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Pressure Cure Oven (PCO) CONFIDENTIAL Introduction Pressure Cure Oven (PCO) or Autoclave is used to minimize voiding and increase adhesion strength for bonding processes typically used in die attach and underfill applications PCO pressurizes air into a rigid vessel and heats & cools with forced convection ¬ Heaters, heat exchangers and blowers are internal to the pressure vessel When the curing process is complete, the pressure oven automatically relieves its pressure to 1atm and cools CONFIDENTIAL PCO Introduction Viable applications for PCO Die attach curing Wafer laminating Thermal compress bonding Underfill curing Via filling Film & Tape bonding CONFIDENTIAL Introduction Air bubbles Solder ball Substrate PCO is applied for curing die attach adhesive and removing voids in adhesive or already soldered products CONFIDENTIAL Process Specification • • • • • • • Process time: Generally 120 min or User’s spec Operating temp: 60oC ~ 200oC Maximum temp: 220oC Operating pressure: 1 bar – 10 bar Capacity: 24 Magazines (typical) Cooling method: PCW (17oC - 23oC) Cooling water pressure: 25 – 40 psi Representative Pressure/Temp Profiles (User Configurable) Temp. Rising process Curing process Cooling process Pressure. 10 bar 200℃ 60℃ 0 0 30min 90min 120min Time CONFIDENTIAL 20min 90min 110min Time System Dimensions 1,700㎜ 2,200㎜ ※ Wight: About 2.7 Ton 1,700㎜ CONFIDENTIAL Chamber Dimensions 7 CONFIDENTIAL Chamber with Shelves Extended CONFIDENTIAL System Air Flow Heater module Fan motor & mechanical seal Door inside cover Return air assistance damper radiator 9 CONFIDENTIAL Vacuum Module Option • Vacuum Module (Optional) Vacuum in/out line Gauge Vacuum pump CONFIDENTIAL