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Memorandum of Understanding
Materials Fabrication and Nano-Characterization Lab
Department of Engineering Physics
As to the use of the facility located in EGH 122, Materials Fabrication and NanoCharacterization Lab, Department of Engineering Physics, University of Wisconsin-Platteville, in
addition to signing the “UNIVERSITY OF WISCONSIN-PLATTEVILLE UNIFORM STATEMENT OF
RESPONSIBILITY, RELEASE, AND AUTHORIZATION FOR USE OF UNIVERSITY FACILITIES”, all users
must agree to the following protocols:
1. Users are only promised access to the stated facility and only use of the specific equipment in
that facility outlined under “Description of Event” in the agreement document sited above.
2. Use of the facility is only promised for the time period stated in the agreement document
sited above.
3. Users are expected to follow all rules as to procedures, safety precautions/practices, and
wearing of ‘clean’ garments as pre-determined.
4. Users understand that others may be present in the facility during their reserved time period;
albeit not using the reserved equipment.
5. Users requiring chemicals other than acetone, IPA, and DI water will be allowed to bring in to
the facility other chemicals however any chemical brought into the facility is the user’s
responsibility to include proper use, labeling, storage, and waste disposal. Unused portions of
any chemical brought in to the facility must be taken with the user upon completion. Safety
Data Sheets must also accompany any chemicals brought in to the facility and those
precautions must be followed.
6. The lease is only for use of the specified equipment with or without assistance and training.
Users should not expect assistance in the analysis of the results in any way.
7. The fees are determined using the “Estimate of Total Cost” table attached to this document.
Given the hours of usage is only an estimate, the final charge is similarly only an estimate.
8. The user will be invoiced monthly for use of the facilities with payment due upon receipt of
invoice. Checks shall be made payable to the University of Wisconsin-Platteville and sent to:
Financial Services
2200 Ullsvik Hall
1 University Plaza
Platteville, WI 53818
We acknowledge reading this document and understand and accept the terms as stated:
Signature of Users: ____________________ , ___________________, ____________________
Signature of UWP Materials Fabrication & Nano-Characterization Lab Manager:
______________________
Estimate of Total Cost
User(s):______________________, ________________________
Date: ___/___/______
Material Fabrication
Instrument
Self Use # hrs
($/hr)
Chemical hood, spinner, lithogrphy
$25
hotplates, etc.
Anantech Hummer 6.6 Sputter Coater
$25
(gold targets $10/hr extra)
Nordson MARCH Reactive Ion Etching $25
Thermal Evaporator
$25
Vacuum Oven
$0
Canon PLA-501A Mask Aligner
$15
Novascan UV Ozone cleaning system
$0
Sonoplot Microplotter
$20
Nano-Characterization
Instrument
Self Use # hrs
($/hr)
NanoSurf AFM (new tips $20 ea)
$20
AsylumResearch MFP -3D AFM
$35
Hitachi TM-1000 SEM
$20
Hitachi SU1510 SEM
$45
Olympus BX-51 100X Microscope
$0
Olymus IX71Microscope with
$25
Qimaging EXi Blue fluorescence
camera
Dektak XT Stylus profilometer
$25
Ocean Optics UV-Vis Spectrometer
$15
Contact angle goniometer
$15
OptoPro 622 MEMS profiler and probe $20
station
Staff Assisted &
Training ($/hr)
$45
#
hrs
cost
#
hrs
cost
$45
$45
$45
$40
$45
$20
$45
Staff Assisted &
Training ($/hr)
$45
$65
$45
$65
$45
$45
$45
$45
$45
$45
Tot
=