Download Yield Analysis and Product Quality

CSCE 932, Spring 2007
Yield Analysis and Product Quality
1
Yield Analysis & Product Quality
Yield, defect level, and manufacturing
cost
Clustered defects and yield model
Test data analysis
Example: SEMATECH chip
Summary
2
Test Performance
ALL CHIPS
Test
FAIL
Bad
Bad
Good/Bad?
Good
PASS
Bad
(Tester Yield)
Good/Bad?
Good
Good Tested Bad Tested
Good
As Bad
As Good
(Yield)
(Y
)
bg
(Yield Loss)
(Reject Rate or DPM)
(Overkill)
These two
items
determine the
tester
performance
3
Reject Rate (DPM) Basics
Reject Rate or Defectives per million (DPM) is a measure of
product quality
Zero DPM can be achieved by:
Perfect yield (100% yield => no bad parts)
Perfect test (100% coverage => all bad parts eliminated in testing,
all good parts passed)
Neither fabrication nor testing process is perfect hence
non-zero DPM is a fact of life.
DPM minimization is an important goal of quality-conscious
companies.
For commercial VLSI chips a DL greater than 500 dpm is
considered unacceptable.
4
Ways to Estimate DPM
Field-Return Data
Get customers to return all defective parts, then
analyze and sort them correctly to estimate DPM
DPM Modeling and Validation
Analytical approach using yield and test parameters
in the model to predict yield. Steps:
1.
2.
3.
4.
5.
Develop a model
Calibrate it (Determine parameter values)
Estimate the DPM
Verify against actual measurements
Recalibrate in time and for new designs or processes
5
VLSI Chip Yield and Cost
Manufacturing Defect: Chip area with electrically
malfunctioning circuitry caused by errors in the
fabrication process.
Good Chip: One without a manufacturing defect.
Yield (Y): Fraction (or percentage) of good chips
produced in a manufacturing process is called
the yield.
Chip Cost:
Cost of fabricatin g and testing a wafer
Yield  Number of chip sites on the wafer
6
Clustered VLSI Defects
Good chips
Faulty chips
Defects
Wafer
Unclustered defects
Wafer yield = 12/22 = 0.55
Clustered defects (VLSI)
Wafer yield = 17/22 = 0.77
7
Yield Modeling
Statistical model, based on distribution of defects on a
chip:
p(x) = Prob(number of defects on a chip = x)
Yield = p(0)
Empirical evidence shows that defects are not uniformly
randomly distributed but are clustered.
A form of negative binomial pdf is found to track well
with observed data.
8
Binomial and Negative
Binomial pdf
Bernoulli trials: A biased coin with
success probability = p is tossed
repeatedly.
Binomial: If the coin is tossed n times
what is the probability of x successes?
Negative Binomial: What is the
probability of x failures occurring before
the r-th success?
9
Mathematical Definitions
Binomial:
 n
p( x | n , p )    p x q( 1 x ) for x  0,1,...,n
 x
Negative Binomial*:
 r  x  1 r 1 x
 p q
p( x | r , p )  p
 x 
 r  x  1 r x
 p q
 
 x 
for x  0, 1, ..., where, q  ( 1-p)
* “Negative” comes from the fact the the distribution can also be written as
 r 
(1)r   ( p) r q x
 x
10
Generalized Negative Binomial
Distribution
When r is a non-integer, the above
interpretation breaks down but the form
is useful in modeling count data:
(r  x)
p( x | r , p ) 
pr q x
(r) (x  1)
for x  0, 1, ..., where, q  ( 1-p)
11
 For modeling the defect distribution we make
the following substitutions in the above eqn:
r ,
Ad / 
q
,
1  Ad / 
1
p
1  Ad / 
where,
d=
Defect density = Average number of
defects per unit of chip area
A=
Chip area
=
Clustering parameter
12
Defect Distribution Equation
p(x) = Prob(number of defects on chip =x)
(   x )
( Ad /  )

x 
(  )( x  1 ) ( 1  Ad /  )
x
13
Yield Equation
Y = Prob ( zero defect on a chip ) = p (0)
Y = ( 1 + Ad /  )  
Example: Ad = 1.0,  = 0.5, Y = 0.58
Unclustered defects:  =
Example: Ad = 1.0,  =
 , Y = e - Ad

, Y = 0.37
too pessimistic !
14
Determination of DL from Test
Data (Basic Idea)
Combine tester data:
#chips passing vs. test-pattern number
with the fault coverage data:
cum. fault coverage vs. test-pattern number to
derive the data:
#chips passing vs. fault coverage
Extend the defect model to a fault model
(yield of chips vs. fault coverage) and
determine its parameters by curve fitting.
15
Modified Yield Equation
Three parameters:
Fault density, f = average number of stuck-at
faults per unit chip area
Fault clustering parameter, b
Stuck-at fault coverage, T
The modified yield equation:
Y (T ) = (1 + TAf / b) - b
Assuming that tests with 100% fault coverage
(T =1.0) remove all faulty chips,
Y = Y (1) = (1 + Af / b) - b
16
Defect Level
Y (T ) - Y (1)
DL (T ) = -------------------Y (T )
b
( b + TAf )
= 1 - --------------------
( b + Af )
b
Where T is the fault coverage of tests,
Af is the average number of faults on the
chip of area A, b is the fault clustering
parameter. Af and b are determined by
test data analysis.
17
Example: SEMATECH Chip
Bus interface controller ASIC fabricated and tested at
IBM, Burlington, Vermont
116,000 equivalent (2-input NAND) gates
304-pin package, 249 I/O
Clock: 40MHz, some parts 50MHz
0.45m CMOS, 3.3V, 9.4mm x 8.8mm area
Full scan, 99.79% fault coverage
Advantest 3381 ATE, 18,466 chips tested at 2.5MHz
test clock
Data obtained courtesy of Phil Nigh (IBM)
18
Stuck-at fault coverage
Test Coverage from Fault
Simulator
Vector number
19
Measured chip fallout
Measured Chip Fallout
Vector number
20
Chip fallout and computed 1-Y (T )
Model Fitting
Chip fallout vs. fault coverage
Y (1) = 0.7623
Measured chip fallout
Y (T ) for Af = 2.1 and b = 0.083
Stuck-at fault coverage, T
21
Computed DL
Defect level in ppm
237,700 ppm (Y = 76.23%)
Stuck-at fault coverage (%)
22
Summary
VLSI yield depends on two process parameters,
defect density (d ) and clustering parameter ()
Yield drops as chip area increases; low yield means
high cost
Fault coverage measures the test quality
Defect level (DL) or reject ratio is a measure of
chip quality
DL can be determined by an analysis of test data
For high quality: DL < 500 ppm, fault coverage ~
99%
23