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Micro transductors ’08 Low Leakage VLSI Design Dr.-Ing. Frank Sill Department of Electrical Engineering, Federal University of Minas Gerais, Av. Antônio Carlos 6627, CEP: 31270-010, Belo Horizonte (MG), Brazil [email protected] http://www.cpdee.ufmg.br/~frank/ Agenda Recap Trends Leakage components Leakage reduction On technology level On transistor and gate level On architecture level Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 2 Recap: Problems of Power Dissipation Continuously increasing performance demands Increasing power dissipation of technical devices Today: power dissipation is a main problem High Power dissipation leads to: Reduced time of operation High efforts for cooling Higher weight (batteries) Increasing operational costs Reduced mobility Reduced reliability Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 3 Recap: Clock Gating Most popular method for power reduction of clock signals and functional units Gate off clock to idle functional units Logic for generation of disable signal necessary R Functional e unit g Higher complexity of control logic Higher power consumption Critical timing critical for avoiding of clock glitches at OR gate output Additional gate delay on clock signal clock disable Source: Irwin, 2000 Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 4 Comb. Logic Copy 2 Multiphase Clock gen. and mux control fclk/N Register fclk/N N = Deg. of parallelism Register Comb. Logic Copy 1 Supply voltage: VN ≤ Vref N to 1 multiplexer Input Register Each copy processes every Nth input, operates at fclk/N reduced voltage Register Recap: Parallel Architecture Output fclk Comb. Logic Copy N CK Source: Agarwal, 2007 Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 5 Recap: Pipelined Architecture Reduces the propagation time of a block by factor N Voltage can be reduced at constant clock frequency Constant throughput A/N Area A A/N CLK CLK A/N Functionality: Data CLK Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 6 Recap: Busses Bus segmentation Another Control way to reduce shared buses of bus segment by controller blocks (B) Shared Bus B Segmented Bus B Source: Evgeny Bolotin – Jan 2004 Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 7 Recap: Adaptive DVS Task with 100 ms deadline, requires 50 ms CPU time at full speed Normal system gives 50 ms computation, 50 ms idle/stopped time Half speed/voltage system gives 100 ms computation, 0 ms idle Same number of CPU cycles but: E = C (VDD/2)2 = Eref / 4 Dynamic Voltage Scaling adapts voltage to workload Speed T1 T2 T1 T2 Same work, lower energy Task Idle Task Time Copyright Sill, 2008 Micro transductors ‘08, Low Leakage Time 8 Recap: Processor Modes % of max powerl consumption 100 90 80 70 60 50 40 30 20 10 0 300 300 Mhz 0.80 V Peak performance region Typical operating region 400 433 Mhz 0.87 V 500 533 Mhz 0.95 V 600 700 667 Mhz 1.05 V 800 800 Mhz 1.15 V 900 900 Mhz 1.25 V 1000 1000 Mhz 1.30 V Frequency (MHz) Source: Transmeta Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 9 Non-linear effects influence life time of batteries “Rate Capacity” If discharging currents higher than allowed real capacity goes under nominal capacity “Battery Recovery” Capacity (mAh) Battery aware design 1000 800 600 400 200 1000 mAh (Standard Capacity) 125mA ( Rated Current) Discharge current (mA) Available Charge (mA) Pulsed discharge increases nominal capacity Based on recovery times Discharge (as long there is no rate Current capacity effect) (mA) time idle time Source: Timmermann, 2007 Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 10 Trends 30 nm 50 nm 20 nm 10 nm 35 nm SiGe S/D Strained Silicon 5 nm SiGe S/D Strained Silicon Metal Gate Nanowire Tri-Gate 5 nm High-k Si Substrate S G Copyright Sill, 2008 Micro transductors ‘08, Low Leakage D S III-V Carbon Nanotube FET 11 Trends cont‘d Power Dissipation [W] (100 mm² Chip) 1400 Power Dissipation by Leakage currents 1200 1000 800 Dynamic Power Dissipation 600 400 200 0 90 nm 65 nm 45 nm 32 nm 22 nm 16 nm Technology Technologie Source: S. Borkar (Intel), ‘05 Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 12 Recap: Transistor Geometrics polysilicon gate Gate-width W tox n+ L n+ SiO2 gate oxide (good insulator, eox = 3.9 p-type body tox – thickness of oxide layer Gate length Source: Rabaey,“Digital Integrated Circuits”,1995 Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 13 Subthreshold Leakage Threshold Voltage Vgs < >V Vthth Transistor characteristic If: „Gate-Source“-Voltage Vgs higher than Vth Channel under Gate Current between Drain and Source If: Vgs lower than Vth (ideal) No current Gate Gate Subthreshold leakage Isub Leakage between Drain and Source when Vgs < Vth Based on: Short Channels Diffusion Thermionic Emission Copyright Sill, 2008 Drain Source Source Isub Drain Diffusion high Concentration Micro transductors ‘08, Low Leakage Low concentration 14 Subthreshold Leakage cont’d Short-channel device Log (Drain current) Transistor is conducting Isub NMOS-Transistor 0 Vth’ Vth Gate voltage Source: Agarwal, 2007 Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 15 Temperature dependence 20 Source: Chatterjee, Intel-labs IOFF at 1100C Normalized Isub/µm 16 Isub at 250C 12 8 4 130nm6x 0 0 20 40 60 80 100 120 Temperature (°C) Based on Thermionic Emission: subthreshold leakage Isub increases with temperature Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 16 Gate Oxide Leakage Tunneling effect Electromagnetic wave strike at barrier: Reflection Potential Energy Energy Potential + Intrusion into barrier 0 If thickness is small enough: Wave interfuse barrier partially: (Electrons tunnel through Barrier) Gate Igate oxide leakage Igate In Nanometer-Transistors, where Tox< 2 nm Electrons Leakage Copyright Sill, 2008 x Tox Gate Gateoxide Source Tox Drain tunnel through gate oxide current Micro transductors ‘08, Low Leakage 17 Gate Oxide Thickness at 45 nm Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 18 Gate Oxide Leakage cont’d Components of Gate Oxide Leakage: Tunneling currents through overlap regions (gate-drain Igso, gatesource Igdo) Tunneling currents into channel (gate-drain Igis, gate-source Igcd) Tunneling currents between gate and bulk (Igb) Gate Source Igso Igcd Igcs Igdo Drain Igb Bulk Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 19 Drain Induced Barrier Lowering (DIBL) Vgs > Vth Vgs < Vth Vds Vds Gate Source Gate Drain Source Drain Potential Height of curve = Potential barrier Changed by gate voltage Electrons have to overcome potential barrier to enter the channel Ideal: Potential barrier is only controlled by gate voltage Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 20 Drain Induced Barrier Lowering cont’d Long-channel transistor (L > 2 µm) Short-channel transistor (L < 180 nm) Vds Vds G Gate Source S Drain D Lowering of potential barrier Vds = Vth Vds = Vth Vds = VDD Vds = VDD At short channel transistors potential barrier is also affected by drain voltage If Vds = VDD Transistors can start to conduct even if Vgs < Vth Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 21 Further Leakage Components Reverse bias pn junction conduction Ipn Gate induced drain leakage IGIDL Drain source punchthrough IPT Hot carrier injection IHCI IHCI Gate Source IGIDL Ipt Copyright Sill, 2008 Micro transductors ‘08, Low Leakage Drain Ipn 22 Leakage Dependencies Leakage depends on: Gate Width (Isub, Igate) Gate Length (Isub) Gate Oxide Thickness (Igate) Threshold Voltage (Isub) Temperature Input Copyright Sill, 2008 (Isub) state (Igate) Micro transductors ‘08, Low Leakage 23 Recap: Levels of Optimization Speed > 70 % Seconds > 50 % 40-70 % Minute 25-50 % 25-40 % Minutes 15-30 % Gate 15-25 % Hour 10-20 % Transistor 10-15 % Hours 5-10 % MEM System ALU MP3 Algorithm Architecture Copyright Sill, 2008 MEM Savings T1 T T S + Micro transductors ‘08, Low Leakage Error nach Massoud Pedram 24 Approaches to Reduce Leakage Approaches for different states Active states Idle states (passive) Components nothing to do Copyright Sill, 2008 have Components are working Micro transductors ‘08, Low Leakage 25 Approaches on Technology Level Retrograde well Different Concentration of dopant (implanted) inside the substrat Lowest concentration: near the channel Lower subthreshold leakage Highest concentration: near the bulk connection Gate Source n+ Reduced possibility for punchthrough Copyright Sill, 2008 Micro transductors ‘08, Low Leakage p-- p- p-- retrograde well n+ Drain p-- 26 Approaches on Technology Level cont’d Halo Implants High doped regions near source and drain areas Reduced Drain Induced Barrier Lowering Offset Spacer Gate Offset Spacer Silicon nitride placed beside gate area Reduced overlap regions Reduced gate leakage through overlap regions But: Increased channel resistance Copyright Sill, 2008 Source n+ Micro transductors ‘08, Low Leakage p-- p- p-- n+ Drain Halo Implants 27 Power & Delay Dependence of Vth VTH W P pt f CLK CL VDD 2 I 0 T 10 S VDD W0 td k Q k' CL VDD I (W / L ) (VDD VTH ) K w.o. gate leakage Source: Sakurai, ‘01 Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 28 Influence of Threshold Voltage Vth Threshold Voltage Vth: Influence on sub-threshold leakage Isub Influence on delay of logic gates 55 160 120 Isub 50 45 80 40 40 0 0.25 35 0.27 0.29 0.31 0.33 0.35 Dealy [ps] Leakage- -Isub Isub [nA] [nA] Leakage Inverter (BPTM 65 nm) 30 0.37 [V] [V] Threshold Voltage VthNMOS VoltageVthNMOS Threshold Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 29 Influence of Gate Oxide Thickness Tox Gate oxide Thickness Tox: Influence on gate oxide leakage Igate Influence on delay 160 50 120 45 Igate 40 80 35 40 30 0 25 1.4 1.6 1.7 1.8 2.0 Delay [ps] Leakage - Igate [nA] Inverter (BPTM 65 nm) 2.2 Gate oxide Thicknes Tox [nm] Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 30 Recap: Data Paths Data propagate through different data paths between registers (flipflops - FF) Paths mostly differ in propagation delay times Frequency of clock signal (CLK) depends on path with longest delay critical path FF FF FF FF FF FF Paths Path FF CLK Copyright Sill, 2008 FF CLK Micro transductors ‘08, Low Leakage FF CLK 31 Recap: Slack C A B G1 Y G2 A G1 ready with evaluation B Y all inputs of G2 arrived all Inputs of G1 arrived C delay of G1 Copyright Sill, 2008 Slack for G1 Micro transductors ‘08, Low Leakage time 32 Dual-Vth / Dual-Tox Two different gate types: “LVT / LTO”-Gates Gates consist of „low-Vth“- or „low-Tox“-transistors Low threshold voltage or thin gate oxide layer For critical paths High leakage “HVT / HTO”-Gate Gate consist of „high-Vth“- „high-Tox“-transistors High threshold voltage or thick gate oxide layer For uncritical paths Low leakage Leakage reduction at constant performance (no level converter necessary) Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 33 Normalized Performance Performance at different Dual-Vth 1.0 0.8 0.6 0.4 0.2 0.0 1.0V 0.9V Low Vth High Vth 0.8V 0.7V Supply Voltage VDD 0.6V Measured at NAND2 BPTM 65nm Technology Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 34 Sub-Threshold Lekage [nA] Leakage Isub at different Dual-Vth 80 60 40 20 0 1.0V 0.9V Low Vth High Vth 0.8V 0.7V 0.6V Supply Voltage VDD Measured at NAND2 BPTM 65nm Technology Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 35 Dual-Vth / Dual-Tox Example LVT- or LTO-Gates HVT- or HTO-Gates Critical Path Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 36 Dual-Vth / Dual-Tox at Transistor Level “low-Vth” or “low-Tox” transistors “high-Vth” or “high-Tox” transistors Critical path Better leakage reduction possible Much higher effort in design phase Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 37 Simultaneous Vt, Size and Vdd Assignment Leakage reduced through either increasing Vth or lowering VDD Lowering Vdd also reduces dynamic power Topological constraints on VDD assignment Requires use of voltage level converters Begin Topology Based Slack Distribution Delay Minimize All Paths Change VDD of Gates with Sufficient Slack Sensitivity Based Slack Distribution Change Gates With Sufficient Slack Assign VDD first then perform sizing/Vth assignment P Source: [Nguyen, et al., ISLPED03] Copyright Sill, 2008 Micro transductors ‘08, Low Leakage End 38 Stack Effect Transistor stack: at least two transistor from same type (NMOS or PMOS) in a row Based on behavior of internal nodes: The more transistors are non-conducting (off) the lower the leakage Leakage Isub [nA] 10 8 6 4 2 0 1 2 3 Transistors off in stack Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 4 Source: Roy, “Lecture” 39 Sleep Transistors Idea: Insertion of additional transistors between logic block and supply lines sleep This transistors: connect with SLEEPsignal Vdd Virtual Vdd If circuit has nothing to do: SLEEP signal is active: Stack effect (additional off transistor in row to other) If sleep transistors are High-Vth: approach also called Multi-Threshold CMOS (MTCMOS) Low-Vth logic cells sleep Virtual Vss Vss Mostly insertion only of 1 Transistor Source: Kaijian Shi, Synopsys Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 40 Sleep Transistors: Realization Ring style sleep transistor implementation Global VDD VDD VVDD1 domain VVDD2 domain Sleep transistors are placed around each VVDD island Source: Kaijian Shi, Synopsys Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 41 Sleep Transistors: Realization cont’d Grid style sleep transistor implementation Global VDD VVDD1 VDD VVDD2 VVDD1 VVDD2 VVDD1 VVDD2 VDD network cross chip; VVDD networks in each gating domain Sleep transistors are placed in grid connecting VDD and VVDDs Source: Kaijian Shi, Synopsys Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 42 Sleep Transistors: Problems VDD VDD CMOS Gatter / Block CMOS Gatter / Block high-Vth sleep transistor SLEEP R I Sleep transistor can be modeled as resistor R In active mode (gate is working) Current I through sleep transistor Voltage Vx drop over resistor Output voltage reduced to VDD-Vx VDD - Vx Vx = RI Current I is not leakage current! I is discharging current of load capacitance Reduced Delay (of following blocks) Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 43 Stackforcing Simple method of using stack effect Increasing stack by splitting transistors Cin stays constant Only one technology is needed Area is (almost) the same Drive strength (drain-source current) is reduced delay goes down VDD VDD WP/2 WP WP/2 WN/2 WN/2 Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 44 Normalized delay Stackforcing cont’d No Stackforcing Normalized Isub Source: Narendra, et al., ISLPED01 Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 45 Input Vector Control (IVC) Leakage of gate depends on input vector VDD Input vector In3 In2 In1 In1 In2 In3 TN3 TN2 TN1 Copyright Sill, 2008 Leakage [nA] Trans. off in NMOS-Stack 0 0 0 0,1 TN3, TN2, TN1 0 0 1 0,2 TN3, TN2 0 1 0 0,2 TN3, TN1 0 1 1 1,9 TN3 1 0 0 0,2 TN2, TN1 1 0 1 1,3 TN2 1 1 0 1,2 TN1 1 1 1 9,4 - Micro transductors ‘08, Low Leakage 46 Input Vector Control cont’d Every circuits is input vector with minimum leakage Idea: If design is in passive mode SLEEP signal gets active Sleep vector is applied Data MUX Logic Circuit Sleep Vector SLEEP Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 47 Pin Reordering BPTM, 65 nm technology VDD Input vector [In3,In2,In1] T3 T2 T1 |Igate,stack| 001 Igdo - Igcs, Igso, Igcd, Igdo → 65.9 nA 010 Igdo Igci, Igcs, Igdo, Igcd - ↑ 42.8 nA 100 - Igdo - ↓ 10.3 nA 101 - Igdo Igcs, Igso, Igcd, Igdo → 58.7 nA 110 - - Igdo ↓ 7.6 nA 011 Igdo Igci, Igso, Igdo, Igcd Igcs, Igso, Igcd, Igdo ↑ 116.0 nA Drain In3 T3 In2 T2 Igdo Igcd Igso In1 Igcs T1 Example Gate Leakage in stack depends on input vector Same logic input vector (amounts of ‘0’ and ‘1’ is equal) → can result in different leakage If input probability is know reorder pins so that highest probable state has minimum gate leakage Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 48 Variable Threshold CMOS (VTCMOS) Threshold voltage Vth depends on bulk voltage (Vbs) As leakage (Isub) and delay depends on Vth Delay and leakage (Isub) can be controlled over Vbs 5 8 4 delay 5 leakage power 2 1 -1,5 Copyright Sill, 2008 3 normalized delay VTCMOS: dynamic adjustment of frequency and Vth through backgate bias (=Vbs) control normalized power -0,5 -1 0 0,5 Back-gate Bias VBS [V] Micro transductors ‘08, Low Leakage 49 VTCMOS: VTH-hopping scheme Vth_high_enable Vth_low_enable VBSP1 Vth controller Frequency - controller fclk1 or fclk2 Power Control Block VBSP VBSP2 VDD VBSH1 GND VBSH2 Vth - Selector VBSH Target Processor Source: NOSE et al.: - VTH HOPPING SCHEME Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 50 Voltage islands + _ VDD1 VDD1 (MP3- Decoder) Lk Lk Lk VDD2 (Cache) Levelkonverter Level converter + _ VDD2 Lk + _ Copyright Sill, 2008 VDD3 (ROM) VDD4 (Processor) (Prozessor) Micro transductors ‘08, Low Leakage VDD4 VDD3 Lk Lk + _ fclk 51 Comparison of Approaches Approach Level Mode Pros Cons retrograde well Technology active / passive ↓Ipt Technology ++ Halo-Implants Technology active / passive ↓DIBL Technology ++ Offset spacer Technology active / passive ↓Igate ↑td, Technology ++ Sleep transistors Gate / System passive ↓↓ Isub ↑td + IVC Algorithm passive ↓Igate, ↓Isub - + Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 52 Comparison of Approaches cont’d Approach Level Mode Pros Cons DVTCMOS Transistor / Gate active / ↓Isub passive Technology + DTOCMOS Transistor / Gate active / ↓Igate passive Technology + Stack forcing Transistor active / ↓Isub passive ↑td o VTCMOS System passive ↓Isub / slow Routing + DVS System passive ↓Igate, ↓ / slow Isub - + DVDD Gate active / ↓Igate, passive ↓Isub Converter, Routing + Voltage islands Architecture passive ↓Igate, / slow ↓Isub Converter + Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 53 Backup Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 54 Stack Effect VDD T2 Vint Isub Vgs,2 Vbs,2 Vds,2 Vgs,2 Vint Vds,1 Isub T1 Vint Vth,1 Vbs,2 Vbs,1 Vds,1 Vds,2 Vgs,1 Vth,2 Low impact Copyright Sill, 2008 Micro transductors ‘08, Low Leakage 55