ARC-01
Motorized Focus
FC-02
Filter unit (Round Actuated)
PL-2
Nomarski Prism,
NP-3
1/4 wave length with Polarizer and Analyzer
Color Filter
Red
FC-R
Green
FC-G
Blue
FC-B
Yellow
FC-Y
Eyepiece
FWF10×DA②-888
WF15×
③-888
WF20×
④-888
Objective Lens 2.5×
M.PlanAPO2.5×
5×
M.PlanAPO5×SB
10×
M.PlanAPO10×SB
20×
M.PlanAPO20×SB
50×
M.PlanAPO50×SB
100×
M.PlanAPO100×SB
Stand
STD-67
SUPER SCOPE
80 Cross
1/100
PS-888
PS-888L
FC-02
Color Filter（R,G,B,Y）
Motorized
Revolving System
FC-R
FC-G
FC-B
FC-Y
Standard
(For Laser) 1064／532／355nm
Polarizer Filter
ARC-01
PL-2
Objectives
Super Long Working Distance Type
Fiber Illumination
Light Source
3-M3 depth 6
P.C.D.45
2.5X
φ55
φ30
（205）
light path change knob
75
90
153
63.5
5X
10X
20X
50X
M.Plan APO SB Series
100
154
100X
SL-B5 Series
79
C-mount
Motorized stage
FA-100EN／FA-150EN
9.5
Stand With 6"X7" Stage
9
45
145
126.5
279.3
126.5
eye piece
par focal distance 95
PS-888-TRI (with focus mount)
45 kgs
50mm
Coarse 4mm / rev Fine 0.1mm / rev
1 increment / 1μm
Motorized Focus
6-M4 depth 6
illumination
insertion
place φ14
154
57
60
155
Index
Model#
Load capacity
Stroke
1 round
Scale
Color
BW
Concentric
65 circle
PS-888-TRI
This microscope is equipped with a port on the side of the
body for mounting a camera. Additionally, a Koehler illumination port is also equipped on the side of the microscope
body for better image contrast. The tube lens is not interchangeable because of its compact size. The working
wavelength must be specified at time of order.
10×10mm
※Objective lenses are optional.
Data
SIDE CAMERA PORT
CCD Camera
FWF 10X D.A
64 Reticle
154
155
76.5
（neutral）
Made to Order
③-888
63 Standard
PS-888
PS-888L
Microscope for Prober M/C
Microscope for Laser Cutter
Visible Light
Infrared∼Ultraviolet Light
Siedentopf Type, Adjustment Distance : 50-75mm
23mm
T:R=70:30 Simultaneous Observation
0:100/100:0 Switch path
1X (486nm-656nm)
1X (355nm-532nm)
2X (Visual) (486nm-656nm)
1X (532nm-1064nm)
Turret Changeover System
2X (486nm-656nm) Use only for Visual
YAG Laser (Basic, Second & Third Height)
C-mount
Laser mount (N/W)
Bright Field Koelher Illumination with Field & Aperture Stop (Φ14mm,Φ10mm Capable)
Back Tilted 4 noses bright field type (Per Center & Par Focal adjustable)
10X 2pcs. Set (FWF10X) Standard accessory
Infinity Corrected Objective Lens (M.Plan APO Lenses)
6.8kgs(14.99Lbs) w/manual focus block
7.5kgs(16.50Lbs) w/manual focus block
45kgs (99.1lbs)
Coarse and Fine manual operation (Coarse : 1 round/4mm, Fine : 1 round/0.1mm)
±25mm
SUPER SCOPE
MICROSCOPE
100
AFC-100D
Image Equipment
Laser
Camera Mount
Coaxial Vertical Illumintaion
Revolver
Eyepiece
Available Objective Lens
Weight
Load Capacity
Focus Unit Operation
Stroke
154
155
7.5
Tube Lens
(Image Formation
Main Body Lens)
↓
25mm
147
Models
Name
Optical Tube Type
Interpupillary Distance
Erect
Trinocular Field of View
Tube
Optical Path
35 Angle scale
nomarski knob
100
EL-3000
WF 15X（1Pair）
Optical Peripherals
117
（par focal distance）
95
↓
25mm
61
nomarski slot
10mm 1/100
126.5
288
turret for
tube lens
PL filter
slot
（par focal distance）
95
147
PL
filter slot
145
126.5
（365）
34 Micrometer
Lighting Equipment
（Image plane）
C-mount
192
97
95.5
STD-67
AP-200（200mmXY）
113
※Objective lenses are optional.
Seiwa optical Co., Ltd is not liable for the performance and safety of microscope systems equipped
with Laser equipment.
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SEIWA OPTICAL CO.,LTD.
SEIWA OPTICAL CO.,LTD.
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